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Data Processing: Generic Control Systems Or Specific Applications > Specific Application, Apparatus Or Process > Product Assembly Or Manufacturing > Performance Monitoring

Performance Monitoring

Performance Monitoring patent applications listed are from June 2005 to current and include Date, Patent Application Number, Patent Title, Patent Abstract summary and are linked to the corresponding patent application page.

12/14/06 - 20060282188 - Remote maintenance system
Factories (102-104) have host computers (107) for monitoring industrial equipment (106). Each host computer (107) is connected to a management host computer (108) on a vendor (101) side through the internet (105). The host computer (107) on the factory side detects occurrence of a trouble of the industrial equipment (106) ...

11/30/06 - 20060271225 - Method and system for advanced process control including tool dependent machine constants
A controller and a method of controlling a process tool is provided, in which machine constants used for calibrating manipulated variables of the control algorithm are explicitly introduced into the process model, thereby providing an enhanced controller behavior immediately after the introduction of new measurement values of the machine constants. ...

11/16/06 - 20060259177 - Method and system for aggregating and combining manufacturing data for analysis
A method and system for aggregating and combining manufacturing data for analysis for the purposes of increasing manufacturing efficiency and reducing manufacturing downtime due to abnormal conditions. An embodiment provides for a method of dividing an entire manufacturing process into parts and further into subparts for the purposes of tracking ...

11/02/06 - 20060247816 - Optical metrology model optimization for process control
To evaluate the adequacy of a profile model, one or more types of process control to be used in controlling a fabrication process are selected. Profile model parameters and acceptable ranges for the profile model parameters are selected. A first and second metrology tools are selected. Statistical metric criteria that ...

10/19/06 - 20060235558 - Method of scavenging intermediate formed by reaction of oxidoreductase with substrate
A process system 1 comprises a process apparatus 10 which performs a predetermined process on a wafer W, a plurality of detection means which detect statuses in the process apparatus 10, an abnormality detection section 15 which detects an abnormality in detection information from the plurality of detection means, an ...

10/05/06 - 20060224266 - Cutting device
A cutting device having cutting means for cutting a cigarette rod transversely along a cutting plane; a carriage for accompanying the rod through the cutting plane; an operating unit for moving the carriage back and forth in a travelling direction crosswise to the cutting plane; and a control unit, in ...

10/05/06 - 20060224265 - Substrate processing apparatus, history information recording method, history information recording program, and history information recording system
A substrate processing apparatus, which includes a plurality of process chambers for processing a substrate and a transfer part for carrying in and carrying out the substrate to and from the plurality of process chambers, includes a transfer history recording part, a process history recording part, and an alarm history ...

09/07/06 - 20060200261 - Automated manufacturing control system
An automated manufacturing control system is proposed to greatly reduce the human interaction relative to the data transfer, physical verification and process control associated with the movement of components, tooling and operators in a manufacturing system. This is achieved by the use of data carriers which are attached to the ...

08/31/06 - 20060195213 - Method of operating an advanced process controller by dynamically adapting hierarchy levels
By providing a detailed hierarchical structure for an APC algorithm and by dynamically adapting a hierarchical level in this structure, an efficient utilization of controller data is ensured, while at the same time a large number of process conditions may be taken into consideration without requiring a re-design of the ...

08/31/06 - 20060195212 - Automated throughput control system and method of operating the same
An automated throughput control system and method is provided. By gathering tool specific information of a plurality of process tools on entity level, appropriate throughput related performance characteristics may be calculated with high statistical significance during moderately short time intervals. Moreover, the performance characteristics obtained from tool information may be ...

08/31/06 - 20060195211 - Method of process control
The present invention relates to a method of run-to-run control of a manufacturing process. A plurality of runs of the manufacturing process is performed. In each of the runs, a value of a process input is applied to the manufacturing process. A measured value of a process output of the ...

08/17/06 - 20060184264 - Fault detection and classification (fdc) using a run-to-run controller
A method for implementing FDC in an APC system including receiving an FDC model from memory; providing the FDC model to a process model calculation engine; computing a vector of predicted dependent process parameters using the process model calculation engine; receiving a process recipe comprising a set of recipe parameters, ...

08/03/06 - 20060173568 - Manufacturing system performance analysis tool software architecture
A software tool for manufacturing system performance analysis includes modeling and analysis functions. A modeling isolation layer provides user access to the analysis capabilities through object-based model building and analysis invocations. Various model, performance and higher level analyses are performed through analysis modules kept separate from any end-user application programs ...

