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Coating Apparatus > Gas Or Vapor Deposition > Crucible Or Evaporator Structure Crucible Or Evaporator StructureCrucible Or Evaporator Structure patent applications listed are from June 2005 to current and include Date, Patent Application Number, Patent Title, Patent Abstract summary and are linked to the corresponding patent application page.11/29/07 - 20070272156 - Linear evaporator for manufacturing organic light emitting device using numerous crucibles Provided is a linear evaporator for manufacturing a thin film of an organic light emitting device using a plurality of crucibles. The evaporator includes: a housing formed in a long cylinder shape and having an open top surface; a crucible fixing unit covering the housing and having a plurality of ... 10/11/07 - 20070234962 - System for introducing a precursor gas to a vapor deposition system A system for introducing a precursor vapor to a processing chamber configured for forming a thin metal on a substrate is described. The vapor delivery system includes means for introducing a dilution gas to the precursor vapor and adjusting the spatial distribution of the dilution gas addition in order to ... 08/23/07 - 20070193519 - Large area deposition in high vacuum with high thickness uniformity The invention relates to an effusing source for film deposition made of a reservoir comprising one hole characterized by the fact that the hole diameter is less than one order of magnitude than the mean free path of the molecules determined by the pressure and its thickness is at least ... 08/02/07 - 20070175397 - Method for packing solid organometallic compound and packed container A method for packing a solid organometallic compound into a container for packing the compound is provided, wherein the solid organometallic compound can be stably supplied to a vapor phase epitaxial growth apparatus such as an MOCVD apparatus at a constant concentration for a long period of time. In the ... 07/05/07 - 20070151518 - Evaporator featuring annular ridge member provided on side wall surface of evaporating chamber In an evaporator for evaporating mists of liquid raw material to thereby generate start gas for layer-formation, an evaporator body has an evaporator chamber defined therein, and a mist supply throat for introducing the mists into the evaporating chamber. The evaporator chamber is defined by a principal evaporating face which ... 06/14/07 - 20070131172 - Low pressure vapor phase deposition of organic thin films Methods for preparing organic thin films on substrates, the method comprising the steps of providing a plurality of organic precursors in the vapor phase, and reacting the plurality or organic precursors at a sub-atmospheric pressure. Also included are thin films made by such a method and apparatuses used to conduct ... 05/24/07 - 20070113789 - Method and system for depositing material on a substrate using a solid precursor A system and method is disclosed for vaporizing a solid precursor and transporting the precursor vapor to a process chamber. The film precursor vaporization system is coupled to the process chamber and positioned directly above the substrate. A precursor valve system within the film precursor vaporization system permits closing off ... 05/10/07 - 20070101940 - Vaporizer and semiconductor processing apparatus A vaporizer includes a vaporizing chamber (110) configured to vaporize a liquid material and thereby form a gas material. A spray portion (120) is configured to spray the liquid material in the vaporizing chamber. A delivery part (130) is configured to deliver the gas material from the vaporizing chamber to ... 05/03/07 - 20070095290 - Molecular beam source for use of thin-film accumulation and a method for controlling volume of molecular beam A molecular beam source for use of thin-film accumulation, for enabling to adjust the volume of molecular beam, which is discharged per an hour with using a needle valve, to be constant irrespective of decrease of a thin-film element forming material remaining within a crucible, comprises heaters 32 and 42 ... 04/26/07 - 20070089676 - Arrangement for the vapor deposition on substrates The invention relates to an arrangement for the vapor deposition on substrates. It includes a pan as well as a cover with linearly disposed bores. Above this cover is seated a seal-off device, which also includes openings. Through the seal-off device the bores of the cover can be opened or ... 04/19/07 - 20070084409 - Linear type deposition source A linear type deposition source capable of improving a heating efficiency and reducing a heating temperature by using a plate-type heating source and/or improving a cooling efficiency by including a cooling jacket having a cooling water line in a housing. The linear type deposition source includes: a crucible arranged in ... 04/19/07 - 20070084409 - Linear type deposition source A linear type deposition source capable of improving a heating efficiency and reducing a heating temperature by using a plate-type heating source and/or improving a cooling efficiency by including a cooling jacket having a cooling water line in a housing. The linear type deposition source includes: a crucible arranged in ... 