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Semiconductor Device Manufacturing: Process > Making Field Effect Device Having Pair Of Active Regions Separated By Gate Structure By Formation Or Alteration Of Semiconductive Active Regions > Having Schottky Gate (e.g., Mesfet, Hemt, Etc.) > Self-aligned

Self-aligned

Self-aligned patent applications listed are from June 2005 to current and include Date, Patent Application Number, Patent Title, Patent Abstract summary and are linked to the corresponding patent application page.

12/21/06 - 20060286728 - Method for forming recess gate of semiconductor device
A method for forming a recess gate of a semiconductor device secures a sufficient overlap margin between a recess gate region and a gate electrode to prevent a phenomenon resulting from mis-alignment when a recess gate electrode is formed, thereby improving process defects and minimizing Vt movement between cells. ...

11/17/05 - 20050255641 - Semiconductor device and method of manufacturing the same
It is an object to suppress a change in a characteristic of a semiconductor device with a removal of a hard mask while making the most of an advantage of a gate electrode formed by using the hard mask. A gate electrode (3) is formed by etching using a hard ...

11/10/05 - 20050250268 - Method of fabricating semiconductor device
An implantation step of a dopant ion for forming source and drain regions (S and D) is divided into one implantation of a dopant ion for forming a p/n junction with a well region (3), and one implantation of a dopant ion that does not influence a position of the ...



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