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Methods

Methods patent applications listed include Date, Patent Application Number, Patent Title, Patent Abstract summary and are linked to the corresponding patent application page.

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Radiant Energy


Inspection Of Solids Or Liquids By Charged Particles > Methods



Method for imaging a sample in a charged particle apparatus
12/11/14 - 20140361165 - The invention shows how, by biasing the stage with respect to the grounded electrodes closest to the sample, these disadvantages are eliminated, or at least reduced....

Interface, a method for observing an object within a non-vacuum environment and a scanning electron microscope
12/11/14 - 20140361166 - An interface, a scanning electron microscope and a method for observing an object that is positioned in a non-vacuum environment. The method includes: passing at least one electron beam that is generated in a vacuum environment through at least one aperture out of an aperture array and through at least...

Transmission electron microscope sample fabrication
12/04/14 - 20140353497 - A method of preparing a transmission electron microscopy (TEM) sample from a semiconductor structure may include milling a region of the semiconductor structure with a focused ion beam and generating the transmission electron microscopy (TEM) sample. The focused ion beam providing the milling may include a rotation angle relative to...

System and method of sem overlay metrology
12/04/14 - 20140353498 - The present disclosure is directed to a method of performing SEM overlay metrology with scan direction substantially aligned with or parallel to feature placement or patterning of overlay target structures. By scanning target structures in the same or similar direction to the feature placement, blurring at the edges of interest...

Sample holder for electron microscope
12/04/14 - 20140353499 - A sample holder for an electron microscope has multiple sample stands, can allow at least one sample stand to move, and enables multiple samples for a transmission electron microscope to be prepared by a focused ion beam apparatus. A holder tip opening is provided in a tip of the sample...

Drawing apparatus, and method of manufacturing article
11/27/14 - 20140346349 - The present invention provides a drawing apparatus for performing drawing on a substrate with a charged particle beam, the apparatus comprising an optical system configured to irradiate the substrate with the charged particle beam, a substrate stage configured to hold the substrate, an aperture member provided with the substrate stage,...

Multi-column electron beam inspection that uses custom printing methods
11/27/14 - 20140346350 - A method of testing for photomask print errors includes dividing a photomask print into sub-regions and inspecting each sub-region with a different (e.g., electron) beam column, each sub-region aligned with a beam column axis during a calibration process. The different sub-regions may be inspected on different photomask prints on a...

Orientation imaging using wide angle convergent beam diffraction in transmission electron microscopy
11/27/14 - 20140346351 - Methods of orientation imaging microscopy (OIM) techniques generally performed using transition electron microscopy (TEM) for nanomaterials using dynamical theory is presented. Methods disclosed may use a wide angle convergent beam electron diffraction for performing OIM by generating a diffraction pattern having at least three diffraction discs that may provide additional...

Sample supporting member for observing scanning electron microscopic image and method for observing scanning electron microscopic image
11/27/14 - 20140346352 - When injection of electrons into a sample supporting member causes a potential gradient between an insulative thin film and a conductive thin film at a site of electron beam injection, the potential barrier of the surface of the insulative thin film becomes thin, and an electron emission phenomenon is caused...

Charged particle vortex wave generation
11/27/14 - 20140346353 - A device for imparting an orbital angular momentum to a charged particle wave propagating along a beam axis in a charged particle beam generating apparatus is described. The device comprises a support element having a target region adapted for transmitting a charged particle wave propagating along a beam axis and...

Generation of charged particle vortex waves
11/27/14 - 20140346354 - A device is arranged for imparting an orbital angular momentum to a charged particle wave propagating along an axis in a charged particle beam generating apparatus. The device includes a first conductive element comprising a plurality of angularly spaced electrical conductors arranged around the axis, and a second conductive element....

Electron microscope
11/27/14 - 20140346355 - An electron microscope is provided. In another aspect, an electron microscope employs a radio frequency which acts upon electrons used to assist in imaging a specimen. Furthermore, another aspect provides an electron beam microscope with a time resolution of less than 1 picosecond with more than 105 electrons in a...

