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Coating Processes > Measuring, Testing, Or Indicating > Thickness Or Uniformity Of Thickness Determined Thickness Or Uniformity Of Thickness DeterminedThickness Or Uniformity Of Thickness Determined patent applications listed are from June 2005 to current and include Date, Patent Application Number, Patent Title, Patent Abstract summary and are linked to the corresponding patent application page.02/01/07 - 20070026134 - Method for in situ photoresist thickness characterization An in situ photoresist thickness characterization process and apparatus characterizes a photoresist process used for processing a semiconductor wafer. Photoresist is dispensed on a spinning semiconductor wafer as part of the characterization process. The thickness of the photoresist is monitored at a plurality of locations on the spinning semiconductor wafer ... 02/01/07 - 20070026133 - Method and apparatus for monitoring a pattern of an applied liquid A method for monitoring the quality of a pattern of fluid beads applied to a moving substrate measures time delays between the passage of a reference point on a substrate element and leading and trailing edges of a bead, the quality of which is to be measured. A time delay ... 07/06/06 - 20060147613 - Deposition system and method for measuring deposition thickness in the deposition system A method of measuring a deposition thickness of a deposited material includes measuring an deposition rate of a material effused from an effusion cell using a sensor and calculating the deposition thickness of the material deposited on a substrate using a conversion formula that employs the measured deposition rate and ... ### FreshPatents.com Support |