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Superconductor Technology: Apparatus, Material, Process > Processes Of Producing Or Treating High Temperature (tc Greater Than 30 K) Superconductor Material Or Superconductor Containing Products Or Precursors Thereof > Coating > Vapor Deposition > Sputtering

Sputtering

Sputtering patent applications listed are from June 2005 to current and include Date, Patent Application Number, Patent Title, Patent Abstract summary and are linked to the corresponding patent application page.

10/27/05 - 20050239660 - Oxide sintered body, sputtering target, transparent conductive thin film and manufacturing method therefor
There is provided an amorphous transparent conductive thin film with a low resistivity, a low absolute value for the internal stress of the film, and a high transmittance in the visible light range, an oxide sintered body for manufacturing the amorphous transparent conductive thin film, and a sputtering target obtained ...



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