Scanning electron beam device and dimension measurement method using same
11/20/14 - 20140339425 - A scanning electron beam device having: a deflector (5) for deflecting an electron beam (17) emitted from an electron source (1); an objective lens (7) for causing the electron beam to converge; a retarding electrode; a stage (9) for placing a wafer (16); and a controller (15); wherein the stage...

Electron beam interference device and electron beam interferometry
11/13/14 - 20140332684 - There is a limit in range and distance in which an electron beam can interfere and electron interference is implemented within a range of a coherence length. Therefore, interference images are consecutively recorded for each interference region width from an interference image of a reference wave and an observation region...

Detecting high atomic number materials with cosmic ray muon tomography
11/13/14 - 20140332685 - A method is proposed herein to detect high atomic number materials, such as Special Nuclear Materials, within a container based on muon tomography. The container is modeled as a plurality of volume elements. Information related to an initial trajectory and a final trajectory of each muon passing through the container...

Method of using a phase plate in a transmission electron microscope
11/06/14 - 20140326876 - The invention relates to a method of using a phase plate, having a thin film, in a transmission electron microscope (TEM), comprising: introducing the phase plate in the TEM; preparing the phase plate by irradiating the film with a focused electron beam; introducing a sample in the TEM; and forming...

Source for selectively providing positively or negatively charged particles for a focusing column
11/06/14 - 20140326877 - A single column charged particle source with user selectable configurations operates in ion-mode for FIB operations or electron mode for SEM operations. Equipped with an x-ray detector, energy dispersive x-ray spectroscopy analysis is possible. A user can selectively configure the source to prepare a sample in the ion-mode or FIB...

Phase shift method for a tem
11/06/14 - 20140326878 - A method of electron microcopy passes an electron beam through a phase plate, specifically a Zernike type phase plate, comprising a central hole, and a thin film causing a phase shift of the electrons passing through said film. This phase shift causes the Contrast Transfer Function (CTF) to change from...

Nanopore fabrication and applications thereof
10/30/14 - 20140319339 - In one aspect, methods of nanopore formation in solid state membranes are described herein, In some embodiments, a method of forming an aperture comprises providing at least one solid state membrane in a chamber, selecting a first dose of ions sufficient to provide a first aperture of predetermined diameter through...

Method and apparatus for detecting buried defects
10/30/14 - 20140319340 - One embodiment relates to a method of detecting a buried defect in a target microscopic metal feature. An imaging apparatus is configured to impinge charged particles with a landing energy such that the charged particles, on average, reach a depth within the target microscopic metal feature. In addition, the imaging...

Charged particle microscope apparatus and image acquisition method of charged particle microscope apparatus
10/30/14 - 20140319341 - A charged particle microscope apparatus includes a radiation optical system that radiates a focused charged particle beam to an upper side of a sample provided with a pattern and scans the sample; a detection optical system that detects charged particles generated from the sample to which the charged particle beam...

Method and system for adaptively scanning a sample during electron beam inspection
10/30/14 - 20140319342 - A system for adaptive electron beam scanning may include an inspection sub-system configured to scan an electron beam across the surface of a sample. The inspection sub-system may include an electron beam source, a sample stage, a set of electron-optic elements, a detector assembly and a controller communicatively coupled to...

Circuit tracing using a focused ion beam
10/30/14 - 20140319343 - Methods and systems for tracing circuitry on integrated circuits using focused ion beam based imaging techniques. A first component or node on an integrated circuit is coupled to a second component or node on the same integrated circuit. After an external bias is applied to the first component or node,...

Multiple image metrology
10/30/14 - 20140319344 - Metrology is performed using multiple registered images derived from one or more charged particle beams. Measurements combine features from one image that may not be visible in a second image to determine relationships that cannot be determined from a single image. In one embodiment, measurements use features from different element...