02/08/07 - 20070028841 - Method and apparatus for depositing material on a substrate Material (4) is deposited on a substrate (8) by arranging the material in a container (2), and contacting the surface of the material (4) with a beam of electrons to so as to evaporate the material and transfer it to the substrate. A shield (7) opaque to electrons is arranged ... 02/01/07 - 20070022957 - Deposition system A vacuum deposition system comprises a vacuum vessel, an evaporation source holder located in the vacuum vessel for holding an evaporation source and a holding jig provided in the vacuum vessel for holding a substrate facing the evaporation source. An adhesion-prevention member is located at outer peripheries of the evaporation ... 02/01/07 - 20070022956 - Evaporator device An evaporator device for coating substrates, in particular for applying an aluminum layer of OLEDs. To attain high evaporator tube temperatures, such as are required for example for the vaporization of materials with low vapor pressure, the heating system is placed into the interior of the evaporator tube. The thermal ... 02/01/07 - 20070022955 - Vapor deposition device A vapor deposition device for the vapor deposition of a substrate, and specifically particular of a substrate comprising heat-sensitive substances, for example OLEDs. To keep heat away from these substances, the vapor deposition device includes an evaporator tube with a special nozzle bar. This nozzle bar, which comprises several linearly ... 12/28/06 - 20060288941 - Evaporation source for evaporating an organic The present invention relates to an evaporation source for evaporating an organic electroluminescent layer. In particular, the present invention relates to the evaporation source preventing an aperture, through which a vaporized evaporation material is emitted, from being clogged by restricting heat transfer to outward. The evaporation source according to the ... 12/28/06 - 20060288940 - Evaporation source for evaporating an organic electroluminescent layer The present invention relates to an evaporation source for evaporating an organic electroluminescent layer. In particular, the present invention relates to the evaporation source preventing an aperture, through which a vaporized evaporation material is emitted, from being clogged by restricting heat transfer to outward. The evaporation source according to the ... 12/28/06 - 20060288939 - Evaporation source for evaporating an organic electroluminescent layer The present invention relates to an evaporation source for evaporating an organic electroluminescent layer. In particular, the present invention relates to the evaporation source preventing an aperture, through which a vaporized evaporation material is emitted, from being clogged by restricting heat transfer to outward. The evaporation source according to the ... 12/14/06 - 20060278167 - High-temperature evaporator cell and process for evaporating high-melting materials An evaporator cell, in particular for evaporating a high-melting material to be evaporated, comprises a crucible for receiving the material to be evaporated, and a heating device with a heating resistor for the resistance heating of the crucible, the heating resistor being provided as an electron emitter for the electron ... 12/14/06 - 20060278166 - Vaporizer, various devices using the same, and vaporizing method There is provided a vaporizer that can be used for a long period of time without being clogged and can supply a raw material stably to a reaction section. The evaporator includes a dispersion section 8 having a gas passage 2 formed in a dispersion section body 1, a gas ... 11/23/06 - 20060260547 - Apparatus for coating substrates on both sides An apparatus for the vapor deposition of a layer, in particular of a hydrophobic and/or oleophobic top coat layer, onto front and rear sides of planar substrates. The apparatus includes at least one vacuum chamber. A substrate holder is disposed in said vacuum chamber for receiving at least one substrate. ... 11/09/06 - 20060249081 - Process and apparatus for depositing single-component or multi-component layers and layer sequences using discontinuous injection of liquid and dissolved starting substances via a multi-channel injection unit The invention relates to a method and device for depositing at least one layer on at least one substrate in a process chamber. Said layer comprises several components and is insulating, passivating or electrically conductive. The components are vaporized in a tempered vaporization chamber by means of non-continuous injection of ... 10/26/06 - 20060236940 - System and method for depositing a material on a substrate A method and apparatus for depositing a film on a substrate includes introducing a material and a carrier gas into a heated Chamber. The material may be a semiconductor material, such as a cadmium chalcogenide. A resulting mixture of vapor and carrier gas containing no unvaporized material is provided. The ... 