07/20/06 - 20060161285 - System, method, and article of manufacture for determining a productivity rate of a manufacturing system
A system, method, and article of manufacture for determining a productivity rate of a manufacturing system are provided. The manufacturing system has a first and second manufacturing cells. The first and second manufacturing cells has first and second machines, respectively. The method includes predicting a first cycle time indicating a ...

07/13/06 - 20060155411 - Model based testing for electronic devices
The model-based method tests compliance of production devices with the performance specifications of a device design. The production devices are manufactured in accordance with the device design by a manufacturing process. In the method, a simple model form based on the device design and the performance specifications is developed, a ...

07/13/06 - 20060155410 - Spilt-phase chamber modeling for chamber matching and fault detection
In at least one embodiment, the present invention is a method for thin-film process chamber data analysis, which includes acquiring chamber data, defining an adjustment portion of the chamber data and a steady-state portion of the chamber data, and forming a chamber model having an adjustment portion and a steady-state ...

07/13/06 - 20060155409 - Material handling system enabling enhanced data consistency and method thereof
Material handling systems that enable enhanced data consistency, and methods thereof, are disclosed. Behavior and life cycle of a semiconductor product for a material handling system are modeled in a set of finite states and trigger paths. A trigger event corresponding to a second finite state is generated when a ...

07/13/06 - 20060155408 - Quality control method for two-dimensional matrix codes on metallic workpieces, using an image processing device
The invention relates to a quality control method for two-dimensional matrix codes on metallic workpieces, said codes consisting of stamped marking dots. The stamping process for the marking dots is carried out by a marking tool (17) with the aid of predetermined digital positional data. The corresponding image data is ...

07/06/06 - 20060149407 - Quality management and intelligent manufacturing with labels and smart tags in event-based product manufacturing
Providing quality management and intelligent manufacturing with labels and smart tags in event-based product manufacturing. Some of the disclosed embodiments include a system, method, and computer-readable media for storing, during a process, data associated with a material. Also disclosed are a method of collecting, storing, and reporting machine productivity, waste, ...

06/29/06 - 20060142888 - Process monitoring device for sample processing apparatus and control method of sample processing apparatus
A plasma processing apparatus for processing a sample within a vacuum vessel, including: a plurality of sensors for detecting plural kinds of information relating to a processing state of the sample as monitor data; data selecting means for selecting a detection time range of the monitor data thus detected which ...

06/15/06 - 20060129263 - Method and system for controlling tool process parameters
A system for controlling process parameters. The system contains first and second storage devices, and first and second processors. The first storage device stores first process parameters for the tools. The first processor retrieves the first process parameters from the first storage device and calculates a control limit for each ...

05/25/06 - 20060111802 - Fabrication system and fabrication method
A fabricating method for a system including a plurality of processing apparatuses connected to each other by an inter-apparatus transporter. The semiconductor waters are processed in the processing apparatuses and are transported to specified processing apparatuses in different time interval that are set to N times a unit time interval. ...

05/11/06 - 20060100731 - Information processing device, operation state management device, information processing method, program, and computer-readable storage medium storing program
An information processing device is provided for facilitating analysis of operation states of production facilities. The information processing device includes: an operation state acquisition unit that sequentially acquires operation information indicating operation of a production facility on a production line and stop information indicating stop of the facility, for each ...

05/11/06 - 20060100730 - Method for detection and relocation of wafer defects
A method of locating and characterizing defects on semiconductor using a scanner device and a high-magnification imaging device comprises the steps of scanning (A) a test wafer a plurality of times with the scanner device, recording the scanner device coordinates of defects and the markers in the standard patterns, analyzing ...

04/13/06 - 20060079983 - R2r controller to automate the data collection during a doe
A system and a computer-implemented method of operating a processing system in which a process model is selected from a menu of process models available from the processing system. In the module and method, an experiment is designed having a number of process runs for characterization of the selected process ...

04/06/06 - 20060074507 - Information providing method and system
An information providing system includes a reception unit that receives first information concerning a process to be performed by an apparatus from a customer via a network, a processing unit which simulates the process based on the first information and prepares second information based on a result of the simulation, ...

