Work Rotating

Work Rotating patent applications listed are from June 2005 to current and include Date, Patent Application Number, Patent Title, Patent Abstract summary and are linked to the corresponding patent application page.

03/15/07 - 20070060031 - Polishing head elbow fitting
An improvement is provided for a TITAN HEAD wafer carrier having an annular inflatable tube for exerting pressure on the edge of a perforated plate during wafer dechucking, and a flexible plastic tube for supplying pressure to the annular inflatable tube. The improvement comprises a fixed elbow fitting secured to ...

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