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Radiant Energy > Inspection Of Solids Or Liquids By Charged Particles > Methods

Methods

Methods patent applications listed include Date, Patent Application Number, Patent Title, Patent Abstract summary and are linked to the corresponding patent application page.

10/23/14 - 20140312224 - Pattern inspection method and pattern inspection apparatus
A first differential image of a defect observation region including an observation target pattern is generated by a differential value between signals from electron detectors arranged in a direction of edges of the observation target pattern. A three-dimensional shape of a defect is obtained by subjecting the first differential image...

10/23/14 - 20140312225 - Defect inspection apparatus and defect inspection method
There is provided a defect inspection apparatus including: an electron scanning unit configured to scan a surface of a sample with an electron beam; a plurality of detectors arranged around an optical axis of the electron beam and configured to detect electrons emitted from the surface of the sample by...

10/23/14 - 20140312226 - Charged-particle microscope providing depth-resolved imagery
A method of examining a sample using a charged-particle microscope, comprising mounting the sample on a sample holder; using a particle-optical column to direct at least one beam of particulate radiation onto a surface S of the sample, thereby producing an interaction that causes emitted radiation to emanate from the...

10/16/14 - 20140306108 - Method of collecting and processing electron diffraction data
A method of using electron diffraction to obtain PDFs from crystalline, nanocrystalline, and amorphous inorganic, organic, and organometallic compound....

10/16/14 - 20140306109 - Method for detecting defect of substrate
A method for detecting defects includes irradiating at least one electron beam into a first region of a substrate, irradiating at least one electron beam into a second region electrically connected to the first region, and detecting secondary electrons emitted from the second region. The electron beam irradiated into the...

10/09/14 - 20140299767 - Charged particle beam device and measuring method using the same
In an SEM provided with an ExB deflector for deflecting secondary electrons outside an optical axis of a primary electron beam between an electronic source and an object lens for condensing the primary electron beam and irradiating a sample with the beam, a unit to decelerate the secondary electrons deflected...

10/02/14 - 20140291509 - Charged particle beam apparatus and method for forming observation image
A focused ion beam apparatus includes a lens interferometer configured to detect a relative position of an ion beam column and a sample. An image forming section includes an irradiation position specifying section configured to specify an irradiation position of an ion beam based on the detected relative position of...

10/02/14 - 20140291510 - Charged particle beam apparatus
The present invention provides apparatuses to inspect small particles on the surface of a sample such as wafer and mask. The apparatuses provide both high detection efficiency and high throughput by forming Dark-field BSE images. The apparatuses can additionally inspect physical and electrical defects on the sample surface by form...

10/02/14 - 20140291511 - Charged particle beam apparatus and sample processing method using charged particle beam apparatus
A charged particle beam apparatus includes a sample stage, a focused ion beam column, a scattered electron detector that detects backscattered electrons generated from a cross-section of a sample, a crystal orientation information generation unit that generates crystal orientation information on a predetermined region of the cross-section, and an angle...

10/02/14 - 20140291512 - Focused ion beam apparatus and method of working sample using the same
A focused ion beam apparatus includes: an image generation unit which generates a sample image including location detection marks formed on a sample based on secondary charged particles generated with emission of a focused ion beam to a sample; a display unit which displays a sample image; and a control...

09/25/14 - 20140284475 - Incoherent transmission electron microscopy
A transmission electron microscope includes an electron beam source to generate an electron beam. Beam optics are provided to converge the electron beam. A specimen holder is provided to hold a specimen in the path of the electron beam. A detector is used to detect the electron beam transmitted through...

09/18/14 - 20140264016 - Measurement of line-edge-roughness and line-width-roughness on pre-layered structures
Measurements of line roughness are separated into groups depending upon pre-layers. Image data collected from similar pre-layer types are considered together in order to separate effects of line roughness from distortion of measurements caused by the pre-layers. The resulting line roughness measurements are used to estimate an aspect of line...

