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Abrading > Work Holder > Vacuum VacuumVacuum patent applications listed are from June 2005 to current and include Date, Patent Application Number, Patent Title, Patent Abstract summary and are linked to the corresponding patent application page.02/01/07 - 20070026772 - Apparatus for use in processing a semiconductor workpiece The present invention provides a chuck for receiving and supporting a semiconductor workpiece for processing. The chuck includes a body for supporting the workpiece. The body is porous or has a plurality of openings, apertures or channels. A compressible corrosion resistant member is disposed around the outer periphery of the ... 04/20/06 - 20060084371 - Wafer chuck The influence of the slurry generated when polishing an orientation notch and the like is minimized. The holding members 10, 20 for holding the outer periphery of the wafer W and the driving mechanism 30 for driving the holding members 10, 20 all together in the closing direction are integrally ... 12/01/05 - 20050266783 - Retaining rings, planarizing apparatuses including retaining rings, and methods for planarizing micro-device workpieces Retaining rings, planarizing apparatuses including retaining rings, and methods for mechanical and/or chemical-mechanical planarization of micro-device workpieces are disclosed herein. In one embodiment, a carrier head for retaining a micro-device workpiece during mechanical or chemical-mechanical polishing includes a workpiece holder configured to receive the workpiece and a retaining ring carried ... ### FreshPatents.com Support |