Pattern inspection method and pattern inspection apparatus
10/23/14 - 20140312224 - A first differential image of a defect observation region including an observation target pattern is generated by a differential value between signals from electron detectors arranged in a direction of edges of the observation target pattern. A three-dimensional shape of a defect is obtained by subjecting the first differential image...

Defect inspection apparatus and defect inspection method
10/23/14 - 20140312225 - There is provided a defect inspection apparatus including: an electron scanning unit configured to scan a surface of a sample with an electron beam; a plurality of detectors arranged around an optical axis of the electron beam and configured to detect electrons emitted from the surface of the sample by...

Charged-particle microscope providing depth-resolved imagery
10/23/14 - 20140312226 - A method of examining a sample using a charged-particle microscope, comprising mounting the sample on a sample holder; using a particle-optical column to direct at least one beam of particulate radiation onto a surface S of the sample, thereby producing an interaction that causes emitted radiation to emanate from the...

Method of collecting and processing electron diffraction data
10/16/14 - 20140306108 - A method of using electron diffraction to obtain PDFs from crystalline, nanocrystalline, and amorphous inorganic, organic, and organometallic compound....

Method for detecting defect of substrate
10/16/14 - 20140306109 - A method for detecting defects includes irradiating at least one electron beam into a first region of a substrate, irradiating at least one electron beam into a second region electrically connected to the first region, and detecting secondary electrons emitted from the second region. The electron beam irradiated into the...

Charged particle beam device and measuring method using the same
10/09/14 - 20140299767 - In an SEM provided with an ExB deflector for deflecting secondary electrons outside an optical axis of a primary electron beam between an electronic source and an object lens for condensing the primary electron beam and irradiating a sample with the beam, a unit to decelerate the secondary electrons deflected...

Charged particle beam apparatus and method for forming observation image
10/02/14 - 20140291509 - A focused ion beam apparatus includes a lens interferometer configured to detect a relative position of an ion beam column and a sample. An image forming section includes an irradiation position specifying section configured to specify an irradiation position of an ion beam based on the detected relative position of...

Charged particle beam apparatus
10/02/14 - 20140291510 - The present invention provides apparatuses to inspect small particles on the surface of a sample such as wafer and mask. The apparatuses provide both high detection efficiency and high throughput by forming Dark-field BSE images. The apparatuses can additionally inspect physical and electrical defects on the sample surface by form...

Charged particle beam apparatus and sample processing method using charged particle beam apparatus
10/02/14 - 20140291511 - A charged particle beam apparatus includes a sample stage, a focused ion beam column, a scattered electron detector that detects backscattered electrons generated from a cross-section of a sample, a crystal orientation information generation unit that generates crystal orientation information on a predetermined region of the cross-section, and an angle...

Focused ion beam apparatus and method of working sample using the same
10/02/14 - 20140291512 - A focused ion beam apparatus includes: an image generation unit which generates a sample image including location detection marks formed on a sample based on secondary charged particles generated with emission of a focused ion beam to a sample; a display unit which displays a sample image; and a control...

Incoherent transmission electron microscopy
09/25/14 - 20140284475 - A transmission electron microscope includes an electron beam source to generate an electron beam. Beam optics are provided to converge the electron beam. A specimen holder is provided to hold a specimen in the path of the electron beam. A detector is used to detect the electron beam transmitted through...

Measurement of line-edge-roughness and line-width-roughness on pre-layered structures
09/18/14 - 20140264016 - Measurements of line roughness are separated into groups depending upon pre-layers. Image data collected from similar pre-layer types are considered together in order to separate effects of line roughness from distortion of measurements caused by the pre-layers. The resulting line roughness measurements are used to estimate an aspect of line...

Transmission electron microscope, and method of observing specimen
09/18/14 - 20140264017 - Provided is means which enables observation of the shape of a specimen as it is without deforming the specimen. Observation is made by allowing a specimen-holding member having an opening (for example, microgrid and mesh) to hold an ionic liquid and charging a specimen thereto, to allow the specimen to...