09/18/14 - 20140264017 - Transmission electron microscope, and method of observing specimen
Provided is means which enables observation of the shape of a specimen as it is without deforming the specimen. Observation is made by allowing a specimen-holding member having an opening (for example, microgrid and mesh) to hold an ionic liquid and charging a specimen thereto, to allow the specimen to...

09/18/14 - 20140264018 - Observation specimen for use in electron microscopy, electron microscopy, electron microscope, and device for producing observation specimen
The electrical charging by a primary electronic is inhibited to produce a clear edge contrast from an observation specimen (i.e., a specimen to be observed), whereby the shape of the surface of a sample can be measured with high accuracy. An observation specimen in which a liquid medium comprising an...

09/11/14 - 20140252226 - Apparatus and method for performing microdiffraction analysis
An apparatus for detecting one or each of Kikuchi and Kossel diffraction patterns is provided. The apparatus comprises an electron column adapted in use to provide an electron beam (101) directed to wards a sample (102), the electron beam (101) having an energy in the range 2 keV to 50...

09/11/14 - 20140252227 - Charged particle beam irradiation system and charged particle beam irradiation planning method
A charged particle beam irradiation system includes: an irradiation unit configured to irradiate an irradiation target with a charged particle beam; a radiation resistance state measuring section configured to measure a radiation resistance state of the irradiation target; a region dividing section configured to divide the irradiation target into a...

09/04/14 - 20140246583 - Inspection or observation apparatus and sample inspection or observation method
Provided is an inspection apparatus or observation apparatus enabling appropriate inspection or observation of a sample in an easy-to-use manner, using a charged-particle technique and an optical technique. Specifically, provided is an inspection or observation apparatus including: a first casing forming at least part of a first space constituting at...

08/28/14 - 20140239175 - Focused ion beam low kv enhancement
The invention provides a charged particle beam system wherein the middle section of the focused ion beam column is biased to a high negative voltage allowing the beam to move at higher potential than the final beam energy inside that section of the column. At low kV potential, the aberrations...

08/28/14 - 20140239176 - Method of electron beam imaging of a specimen by combining images of an image sequence
A method of imaging of a specimen exposed to an electron beam signal includes acquiring an image sequence of sequential images of the specimen. Each subsequent image in the image sequence represents increased cumulative electron beam signal exposure on the specimen. The method includes collecting cumulative exposure data for each...

08/21/14 - 20140231644 - In situ reactivation of fluorescence marker
Vapor is provided locally at a sample surface to allow fluorescence of the fluorescent markers in a vacuum chamber. For example, a nanocapillary can dispense a liquid near a region of interest, the liquid evaporating to increase the vapor pressure near the fluorescent markers. The increase in vapor pressure at...

08/14/14 - 20140224985 - Focusing a charged particle imaging system
A charged particle beam focusing apparatus includes a charged particle beam generator configured to project simultaneously at least one non-astigmatic charged particle beam and at least one astigmatic charged particle beam onto locations on a surface of a specimen, thereby causing released electrons to be emitted from the locations. The...

08/14/14 - 20140224986 - Pattern measurement device and pattern measurement method
A pattern measurement device includes: a storage section storing mask edge data of a circuit pattern and image data obtained by imaging the circuit pattern; an SEM contour extracting section receiving the image data, SEM contour of the circuit pattern, and cause an exposure simulator to generate estimated SEM contour...

08/14/14 - 20140224987 - Methods of fabricating microelectronic substrate inspection equipment
Microelectronic substrate inspection equipment includes a gas container which contains helium gas, a helium ion generator which is disposed in the gas container and converts the helium gas into helium ions and a wafer stage which is disposed under the gas container and on which a substrate to be inspected...

08/07/14 - 20140217283 - Tem sample preparation
An improved method of preparing ultra-thin TEM samples that combines backside thinning with an additional cleaning step to remove surface defects on the FIB-facing substrate surface. This additional step results in the creation of a cleaned, uniform “hardmask” that controls the ultimate results of the sample thinning, and allows for...

07/17/14 - 20140197310 - Method of analyzing a sample and charged particle beam device for analyzing a sample
The invention refers to a method and a charged particle beam device for analyzing an object using a charged particle beam interacting with the object. The object comprises a sample embedded in a resin. Interaction radiation in the form of cathodoluminescence light is detected for identifying areas in which the...

