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Supports: Racks > Special Article > Platelike > Semiconductor Wafer

Semiconductor Wafer

Semiconductor Wafer patent applications listed are from June 2005 to current and include Date, Patent Application Number, Patent Title, Patent Abstract summary and are linked to the corresponding patent application page.

01/03/08 - 20080000851 - Apparatus with fillet radius joints
A wafer holding apparatus including a plurality of rods joined at opposite ends to endplates by joints having flanges with a fillet radius. The joints which join the component parts of the apparatus provide a stable wafer holding apparatus for manual handling as well as for the harsh processing conditions ...

09/13/07 - 20070210020 - Structure for racking substrates
A structure for racking substrates includes first to fourth main legs isolated from one another at intervals wider than widths of both long sides and both short sides of a substrate, first to fourth protrusions respectively protruded from the first to fourth main legs in a direction of the long ...

08/02/07 - 20070175838 - Mini-environment pod device, an exposure apparatus and a device manufacturing method using the same
A pod attachable to an outside surface of a grounded electromagnetic-shielded chamber. The chamber has a door and a flange portion, around the door, on the outside surface and contains a micro-device manufacturing apparatus. The pod includes walls configured to contain a substrate and having an opening, the walls including ...

06/07/07 - 20070125726 - Wafer guide in wafer cleaning apparatus
A wafer guide in a wafer cleaning apparatus comprises of a lower panel portion. The wafer guide also comprises of a plurality of wafer supporting panel portions, the plurality of wafer supporting panel portions being configured to protrude from at least one side of the lower panel portion and support ...

03/29/07 - 20070068882 - Substrate carrying tray
A stackable substrate carrying tray on which a substrate (2) is placed horizontally, includes an upper contact section; and a lower contact section, the upper contact section contacting a first substrate carrying tray (1) which is stacked above the substrate carrying tray (1), and the lower contact section contacting a ...

03/22/07 - 20070062889 - Universal cassette
A cassette assembly for holding circular and non-circular disks is provided. A cassette body has a top wall, a bottom wall, opposite side walls, and an open front, creating an inside and outside of the cassette body. The side walls have grooves adapted to receive and hold the disk. One ...

02/08/07 - 20070029268 - Wafer cassette used in high temperature baking process
A wafer cassette for consolidation in process of high temperature baking is provided. The wafer cassette includes one front end member, two sidewall plates, one back end member, a plurality of fixture slots, two resilient sheets and two supporting rods. By using this wafer cassette in high temperature baking process, ...

11/30/06 - 20060266718 - Device for stabilizing a workpiece during processing
A device that stabilizes a workpiece during processing includes a first workpiece carrier part, a second work piece carrier part, and a fixing unit that mutually fixes the workpiece carrier parts in such a way that the workpiece is held between the first and-second workpiece carrier parts. The first workpiece ...

10/19/06 - 20060231515 - Adjustable cassette for substrates
A cassette (100) for accommodating substrates includes a frame (110) and supporting members (120). The frame includes a top shelf (111) and a bottom shelf (112), which cooperatively defines a space therebetween. The top and bottom shelves each include at least two adjusting members (114) with positioning slots (115). Each ...

10/12/06 - 20060226094 - Glass cassette for loading glass substrates of display panels
A glass cassette for loading glass substrates for display panels includes an upper plate, a lower plate, side plates, a stopper and stepped support members. The lower plate is disposed substantially parallel to the upper plate. The side plates are disposed spaced apart from each other in a first direction ...

07/13/06 - 20060151404 - Device for storing and/or transporting plate-shaped substrates in the manufacture of electronic components
To make possible a tightly packed, essentially horizontal storage of wafers (40), in which a simplified access to each of these wafers (40) is possible, a device is provided having a plurality of superimposed storage elements (10). The storage elements (10) have device features (16) for depositing the wafers (40). ...

02/16/06 - 20060032826 - Glass substrate cassette
A glass substrate cassette includes a bottom structure, a top structure, and a pair of side supports affixed to space the bottom structure and the top structure for forming an accommodation space in between. A plurality of support plates are horizontally affixed between the side supports. Each of the support ...

02/09/06 - 20060027513 - Wafer guides for processing semiconductor substrates
A wafer guide used in cleaning and/or drying processes of semiconductor wafers is provided. The wafer guide includes a horizontal support panel and at least three vertical panels attached on one surface of the support panel. Each of the vertical panels has a vertical body panel and a plurality of ...

01/26/06 - 20060016770 - Support device of a cassette
A support device of a cassette includes a plurality of spacers and a support. The spacers extend from the side boards of the cassette into the substrate retaining space. The support is disposed on the spacers to support the substrates. ...

12/01/05 - 20050263462 - Disk cassette system
A cassette system for disks to be manufactured into hard disks for computer memory storage includes a pair of end portions and a pair of side wall portions spanning between the end portions, defining a disk receiving region. The side wall portions together define a plurality of axially aligned slots ...

10/13/05 - 20050224429 - Support jig of quartz glass for receiving wafer-like substrates of semiconductor material
A support jig of quartz glass for receiving wafer-like substrates of semiconductor material in a vertical orientation comprises two spaced-apart circular end plates (10) which are interconnected by means of at least three transverse rods (1, 2, 3) extending in parallel with one another and between the end plates. They ...

09/22/05 - 20050205502 - Rails for semiconductor wafer carriers
A rail is provided for use as a support in an apparatus for holding a plurality of semiconductor wafers. The rail has a plurality of teeth arranged in a vertical column, such that the space between a top surface of one tooth and a bottom surface of the next higher ...

09/22/05 - 20050205501 - Reformed wafer boat
The present invention discloses a reformed wafer boat. The reformed wafer boat has a plurality of trenches. A first interval is formed between each trench and one adjacent trench, and a second interval is formed between each trench and the other adjacent trench. The wafers placed on the trenches at ...

08/11/05 - 20050173358 - Receiving container body for object to be processed
The present invention includes: a box case having a size capable of containing an open type of cassette that can hold a plurality of first objects to be processed and capable of containing a plurality of second objects to be processed, the second objects to be processed being larger than ...

08/04/05 - 20050167374 - Retainer block for use with dish rack
A dish rack has a collector tray, with the collector tray having a compartment. A retaining block is seated in the compartment and has at least one elongated slot. The sharp edge (e.g., blade) of a sharp object (e.g., knife) can be inserted through the slot and be shielded from ...

07/07/05 - 20050145584 - Wafer boat with interference fit wafer supports
A wafer boat including a base plate, a top plate, a plurality of support rods, and a plurality of wafer supports. The support rods are disposed about a perimeter of the base plate and extend between the base plate and the top plate, each support rod including a plurality slots ...

06/16/05 - 20050127012 - Structure for racking substrates
A structure for racking substrates includes first to fourth main legs isolated from one another at intervals wider than widths of both long sides and both short sides of a substrate, first to fourth protrusions respectively protruded from the first to fourth main legs in a direction of the long ...



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