Observation specimen for use in electron microscopy, electron microscopy, electron microscope, and device for producing observation specimen
09/18/14 - 20140264018 - The electrical charging by a primary electronic is inhibited to produce a clear edge contrast from an observation specimen (i.e., a specimen to be observed), whereby the shape of the surface of a sample can be measured with high accuracy. An observation specimen in which a liquid medium comprising an...

Apparatus and method for performing microdiffraction analysis
09/11/14 - 20140252226 - An apparatus for detecting one or each of Kikuchi and Kossel diffraction patterns is provided. The apparatus comprises an electron column adapted in use to provide an electron beam (101) directed to wards a sample (102), the electron beam (101) having an energy in the range 2 keV to 50...

Charged particle beam irradiation system and charged particle beam irradiation planning method
09/11/14 - 20140252227 - A charged particle beam irradiation system includes: an irradiation unit configured to irradiate an irradiation target with a charged particle beam; a radiation resistance state measuring section configured to measure a radiation resistance state of the irradiation target; a region dividing section configured to divide the irradiation target into a...

Inspection or observation apparatus and sample inspection or observation method
09/04/14 - 20140246583 - Provided is an inspection apparatus or observation apparatus enabling appropriate inspection or observation of a sample in an easy-to-use manner, using a charged-particle technique and an optical technique. Specifically, provided is an inspection or observation apparatus including: a first casing forming at least part of a first space constituting at...

Focused ion beam low kv enhancement
08/28/14 - 20140239175 - The invention provides a charged particle beam system wherein the middle section of the focused ion beam column is biased to a high negative voltage allowing the beam to move at higher potential than the final beam energy inside that section of the column. At low kV potential, the aberrations...

Method of electron beam imaging of a specimen by combining images of an image sequence
08/28/14 - 20140239176 - A method of imaging of a specimen exposed to an electron beam signal includes acquiring an image sequence of sequential images of the specimen. Each subsequent image in the image sequence represents increased cumulative electron beam signal exposure on the specimen. The method includes collecting cumulative exposure data for each...

In situ reactivation of fluorescence marker
08/21/14 - 20140231644 - Vapor is provided locally at a sample surface to allow fluorescence of the fluorescent markers in a vacuum chamber. For example, a nanocapillary can dispense a liquid near a region of interest, the liquid evaporating to increase the vapor pressure near the fluorescent markers. The increase in vapor pressure at...

Focusing a charged particle imaging system
08/14/14 - 20140224985 - A charged particle beam focusing apparatus includes a charged particle beam generator configured to project simultaneously at least one non-astigmatic charged particle beam and at least one astigmatic charged particle beam onto locations on a surface of a specimen, thereby causing released electrons to be emitted from the locations. The...

Pattern measurement device and pattern measurement method
08/14/14 - 20140224986 - A pattern measurement device includes: a storage section storing mask edge data of a circuit pattern and image data obtained by imaging the circuit pattern; an SEM contour extracting section receiving the image data, SEM contour of the circuit pattern, and cause an exposure simulator to generate estimated SEM contour...

Methods of fabricating microelectronic substrate inspection equipment
08/14/14 - 20140224987 - Microelectronic substrate inspection equipment includes a gas container which contains helium gas, a helium ion generator which is disposed in the gas container and converts the helium gas into helium ions and a wafer stage which is disposed under the gas container and on which a substrate to be inspected...

Tem sample preparation
08/07/14 - 20140217283 - An improved method of preparing ultra-thin TEM samples that combines backside thinning with an additional cleaning step to remove surface defects on the FIB-facing substrate surface. This additional step results in the creation of a cleaned, uniform “hardmask” that controls the ultimate results of the sample thinning, and allows for...

Method of analyzing a sample and charged particle beam device for analyzing a sample
07/17/14 - 20140197310 - The invention refers to a method and a charged particle beam device for analyzing an object using a charged particle beam interacting with the object. The object comprises a sample embedded in a resin. Interaction radiation in the form of cathodoluminescence light is detected for identifying areas in which the...

