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Material Or Article Handling > Chamber Of A Type Utilized For A Heating Function And Material Charging Or Discharging Means Therefor

Chamber Of A Type Utilized For A Heating Function And Material Charging Or Discharging Means Therefor

Chamber Of A Type Utilized For A Heating Function And Material Charging Or Discharging Means Therefor patent applications listed are from June 2005 to current and include Date, Patent Application Number, Patent Title, Patent Abstract summary and are linked to the corresponding patent application page.

10/26/06 - 20060239799 - Holder manufacturing method for loading substrate of semiconductor manufacturing device, batch type boat having holder, loading/unloading method of semiconductor substrate using the same, and semiconductor manufacturing device having the same
A holder manufacturing method for loading a substrate of a semiconductor manufacturing device, a batch type boat having the holder, a loading/unloading method of a semiconductor substrate using the same, and a semiconductor manufacturing device having the same are disclosed. For example, the manufacturing method of the holder of the ...

07/07/05 - 20050147488 - Method of transporting semiconductor device and method of manufacturing semiconductor device
To prevent semiconductor chips from adhering to the trays during transport, a method is employed which transports semiconductor chips in the following state. When trays provided with a plurality of accommodating portions having a recessed cross section for accommodating semiconductor chips on a main surface thereof are stacked in a ...



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