03/30/06 - 20060069459 - Industrial control and monitoring system status visualization method and system
Embodiments of the present invention relate to a system and method of industrial control and monitoring status visualization. In accordance with embodiments of the present techniques, a system view for a networked system may be provided comprising an expandable component tree. The expandable component tree may comprise at least one ...

03/09/06 - 20060052899 - Rotary desiccant feeder method and apparatus
A method and apparatus for efficient dispensing of desiccant canisters into containers is disclosed. The apparatus includes a microprocessor that monitors a plurality of sensors, and applies control signals to a servomotor that controls a rotary disc that transports desiccant canisters from a drop chute to containers. The containers pass ...

03/09/06 - 20060052898 - Maintenance opportunity planning system and method
A system, method, and apparatus are provided for maintenance opportunity planning in a production line having a plurality of machines and buffers between machines on the production line, with the buffers processing production units between at least two of the machines. The system, method, and apparatus advantageously indicates maximum allowed ...

03/09/06 - 20060052897 - System and method for semiconductor manufacturing automation
The present disclosure provides a method and system for semiconductor manufacturing automation. In one example, a method for semiconductor manufacturing automation comprises providing an identification table; defining a scheduled sequence; recording a performed sequence; and issuing a warning, if the scheduled sequence does not match the performed sequence. ...

03/02/06 - 20060047355 - Method and apparatus for adjusting characteristics of multi-layer electronic components
A method for adjusting the characteristics of multi-layer electronic components according to the present invention includes a determination process S21 for determining the characteristics of a multi-layer electronic component, a calculation process S22 for calculating the required amount of trimming on the basis of the result of determination obtained in ...

03/02/06 - 20060047354 - Prediction of the degree of delivery realiability in serial production
In an exemplary embodiment of the present invention, a method for determining effects of cycle time limitations for sub-processes of a production process for individual units of a technical product is provided. In the method of the exemplary embodiment, there is set: a pre-selected definition of the order of sequence ...

02/16/06 - 20060036345 - Systems and method for lights-out manufacturing
Complex process control and maintenance are performed utilizing a nonlinear regression analysis to determine optimal tool-specific adjustments based on operational metrics, process adjustments and maintenance activities. ...

01/19/06 - 20060015205 - System of machine maintenance
A system for remote maintenance for a machine. Using an imaging device, such as a digital camera, the customer can transmit images of the machine to an off-site expert and receive real-time information related to the assembly, installation, repair or maintenance of the machine. ...

01/05/06 - 20060004475 - Incrementally accruing product and component quality and tracking data in the manufacturing of devices
The compilation of product and component quality and tracking data for a manufactured device is facilitated. Software modules are provided that collect and transmit data regarding components, products, assembly, and testing to a central database for compilation, storage, and maintenance. A graphical user interface may be provided to assist a ...

12/29/05 - 20050288810 - Automatic statistical process control (spc) chart generation apparatus and method thereof
A system and method for automatic SPC chart generation including a storage device and a data acquisition module. The storage device stores a chamber management tree, a recipe window management tree, a parameter configuration table and multiple chart profile records. The data acquisition module, which resides in a memory, acquires ...

12/15/05 - 20050278052 - Generating a reliability analysis by identifying causal relationships between events in an event-based manufacturing system
Analyzing an event chronology record to permit identification of periods of a production sequence that correspond to a high probability of failure. Systems and methods include receiving an event chronology for a particular machine in the production sequence and for a particular time interval. A reliability analysis system accesses process ...

12/15/05 - 20050278051 - Process control by distinguishing a white noise component of a process variance
A method, system and medium is provided for enabling improved control systems. An error, or deviation from a target result, is observed for example during manufacture of semiconductor chips. The error within standard deviation is caused by two components: a white noise component and a signal component (such as systematic ...

11/17/05 - 20050256601 - System to and method of monitoring condition of process tool
A system to and method of monitoring a condition of a process tool. The system monitors a condition of a process tool to correctly detect a faulty operation or malfunction of the process tool. The system to monitor the condition of the process tool includes a first model storage unit ...

11/10/05 - 20050251276 - System and method for real-time fault detection, classification, and correction in a semiconductor manufacturing environment
A system and method for detecting a fault and identifying a remedy for the fault in real-time in a semiconductor product manufacturing facility are provided. In one example, the method includes importing data from a manufacturing device and data representing a plurality of different manufacturing devices into an analysis tool. ...