Sample carrier for an electron microscope
07/17/14 - 20140197311 - The invention provides a solution to shadowing by forming the parts of the grid bordering the interface between sample and grid as tapering parts....

Electron microscope and sample observation method
07/17/14 - 20140197312 - The Foucault mode which is one method in Lorentz electron microscopy is required making a plurality of observations such as when reselecting the deflection components of the electron beam to form an image. This method not only required making plurality of adjustments to the optical system but was also incapable...

Sample block holder
07/10/14 - 20140191125 - A sample holder assembly includes a sample tray, a base plate, a stage mount, and a calibration standard mounted onto the stage mount. Three mating structures on the bottom of the base plate mate with corresponding structures on a stage mount that is attached to the sample stage of the...

Method of depositing protective structures
07/10/14 - 20140191126 - A process of preparing a lamella from a substrate includes manufacturing a protection strip on an edge portion of the lamella to be prepared from the substrate, and preparing the lamella, wherein the manufacturing the protection strip includes a first phase of activating a surface area portion of the substrate,...

Contamination reduction electrode for particle detector
07/10/14 - 20140191127 - A charged particle detector arrangement is described. The detector arrangement includes a detection element and a collector electrode configured to collect charged particles released from the detection element upon impact of signal charged particles....

Integrated method to analyze crystals in deposits
07/03/14 - 20140183356 - A method to analyze crystals in a deposit on a surface of a nuclear generating station heating surface, wherein the method extracts a sample of material from the surface of the nuclear generating station heating surface and also includes conducting at least one of a high resolution scanning electron microscope/energy...

Process for performing automated mineralogy
07/03/14 - 20140183357 - A method and system for determining the mineral content of a sample using an electron microscope. The method includes directing an electron beam toward an area of interest of a sample, the area of interest comprising an unknown composition of minerals. The working distance between the backscattered electron detector of...

Secondary electron optics and detection device
06/26/14 - 20140175277 - A secondary charged particle detection system for a charged particle beam device is described. The detection system includes a beam splitter for separating a primary beam and a secondary beam formed upon impact on a specimen; a beam bender for deflecting the secondary beam; a focusing lens for focusing the...

Backscatter reduction in thin electron detectors
06/19/14 - 20140166879 - In a direct electron detector, backscattering of electrons into the detector volume from below the sensor is prevented. In some embodiments, an empty space is maintained below the sensor. In other embodiments, a structure below the sensor includes geometry, such as multiple high aspects ratio channels, either extending to or...

On-chip thin film zernike phase plate and applications thereof
06/19/14 - 20140166880 - The present invention provides an on-chip thin film phase plate for a releasing charging, comprising a chip substrate having one or more apertures; and a thin film layer attached to the top surface of the chip substrate. The present invention also provides a method for observing organic material by TEM,...

Method for operating a particle beam device and/or for analyzing an object in a particle beam device
06/12/14 - 20140158884 - A method for operating a particle beam device and/or for analyzing an object in a particle beam device are provided. For example, the particle beam device is an electron beam device, an ion beam device, or a combination device having an electron beam device and an ion beam device. In...

Testing apparatus using charged particles and device manufacturing method using the testing apparatus
06/12/14 - 20140158885 - A system for further enhancing speed, i.e. improving throughput in a SEM-type inspection apparatus is provided. An inspection apparatus for inspecting a surface of a substrate produces a crossover from electrons emitted from an electron beam source 25•1, then forms an image under a desired magnification in the direction of...

Methods and apparatus for measurement of relative critical dimensions
06/05/14 - 20140151551 - One embodiment relates to a method of measuring a relative critical dimension (RCD) during electron beam inspection of a target substrate. A reference image is obtained. A region of interest is defined in the reference image. A target image is obtained using an electron beam imaging apparatus. The target and...