10/26/06 - 20060236939 - System and method for depositing a material on a substrate A method and apparatus for depositing a film on a substrate includes introducing a material and a carrier gas into a heated chamber. The material may be a semiconductor material, such as a cadmium chalcogenide. A resulting mixture of vapor and carrier gas containing no unvaporized material is provided. The ... 10/26/06 - 20060236938 - System and method for depositing a material on a substrate A method and apparatus for depositing a film on a substrate includes introducing a material and a carrier gas into a heated chamber. The material may be a semiconductor material, such as a cadmium chalcogenide. A resulting mixture of vapor and carrier gas containing no unvaporized material is provided. The ... 10/26/06 - 20060236937 - System and method for depositing a material on a substrate A method and apparatus for depositing a film on a substrate includes introducing a material and a carrier gas into a heated chamber The material may be a semiconductor material, such as a cadmium chalcogenide. A resulting mixture of vapor and carrier gas containing no unvaporized material is provided. The ... 10/26/06 - 20060236936 - Deposition of carbon-containing layers using vitreous carbon source An effusion source comprises a vitreous C filament and a heater to increase the temperature of the filament to produce a C vapor. Also described is a deposition method comprising (a) depositing a layer of material on a substrate, and (b) during step (a), heating a body of material that ... 10/05/06 - 20060219177 - Method and system for depositing material on a substrate using a solid precursor A system and method is disclosed for vaporizing a solid precursor and transporting the precursor vapor to a process chamber. The film precursor vaporization system is coupled to the process chamber and positioned directly above the substrate. A precursor valve system within the film precursor vaporization system permits closing off ... 09/28/06 - 20060213446 - Temperature control unit for bubblers A temperature control device for use in a process reactor system with a bubbler having a container provided with a side wall. The device includes a vessel having an internal chamber adapted to receive the container of the bubbler. An enclosure member is extendable between the container of the bubbler ... 08/24/06 - 20060185599 - Effusion cell valve A valve for an effusion cell is disclosed. The valve includes a valve seat having an opening in communication with an interior chamber of a heating crucible. A disk-shaped valve member is axially movable with respect to the valve seat in order to increase or decrease the effective size of ... 08/24/06 - 20060185598 - Film precursor tray for use in a film precursor evaporation system and method of using A high conductance, multi-tray film precursor evaporation system coupled with a high conductance vapor delivery system is described for increasing the deposition rate by increasing exposed surface area of film precursor. The multi-tray film precursor evaporation system includes one or more trays. Each tray is configured to support and retain ... 08/24/06 - 20060185597 - Film precursor evaporation system and method of using A high conductance, multi-tray film precursor evaporation system coupled with a high conductance vapor delivery system is described for increasing deposition rate by increasing exposed surface area of film precursor. The multi-tray film precursor evaporation system includes one or more trays. Each tray is configured to support and retain film ... 08/03/06 - 20060169211 - Vapor deposition source and vapor deposition apparatus having the same A vapor deposition source has a reduced size by disposing a crucible, a heating portion, and a nozzle portion in one defined space. A vapor deposition apparatus deposits deposition materials on a substrate using the vapor deposition source. The vapor deposition source includes a housing, and the crucible is mounted ... 07/27/06 - 20060162663 - Vapor deposition apparatus A vapor deposition apparatus, developed in particular for on-line deposition of phosphor or scintillator material, wherein said vapor deposition apparatus comprises a crucible containing a mixture of raw materials, a chimney having at least one inlet in communication with the said crucible and a linear slot outlet, one or more ... 07/27/06 - 20060162662 - Vacuum vapor deposition apparatus A crucible is a monolithic structure extending over an entire area of a vaporizing chamber and has at least one slit groove provided in the upper surface thereof. The at least one slit groove has a length from one end of the upper surface of the crucible to other end ... 07/20/06 - 20060156986 - Modification method of surface layer of molded resin article, and modification apparatus of surface layer of molded resin article An organic compound having an affinity for a resin of a molded resin article and sublimation properties is allowed to penetrate/disperse into the surface of the molded resin article, thereby modifying and/or coloring a resin surface layer. The molded resin article and the organic compound having the affinity for the ... 07/13/06 - 20060150915 - Vaporization source with baffle A vapor deposition source for depositing organic material includes a boat having a cavity for holding organic material and an aperture plate, having a plurality of spaced apertures, for enclosing the boat. The vapor deposition source also includes a heating element provided in the cavity between the aperture plate and ... 