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Heating > Work Chamber Having Heating Means > Means Supplying A Protective Or Treating Agent Other Than Or Additional To Air

Means Supplying A Protective Or Treating Agent Other Than Or Additional To Air

Means Supplying A Protective Or Treating Agent Other Than Or Additional To Air patent applications listed are from June 2005 to current and include Date, Patent Application Number, Patent Title, Patent Abstract summary and are linked to the corresponding patent application page.

10/19/06 - 20060234178 - Apparatus and method for heating substrate and coating and developing system
A substrate heating apparatus includes a top plate arranged above a hot plate so that a vertical space is formed between the hot plate and the top plate. The top plate has an evacuated internal chamber serving as a vacuum insulating layer that suppresses heat transfer from a first surface ...



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