Tilt-imaging scanning electron microscope
06/05/14 - 20140151552 - One embodiment relates to a tilt-imaging scanning electron microscope apparatus. The apparatus includes an electron gun, first and second deflectors, an objective electron lens, and a secondary electron detector. The first deflector deflects the electron beam away from the optical axis, and the second deflector deflects the electron beam back...

Charged particle beam device, method for adjusting charged particle beam device, and method for inspecting or observing sample
06/05/14 - 20140151553 - A charged particle beam device capable of observing a sample in an air atmosphere or gas atmosphere has a thin film for separating the atmospheric pressure space from the decompressed space. A vacuum evacuation pump evacuates a first housing; and a detector detects a charged particle beam (obtained by irradiation...

Method of performing tomographic imaging of a sample in a charged-particle microscope
05/29/14 - 20140145077 - The invention relates to a method of performing tomographic imaging of a sample comprising providing a beam of charged particles; providing the sample on a sample holder that can be tilted; in an imaging step, directing the beam through the sample to image the sample; repeating this procedure at each...

Scanning electron microscope and a method for imaging a specimen using the same
05/29/14 - 20140145078 - (1) part or all of the number, coordinates and size/shape and imaging sequence of imaging points each for observation, the imaging position change method and imaging conditions can be calculated automatically from CAD data, (2) a combination of input information and output information for imaging recipe creation can be set...

Automated sample oreintation
05/15/14 - 20140131572 - A method for aligning a sample that is placed in the vacuum chamber so that the sample is oriented normal to the focused ion beam is disclosed. The locations of different spots on the sample surface are determined using a focusing routine. The locations of the different spots are used...

System and method for simultaneous detection of secondary electrons and light in a charged particle beam system
05/15/14 - 20140131573 - A method and system for the imaging and localization of fluorescent markers such as fluorescent proteins or quantum dots within biological samples is disclosed. The use of recombinant genetics technology to insert “reporter” genes into many species is well established. In particular, green fluorescent proteins (GFPs) and their genetically-modified variants...

Control imaging methods in advanced ultrafast electron microscopy
05/15/14 - 20140131574 - An optical system includes a beam splitter disposed along an optical axis and a set of mirrors optically coupled to the beam splitter. The set of mirrors are oriented perpendicular to each other. The optical system also includes a turning mirror optically coupled to a second mirror of the set...

Cross-section processing and observation method and cross-section processing and observation apparatus
05/15/14 - 20140131575 - A cross-section processing and observation method performed by a cross-section processing and observation apparatus, the method comprising: a cross-section processing step of forming a cross-section by irradiating a sample with an ion beam; a cross-section observation step of obtaining an observation image of the cross-section by irradiating the cross-section with...

Mineral identification using mineral definitions including variability
05/01/14 - 20140117230 - An improved mineral analysis system includes mineral definitions that include not only characteristics of the minerals, but also variability in those characteristics. The variabilities allow the calculation of ranges of expected values for different quality of measurements, for example, for different numbers of x-ray counts. Match probabilities can therefore be...

Automated mineral classification
05/01/14 - 20140117231 - The present invention discloses a combination of two existing approaches for mineral analysis and makes use of the Similarity Metric Invention, that allows mineral definitions to be described in theoretical compositional terms, meaning that users are not required to find examples of each mineral, or adjust rules. This system allows...

Scanning electron microscope, an interface and a method for observing an object within a non-vacuum environment
05/01/14 - 20140117232 - An interface, a scanning electron microscope and a method for observing an object that is positioned in a non-vacuum environment. The method includes: generating an electron beam in the vacuum environment; scanning a region of the object with the electron beam while the object is located below an object holder;...

Retarding field analyzer integral with particle beam column
05/01/14 - 20140117233 - A retarding field analyzer uses the existing components of a charged particle beam system eliminating the need for inserting a separate retarding field analyzer device. Using components of the existing column reduces the time required to analyze the beam. Using the imaging capabilities of the existing column facilitates alignment of...