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Radiation Imagery Chemistry: Process, Composition, Or Product Thereof > Radiation Modifying Product Or Process Of Making Radiation Modifying Product Or Process Of MakingRadiation Modifying Product Or Process Of Making patent applications listed are from June 2005 to current and include Date, Patent Application Number, Patent Title, Patent Abstract summary and are linked to the corresponding patent application page.07/13/06 - 20060154150 - Arrangement for the production of photomasks An arrangement and a method for the production of photomasks in which at least one defect control system is connected to at least one repair system by a stationary data connection or online connection, and the defect control system and repair system are connected to one another by data in ... 12/15/05 - 20050277029 - Microstructured pattern inspection method The edges of the reticle are detected with respect to the microstructured patterns exposed by the stepper, and the shapes of the microstructured patterns at the surface and at the bottom of the photoresist are detected. The microstructured patterns are evaluated by calculating, and displaying on the screen, the dislocation ... 12/15/05 - 20050277028 - Laser apparatus, laser irradiation method, manufacturing method for semiconductor device, semiconductor device, production system for semiconductor device using the laser apparatus, and electronic equipment Provided are a laser apparatus of continuous oscillation that is capable of enhancing the efficiency of substrate processing, a laser irradiation method, and a manufacturing method for a semiconductor device using the laser apparatus. A portion of a semiconductor film that should be left on a substrate after patterning is ... 09/29/05 - 20050214651 - Aperture plate for optical lithography systems A pupil aperture plate situated on a light path of an optical lithography system for providing specific illumination patterns is disclosed. The pupil aperture plate includes a plate body having thereon a pole aperture (defined by σinner) located at the center of the plate. A set of four sector apertures, ... 08/25/05 - 20050186483 - Method for determining a map, device manufacturing method, and lithographic apparatus A method according to one embodiment of the invention includes determining a map of a second part of a substrate belonging to a group of substrates. The method includes measuring a first part of at least one substrate belonging to the group to create an average profile map or average ... ### FreshPatents.com Support |