07/17/14 - 20140197311 - Sample carrier for an electron microscope
The invention provides a solution to shadowing by forming the parts of the grid bordering the interface between sample and grid as tapering parts....

07/17/14 - 20140197312 - Electron microscope and sample observation method
The Foucault mode which is one method in Lorentz electron microscopy is required making a plurality of observations such as when reselecting the deflection components of the electron beam to form an image. This method not only required making plurality of adjustments to the optical system but was also incapable...

07/10/14 - 20140191125 - Sample block holder
A sample holder assembly includes a sample tray, a base plate, a stage mount, and a calibration standard mounted onto the stage mount. Three mating structures on the bottom of the base plate mate with corresponding structures on a stage mount that is attached to the sample stage of the...

07/10/14 - 20140191126 - Method of depositing protective structures
A process of preparing a lamella from a substrate includes manufacturing a protection strip on an edge portion of the lamella to be prepared from the substrate, and preparing the lamella, wherein the manufacturing the protection strip includes a first phase of activating a surface area portion of the substrate,...

07/10/14 - 20140191127 - Contamination reduction electrode for particle detector
A charged particle detector arrangement is described. The detector arrangement includes a detection element and a collector electrode configured to collect charged particles released from the detection element upon impact of signal charged particles....

07/03/14 - 20140183356 - Integrated method to analyze crystals in deposits
A method to analyze crystals in a deposit on a surface of a nuclear generating station heating surface, wherein the method extracts a sample of material from the surface of the nuclear generating station heating surface and also includes conducting at least one of a high resolution scanning electron microscope/energy...

07/03/14 - 20140183357 - Process for performing automated mineralogy
A method and system for determining the mineral content of a sample using an electron microscope. The method includes directing an electron beam toward an area of interest of a sample, the area of interest comprising an unknown composition of minerals. The working distance between the backscattered electron detector of...

06/26/14 - 20140175277 - Secondary electron optics and detection device
A secondary charged particle detection system for a charged particle beam device is described. The detection system includes a beam splitter for separating a primary beam and a secondary beam formed upon impact on a specimen; a beam bender for deflecting the secondary beam; a focusing lens for focusing the...

06/19/14 - 20140166879 - Backscatter reduction in thin electron detectors
In a direct electron detector, backscattering of electrons into the detector volume from below the sensor is prevented. In some embodiments, an empty space is maintained below the sensor. In other embodiments, a structure below the sensor includes geometry, such as multiple high aspects ratio channels, either extending to or...

06/19/14 - 20140166880 - On-chip thin film zernike phase plate and applications thereof
The present invention provides an on-chip thin film phase plate for a releasing charging, comprising a chip substrate having one or more apertures; and a thin film layer attached to the top surface of the chip substrate. The present invention also provides a method for observing organic material by TEM,...

06/12/14 - 20140158884 - Method for operating a particle beam device and/or for analyzing an object in a particle beam device
A method for operating a particle beam device and/or for analyzing an object in a particle beam device are provided. For example, the particle beam device is an electron beam device, an ion beam device, or a combination device having an electron beam device and an ion beam device. In...

06/12/14 - 20140158885 - Testing apparatus using charged particles and device manufacturing method using the testing apparatus
A system for further enhancing speed, i.e. improving throughput in a SEM-type inspection apparatus is provided. An inspection apparatus for inspecting a surface of a substrate produces a crossover from electrons emitted from an electron beam source 25•1, then forms an image under a desired magnification in the direction of...

06/05/14 - 20140151551 - Methods and apparatus for measurement of relative critical dimensions
One embodiment relates to a method of measuring a relative critical dimension (RCD) during electron beam inspection of a target substrate. A reference image is obtained. A region of interest is defined in the reference image. A target image is obtained using an electron beam imaging apparatus. The target and...

06/05/14 - 20140151552 - Tilt-imaging scanning electron microscope
One embodiment relates to a tilt-imaging scanning electron microscope apparatus. The apparatus includes an electron gun, first and second deflectors, an objective electron lens, and a secondary electron detector. The first deflector deflects the electron beam away from the optical axis, and the second deflector deflects the electron beam back...

