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Abrading > Abrading Process > Combined Abrading > Utilizing Mounted Rigid Abrading Tool Only

Utilizing Mounted Rigid Abrading Tool Only

Utilizing Mounted Rigid Abrading Tool Only patent applications listed are from June 2005 to current and include Date, Patent Application Number, Patent Title, Patent Abstract summary and are linked to the corresponding patent application page.

06/09/05 - 20050124266 - End effectors and methods for manufacturing end effectors with contact elements to condition polishing pads used in polishing micro-device workpieces
End effectors, apparatuses including end effectors for conditioning planarizing pads, and methods for manufacturing end effectors with contact elements to condition planarizing pads used in polishing micro-device workpieces are disclosed herein. In one embodiment, an end effector includes a member having a first surface and a plurality of generally uniformly ...



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