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Radiation Imagery Chemistry: Process, Composition, Or Product Thereof > Effecting Frontal Radiation Modification During Exposure, E,g., Screening, Masking, Stenciling, Etc. > Involving Motion During Exposure, E.g., Dodging, Etc.

Involving Motion During Exposure, E.g., Dodging, Etc.

Involving Motion During Exposure, E.g., Dodging, Etc. patent applications listed are from June 2005 to current and include Date, Patent Application Number, Patent Title, Patent Abstract summary and are linked to the corresponding patent application page.

12/14/06 - 20060281032 - Lithographic apparatus and device manufacturing method for writing a digital image
First pluralities of radiation spots generated by an array of individually controllable elements are exposed on a substrate. The radiation spots are equally spaced across an entire area of the substrate to be exposed. The substrate is then shifted relative to the array of individually controllable elements in a direction ...



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