REGISTER now for FREE 
|
FREE patent keyword monitoring and additional FREE benefits. REGISTER now for FREE
|
|
|
Abrading > Machine > Combined > Scouring Or Polishing Means Scouring Or Polishing MeansScouring Or Polishing Means patent applications listed are from June 2005 to current and include Date, Patent Application Number, Patent Title, Patent Abstract summary and are linked to the corresponding patent application page.08/31/06 - 20060194525 - Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion A polishing method usable in an apparatus including a rotatable member rotatable about a first axis, at least one substrate head assembly supported on said rotatable member, and at least two polishing surfaces arranged below said rotatable member at respective angular positions about said first axis is described. In one ... 07/07/05 - 20050148292 - Method and apparatus for polishing a copper layer and method for forming a wiring structure using copper In a method and apparatus for polishing a Cu metal layer and a method for forming Cu metal wiring, Cu oxide created by a surface oxidation of a Cu metal layer is removed from the wafer. The Cu metal layer, in which Cu oxide is removed, is polished. By polishing ... ### FreshPatents.com Support |