06/05/14 - 20140151553 - Charged particle beam device, method for adjusting charged particle beam device, and method for inspecting or observing sample
A charged particle beam device capable of observing a sample in an air atmosphere or gas atmosphere has a thin film for separating the atmospheric pressure space from the decompressed space. A vacuum evacuation pump evacuates a first housing; and a detector detects a charged particle beam (obtained by irradiation...

05/29/14 - 20140145077 - Method of performing tomographic imaging of a sample in a charged-particle microscope
The invention relates to a method of performing tomographic imaging of a sample comprising providing a beam of charged particles; providing the sample on a sample holder that can be tilted; in an imaging step, directing the beam through the sample to image the sample; repeating this procedure at each...

05/29/14 - 20140145078 - Scanning electron microscope and a method for imaging a specimen using the same
(1) part or all of the number, coordinates and size/shape and imaging sequence of imaging points each for observation, the imaging position change method and imaging conditions can be calculated automatically from CAD data, (2) a combination of input information and output information for imaging recipe creation can be set...

05/15/14 - 20140131572 - Automated sample oreintation
A method for aligning a sample that is placed in the vacuum chamber so that the sample is oriented normal to the focused ion beam is disclosed. The locations of different spots on the sample surface are determined using a focusing routine. The locations of the different spots are used...

05/15/14 - 20140131573 - System and method for simultaneous detection of secondary electrons and light in a charged particle beam system
A method and system for the imaging and localization of fluorescent markers such as fluorescent proteins or quantum dots within biological samples is disclosed. The use of recombinant genetics technology to insert “reporter” genes into many species is well established. In particular, green fluorescent proteins (GFPs) and their genetically-modified variants...

05/15/14 - 20140131574 - Control imaging methods in advanced ultrafast electron microscopy
An optical system includes a beam splitter disposed along an optical axis and a set of mirrors optically coupled to the beam splitter. The set of mirrors are oriented perpendicular to each other. The optical system also includes a turning mirror optically coupled to a second mirror of the set...

05/15/14 - 20140131575 - Cross-section processing and observation method and cross-section processing and observation apparatus
A cross-section processing and observation method performed by a cross-section processing and observation apparatus, the method comprising: a cross-section processing step of forming a cross-section by irradiating a sample with an ion beam; a cross-section observation step of obtaining an observation image of the cross-section by irradiating the cross-section with...

05/01/14 - 20140117230 - Mineral identification using mineral definitions including variability
An improved mineral analysis system includes mineral definitions that include not only characteristics of the minerals, but also variability in those characteristics. The variabilities allow the calculation of ranges of expected values for different quality of measurements, for example, for different numbers of x-ray counts. Match probabilities can therefore be...

05/01/14 - 20140117231 - Automated mineral classification
The present invention discloses a combination of two existing approaches for mineral analysis and makes use of the Similarity Metric Invention, that allows mineral definitions to be described in theoretical compositional terms, meaning that users are not required to find examples of each mineral, or adjust rules. This system allows...

05/01/14 - 20140117232 - Scanning electron microscope, an interface and a method for observing an object within a non-vacuum environment
An interface, a scanning electron microscope and a method for observing an object that is positioned in a non-vacuum environment. The method includes: generating an electron beam in the vacuum environment; scanning a region of the object with the electron beam while the object is located below an object holder;...

05/01/14 - 20140117233 - Retarding field analyzer integral with particle beam column
A retarding field analyzer uses the existing components of a charged particle beam system eliminating the need for inserting a separate retarding field analyzer device. Using components of the existing column reduces the time required to analyze the beam. Using the imaging capabilities of the existing column facilitates alignment of...

04/24/14 - 20140110577 - Particle beam system and method of processing a tem-sample
wherein α denotes a first angle between the first direction and the axis; and then directing of the first particle beam onto the object region from the first direction; wherein material is removed from the object during the directing of the first particle beam onto the object region. Furthermore, a...