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Semiconductor Device Manufacturing: Process > Making Passive Device (e.g., Resistor, Capacitor, Etc.) > Trench Capacitor > Including Doping Of Trench Surfaces

Including Doping Of Trench Surfaces

Including Doping Of Trench Surfaces patent applications listed are from June 2005 to current and include Date, Patent Application Number, Patent Title, Patent Abstract summary and are linked to the corresponding patent application page.

06/29/06 - 20060141732 - Method for forming isolation region in semiconductor device
A method for forming an isolation region in a semiconductor device such as a photodiode forms depletion layers at boundary regions between N-type regions of the photodiode and an ion injection layer in which P-type impurity ions are injected. Depletion layers are also formed between the N-type regions of the ...

06/22/06 - 20060134877 - Method for fabricating a buried conductive connection to a trench capacitor and a memory cell with such a connection
A buried conductive connection to a trench capacitor is formed in such a way that a contact area is provided between a conductive material layer which is arranged in the trench of the trench capacitor and contains a dopant and a semiconductor substrate between a first and a second predetermined ...

03/30/06 - 20060068559 - Method of fabricating capacitor
A method of fabricating a capacitor is described. A dielectric layer is formed over a substrate. An upper electrode having multiple openings therein is formed over the dielectric layer. Then, a doping step is performed to the substrate through the openings to form a single doped region as a lower ...

09/08/05 - 20050196932 - Method of creating deep trench capacitor using a p+ metal electrode
The present invention comprises a method including the steps of providing a substrate; forming a trench in the substrate; forming a buried plate in the substrate about the trench; depositing a dielectric layer within the trench; and then depositing a P-type metal atop the dielectric layer, where the dielectric layer ...



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