FREE patent keyword monitoring and additional FREE benefits. /images/triangleright (1K) REGISTER now for FREE triangleleft (1K)
Fresh Patents
Monitor Patents Patent Organizer File a Provisional Patent Browse Inventors Browse Industry Browse Agents Browse Locations


Material Or Article Handling > Apparatus For Charging A Load Holding Or Supporting Element From A Source, And Means For Transporting And Presenting Element To A Working, Treating, Or Inspecting Station

Apparatus For Charging A Load Holding Or Supporting Element From A Source, And Means For Transporting And Presenting Element To A Working, Treating, Or Inspecting Station

Apparatus For Charging A Load Holding Or Supporting Element From A Source, And Means For Transporting And Presenting Element To A Working, Treating, Or Inspecting Station patent applications listed are from June 2005 to current and include Date, Patent Application Number, Patent Title, Patent Abstract summary and are linked to the corresponding patent application page.

10/11/07 - 20070237609 - Apparatus for storing and moving a cassette
A cassette stocker includes a plurality of cassette storage shelves positioned adjacent a cleanroom wall and vertically disposed relative to a plurality of cassette docking stations, and a cassette mover to carry a cassette between the shelves and the docking stations. An interstation transfer apparatus includes a support beam and ...

10/04/07 - 20070231112 - Pod cramping unit, load port equipped with pod cramping unit and mini-environment system including pod and load port
The invention is directed to a pod cramping unit for fixing a pod to a support table in a load port, the pod including a pod body capable of storing a wafer in the interior thereof and having an opening through which the wafer is to be taken out of/brought ...

08/30/07 - 20070201967 - Reduced capacity carrier, transport, load port, buffer system
A semiconductor workpiece processing system having at least one processing apparatus for processing workpieces, a primary transport system, a secondary transport system and one or more interfaces between first transport system and second transport system. The primary and secondary transport systems each have one or more sections of substantially constant ...

05/03/07 - 20070098527 - Equipment storage for substrate processing apparatus
A substrate processing apparatus has a frame and a load port connected to the frame and adapted to mate a substrate transport container to the frame. The apparatus has transportable storage that is adapted to be removably connected to the frame and fit beneath the load port. The storage may ...

04/05/07 - 20070077135 - Articulated arm transport device
The invention relates to an articulated arm transport device which is especially provided for the automation of large component transfer presses. Said articulated arm transport device is characterized by a kinematics and design that do not require any additional clearance between the press rams and pillars and that permit an ...

03/29/07 - 20070071582 - System to transfer a template transfer body between a motion stage and a docking plate
The present is directed towards an imprint lithography system including, inter alia, a docking plate; a motion stage having a range of motion associated therewith, the range of motion having a periphery spaced-apart from the docking plate a first distance; and a body, having first and second opposed sides spaced-apart ...

02/22/07 - 20070041813 - Floating unit, and an article support apparatus having floating units
A floating unit comprises: a stationary portion; a movable portion supported to be movable relative to the stationary portion and including an article support; a support disposed between the stationary portion and the movable portion, the support having a plurality of rolling elements rotatably held by a holder between an ...

01/11/07 - 20070009345 - Load port module
A substrate loading device having a frame, a cassette support, and a user interface. The frame is connected to a substrate processing apparatus. The frame has a transport opening through which substrates are transported between the device and processing apparatus. The cassette support is connected to the frame for holding ...

12/28/06 - 20060291982 - Substrate conveyor apparatus, substrate conveyance method and exposure apparatus
The present invention pertains to a substrate conveyor apparatus that carries a substrate such as a reticle, a substrate conveyance method and an exposure apparatus, with the object of reliably adhering a substrate to the lower surface of a chuck. The present invention is characterized by having a movable stage ...

11/23/06 - 20060263179 - Apparatus having a supporting surface
The invention relates to an apparatus (1) having at least one supporting surface (3) for containers (4) and having a device. This device serves to load or unload and comprises a part (11), which can be slid onto the supporting surface (3) and withdrawn therefrom and which has a drive ...

08/17/06 - 20060182543 - Order picking station and order picking method
An order picking station (30) to which storage containers (34) can be transported via a storage container conveyor line (36) and from which order containers (40), into which articles (38a, 38b) from the storage containers (34) are picked by an order picking person (32), can be transported away via an ...

05/18/06 - 20060104751 - Production line
Provided is a production line which allows easy interchange of and maintenance on production devices and which is compact with a short line length. Split bases 3 for respective production devices 2 arranged in a production line are formed in a uniform unit module width W, and the production devices ...

03/09/06 - 20060051185 - Method and device for feeding reels to a machine
A device (2) for feeding reels (3) has a manipulator (14) having a gripping member (19) for picking up one reel (3) at a time off a pallet (16) and transferring the reel (3) to an unwinding pin (4a; 4b) on a machine (1); the gripping member (19) is enabled ...

03/02/06 - 20060045670 - Stocker driving system and stocker driving method using the same
Disclosed is a stocking system that effectively copes with contingencies such as a sudden increase in the number of units to be stocked or malfunctions that render a port disabled. The stocking system includes a plurality of input ports and output ports that are operated automatically, and in input/output port ...

02/09/06 - 20060029489 - Apparatus for storing and moving a cassette
A cassette stocker includes a plurality of cassette storage shelves positioned adjacent a cleanroom wall and vertically disposed relative to a plurality of cassette docking stations, and a cassette mover to carry a cassette between the shelves and the docking stations. An interstation transfer apparatus includes a support beam and ...

01/26/06 - 20060018737 - Automated material handling system
An automated material handling system includes a plurality of bays, a continuous conveyer and at least one vehicle. Each bay has a plurality of tools and a stocker. The stocker is a rectangular solid having a first long side and a second long side. The first long side equips with ...

01/19/06 - 20060013674 - Methods and apparatus for repositioning support for a substrate carrier
In a first aspect, a first method is provided repositioning support provided by an end effector. The first method includes the steps of (1) employing the end effector to support a substrate carrier by a bottom of the substrate carrier; (2) transferring the substrate carrier from the end effector to ...

01/12/06 - 20060008342 - Device and method for transporting wafer-shaped articles
An apparatus for treating wafer-shaped articles includes at least one linear arranged array of a plurality of at least two process units wherein in each such process unit one single wafer-shaped article can be treated, a cassette-holding unit for holding at least one cassette storing at least one wafer-shaped article ...

07/28/05 - 20050163600 - Loading system for a machining station
The invention refers, among others, to a loading system for a machining station which machines on work pieces, the loading system having a loading device which interacts with a pallet carrying the work piece. Several swivelling levers are arranged on the loading device in a way that they can be ...

06/23/05 - 20050135905 - Glass substrate transporting facility
Glass substrates are transported to a plurality of processing devices to be processed. Certain of the processing devices have associated storage shelf for storing glass substrates and a transfer device. The transfer device is adapted to move the glass substrate between the processing device and the storage shelf and between ...

06/23/05 - 20050135904 - Bwr inspection manipulator
A reactor service manipulator delivery system supported on a remotely operated trolley that travels on top of a track attached to the steam dam of a BWR shroud. The trolley has a mast and pulley system designed to manipulate a TV camera for inspection of various reactor components inboard and ...



###

FreshPatents.com Support