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Material Or Article Handling > Chamber Of A Type Utilized For A Heating Function And Material Charging Or Discharging Means Therefor > Charging Of Chamber

Charging Of Chamber

Charging Of Chamber patent applications listed include Date, Patent Application Number, Patent Title, Patent Abstract summary and are linked to the corresponding patent application page.

03/06/14 - 20140064885 - Cover opening/closing apparatus, thermal processing apparatus using the same, and cover opening/closing method
Provided is a cover opening/closing apparatus which includes: a wafer conveyance port having an opening edge and configured to be opened/closed by an opening/closing door; and a cover removal apparatus installed on the opening/closing door and configured to remove a cover of a FOUP which is formed with a substrate...

02/14/13 - 20130039723 - Device for distributing bulk material with a distribution spout supported by a cardan suspension
A distribution device for distributing bulk material with a distribution spout on a cardan suspension that has a first and a second gimbal member pivotable about two perpendicular suspension axes where a drive arrangement has a first and a second transmission mechanism for controlling pivotal motion of the distribution spout...

01/31/13 - 20130028687 - Heat treatment apparatus and method of transferring substrates to the same
A heat treatment apparatus includes a vessel loading unit on which a substrate vessel configured to accommodate a plurality of substrates at a first interval is loaded, a substrate holder configured to hold the plurality of substrates at a second interval which is smaller than the first interval, a substrate...

10/25/12 - 20120269603 - Loading unit and processing system
A loading unit which elevates a substrate holder holding a plurality of substrates to be subjected to heat treatment with respect to a cylindrical processing container whose bottom portion is opened and closed by a cap, includes, a loading housing, an elevator mechanism elevating the substrate holder, a shutter closing...

08/30/12 - 20120219387 - Thermal curing methods and systems for forming contact lenses
Contact lens curing systems and methods are described. A contact lens curing system includes an oven that has a plurality of curing zones, a mold advancement system for moving contact lens mold assemblies between the plurality of zones, and a controlled atmosphere the curing zones that provides a substantially chemically...

08/23/12 - 20120213613 - Wafer boat assembly, loading apparatus comprising such a wafer boat assembly and method for loading a vertical furnace
a second wafer boat part comprising a second cover part removably provided on the first wafer boat part and configured to cooperate with the first cover part, said second cover part comprising receiving slots for receiving at least a semiconductor substrate to be processed....

07/05/12 - 20120170999 - Load lock device and processing system
A load lock device is connected between a vacuum chamber and an atmospheric chamber through gate valves and the interior thereof is selectively switchable between a vacuum atmosphere and an atmospheric pressure atmosphere. The load lock device includes: a load lock container; a support unit provided in the load lock...

03/31/11 - 20110076116 - Solid fuel conveyance and injection system for a gasifier
A system for use in a gasification system, comprises a solid pump that delivers a pressurized fuel and a high-pressure transition vessel. The transition vessel comprises a first inlet connected to an outlet of the solid pump so that all of the fuel from the solid pump passes through the...

03/17/11 - 20110064543 - Reaction vessel and method for the handling thereof
A cuvette (10) for an automatic analyzing apparatus according to the invention comprises at least two positions (20), for each position pair one separating wall (22) connecting the positions (20), and brackets (24), which are at the outermost positions (20) and which are adapted to guide the cuvette (10) into...

06/10/10 - 20100143079 - Vacuum processing apparatus
A vacuum treatment apparatus is provided with a plurality of carriers whereupon a base material is mounted; a circulation path which is held in a controlled atmosphere and permits the carriers to circulate therein; a plurality of base material exit/entrance chambers arranged in the circulation path for loading and taking...

06/10/10 - 20100143080 - Device and method for loading and unloading a heat treatment furnace
The invention relates to a device for loading and unloading a heat treatment furnace and to a corresponding method. Heat treatment furnaces are normally loaded and unloaded by means of a so-called elevator. During unloading, a removed workpiece is usually lowered by means of the elevator into an oil bath,...

04/29/10 - 20100104402 - High temperature sheet handling system and methods
Methods and apparatus provide for imparting a controlled supply of gas to at least one Bernoulli chuck to provide a balanced draw and repellant gas flow to a material sheet; and at least one of: elevating a temperature of the supply of gas to the at least one Bernoulli chuck...

04/22/10 - 20100098517 - Processing apparatus and processing method
A processing apparatus including: a carry-in area into which a container containing substrates to be processed is carried, the container having a flange part on an upper part thereof and an opening in a front surface thereof, with a lid being detachably fixed to the opening; a transfer area whose...

03/11/10 - 20100061828 - Vertical thermal processing apparatus
The present invention is a processing apparatus comprising a transfer mechanism including at least one transfer plate, the transfer mechanism being configured to cause, when a substrate to be processed is placed on an upper surface of the transfer plate, the transfer plate to move while maintaining the substrate to...

10/15/09 - 20090257849 - Apparatus and method for loading particulate material into vertical tubes
An apparatus and method for loading particulate material in a vertical tube comprising at least one impact-absorbing module, a central axis and a sustaining wire to position the apparatus suspended in the interior of the tube in such a way as to allow loading and uniform distribution of all the...

06/04/09 - 20090142162 - Substrate treating apparatus with inter-unit buffers
The invention provides coating units, heat-treating units, and a first main transport mechanism for transporting substrates to each of these treating units. The substrates are transferred from the first main transport mechanism to a second main transport mechanism through a receiver. When a substrate cannot be placed on the receiver,...