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Semiconductor Device Manufacturing: Process > Gettering Of Substrate > By Implanting Or Irradiating > Ionized Radiation (e.g., Corpuscular Or Plasma Treatment, Etc.) Ionized Radiation (e.g., Corpuscular Or Plasma Treatment, Etc.)Ionized Radiation (e.g., Corpuscular Or Plasma Treatment, Etc.) patent applications listed are from June 2005 to current and include Date, Patent Application Number, Patent Title, Patent Abstract summary and are linked to the corresponding patent application page.11/16/06 - 20060258123 - Wafer gettering using relaxed silicon germanium epitaxial proximity layers One aspect of this disclosure relates to a method for creating proximity gettering sites in a semiconductor wafer. In various embodiments of this method, a relaxed silicon germanium region is formed to be proximate to a device region on the semiconductor wafer. The relaxed silicon germanium region generates defects to ... 05/04/06 - 20060094211 - Method of hydrogenating a poly-silicon layer A method of hydrogenating a poly-silicon layer is disclosed, which is used to improve characteristics of a thin film transistor (TFT) having a poly-silicon thin film. In the method, the poly-silicon layer is first subject to a plasma pre-process and then a hydrogenating process is undertaken thereon where a hydrogen-containing ... 02/23/06 - 20060040474 - Low oxygen content photoresist stripping process for low dielectric constant materials A plasma containing 5-10% oxygen and 90-95% of an inert gas strips photoresist from over a low-k dielectric material formed on or in a semiconductor device. The inert gas may be nitrogen, hydrogen, or a combination thereof, or it may include at least one of nitrogen, hydrogen, NH3, Ar, He, ... 12/08/05 - 20050272227 - Plasma processing apparatus and method There is provided a plasma processing apparatus including a plasma generating unit for generating a plasma in a processing chamber in which a set processing is performed on a substrate serving as an object to be processed. The plasma processing apparatus further includes a particle moving unit for electrostatically driving ... ### FreshPatents.com Support |