11/03/05 - 20050246044 - System and method for optimizing metrology sampling in apc applications
A system and method for optimizing metrology sampling rates in an advanced process control (APC) application. A method is provided for processing a run of workpieces, the method comprising the steps of: providing a database comprising subgroups of data representing characteristics from previously processed workpieces; selecting a first subgroup of ...

09/29/05 - 20050216114 - Method for providing control to an industrial process using one or more multidimensional variables
A method for controlling an industrial process. The method includes outputting a plurality of parameters from a process for manufacture of a substance. The method also uses each of the plurality of parameters in a computer aided process, which compares at least two of the plurality of parameters against a ...

09/29/05 - 20050216113 - Fabrication monitoring system
System and method for monitoring a fabrication process. Generally, an actual-to-planned variance is calculated by determining a daily part index as a percentage of the delta between the planned quantity and the actual quantity over the planned quantity. A weekly part index is calculated by averaging the daily part index ...

09/22/05 - 20050209723 - Method for yield improvement of manufactured products
A method of yield improvement for manufactured products includes providing an identification plan for parts and processing equipment, whereby each part and each piece of equipment is given unique and traceable identification data. A database is provided into which the parts identification data and the processing equipment identification data are ...

09/08/05 - 20050197727 - Remote maintenance system
Factories (102-104) have host computers (107) for monitoring industrial equipments (106). Each host computer (107) is connected to a management host computer (108) on a vendor (101) side through the internet (105). The host computer (107) on the factory side detects occurrence of a trouble of the industrial equipment (106) ...

09/01/05 - 20050192695 - Manufacturing system, measurement data collecting system, and measurement terminal apparatus
A manufacturing system has an inspection data collecting apparatus that is capable of carrying out, upon receipt of a signal containing measurement data in different formats according to the type of inspection or a measuring instrument, processing in accordance with the signal and the format of data to create data ...

09/01/05 - 20050192694 - Method and system for aggregating and combining manufacturing data for analysis
A method and system for aggregating and combining manufacturing data for analysis for the purposes of increasing manufacturing efficiency and reducing manufacturing downtime due to abnormal conditions. An embodiment provides for a method of dividing an entire manufacturing process into parts and further into subparts for the purposes of tracking ...

08/11/05 - 20050177263 - System and method for monitoring wafer furnace production efficiency
A system for monitoring wafer throughput per hour in a wafer furnace includes a database, an analysis unit, a comparison unit, and an output unit. The database includes two or more operation histories of the wafer furnace. The analysis unit is coupled to the database. The analysis unit includes logic ...

08/04/05 - 20050171626 - System, method, and medium for monitoring performance of an advanced process control system
A method for monitoring performance of an advanced process control system for at least one process output includes calculating a variance of a prediction error for a processing performance and/or a probability for violating specification limits of the processing performance of the at least one process output. If the variance ...

07/14/05 - 20050154482 - Plasma processing method and apparatus
In a plasma processing method for monitoring data, first and second measurement data are obtained; and a first and a second model are formulated based on the first and the second measurement data. Further, third measurement data is obtained; and weight factors are obtained by setting the third measurement data ...

06/30/05 - 20050143851 - Method and system for monitoring batch product manufacturing
A system and method for monitoring product through a batch manufacturing plant is provided. The system includes, a parallel flow mode when product flows concurrently from at least two units to a single unit; and a serial flow mode where product flows from one unit to another at a given ...

06/16/05 - 20050131566 - Method and device for guaranteeing an authorised and process-optimised use of semi-finished pieces in a production unit
A method and device for guaranteeing an authorized and process-optimized use of semi-finished pieces for product generation in a production unit are disclosed. In order to guarantee that semi-finished pieces not released for production or similar cannot be processed unknowingly, said method comprises the following steps: reading calibration data for ...

06/09/05 - 20050125090 - Method and apparatus for evaluating processing apparatus status and predicting processing result
A method for predicting a processing result includes a process of performing a principal component analysis on a plurality of detected data obtained during a first standard processing, to construct a principal component analysis model; a process of obtaining residuals of the principal component analysis model as first residuals; a ...

06/02/05 - 20050119776 - Process control system
A process control system for controlling a production process includes a data generating system that generates at least first data regarding first products produced in a previous process and second data regarding parts used in a next process. The first data and the second data are related to link information ...



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