07/06/06 - 20060144338 - High accuracy vapor generation and delivery for thin film deposition The present invention involves injecting a liquid and gas into a vapor holding chamber held at a sufficiently high temperature to insure all the liquid injected is vaporized and held in the chamber as a vapor. The gas/vapor mixture is then delivered to the deposition chamber in which the deposition ... 06/29/06 - 20060137614 - Metal film and metal film-coated member, metal oxide film and metal oxide film-coated member, thin film forming apparatus and thin film forming method for producing metal film and metal oxide film The metal film of the present invention is a dense film of a single crystal that has very low surface roughness and very good crystal orientation because an arithmetic mean roughness of the surface is not larger than 2 nm and a (111) peak intensity of X-ray diffraction is not ... 06/22/06 - 20060130766 - Deposition source and deposition apparatus including deposition source A deposition source having a constant deposition rate and high reproducibility, and a deposition apparatus including the deposition source includes: a heating chamber having a linear opening portion; and a cover including a plurality of holes and attached to the linear opening portion of the heating chamber. The distances between ... 06/22/06 - 20060130765 - Arrangement for coating a substrate The invention relates to an arrangement for the coating of substrates, which comprises an evaporation source and a vapor barrier between the evaporation source and the substrate. The vapor barrier is maintained at a temperature which is at least equal to or above the vaporization temperature of the material to ... 06/15/06 - 20060124061 - Molecule supply source for use in thin-film forming A molecule supply source for use in thin-film forming, enabling to form a thin-film, having a high uniformity, with molecules discharged from a single evaporation source, even on a relatively wide film-forming surface 9, has guide passages 4a, 4b and 4c, being provided in plural numbers thereof, wherein flow rates ... 06/08/06 - 20060118047 - Single-pass growth of multilayer patterned electronic and photonic devices using a scanning localized evaporation methodology (slem) The invention decribes an apparatus, Scanning Localized Evaporation Methodology (SLEM) for the close proximity deposition of thin films with high feature definition, high deposition rates, and significantly improved material economy. An array of fixed thin film heating elements, each capable of being individually energized, is mounted on a transport mechanism ... 06/01/06 - 20060112883 - Replaceable precursor tray for use in a multi-tray solid precursor delivery system A replaceable precursor tray for use with a high conductance, multi-tray solid precursor evaporation system coupled with a high conductance vapor delivery system is described for increasing deposition rate by increasing exposed surface area of solid precursor. The multi-tray solid precursor evaporation system is configured to be coupled to the ... 06/01/06 - 20060112882 - Multi-tray film precursor evaporation system and thin film deposition system incorporating same A high conductance, multi-tray solid precursor evaporation system coupled with a high conductance vapor delivery system is described for increasing deposition rate by increasing exposed surface area of solid precursor. The multi-tray solid precursor evaporation system includes a base tray with one or more upper trays. Each tray is configured ... 05/18/06 - 20060102079 - Reducing variability in delivery rates of solid state precursors An apparatus comprises a chemical precursor material formed into a pellet-shaped structure. The chemical precursor pellet may be used in a chemical vapor deposition process or in an atomic layer deposition process. A method of making the chemical precursor pellets comprises introducing the chemical precursor material into a pellet-shaped mold, ... 05/11/06 - 20060096542 - Heating crucible and deposition apparatus including the same A heating crucible and a deposition apparatus are provided that have a uniform deposition rate and good reproducibility. The heating crucible of the deposition apparatus includes a titanium body with an internal cavity to contain a material to be deposited and an opening to emit the material to be deposited, ... 05/04/06 - 20060090705 - Apparatus for fabricating display device An apparatus for forming a thin film includes: a chamber; a susceptor in the chamber; a gas injector over the susceptor, the gas injector having a plurality of injection holes; a shaft connected to the gas injector, the shaft having a flow path connected to the plurality of injection holes; ... 04/20/06 - 20060081188 - Deposition system A vacuum deposition system comprises a vacuum vessel, an evaporation source holder provided in the vacuum vessel for holding an evaporation substance and a holding jig provided in the vacuum vessel for holding a substrate facing the evaporation source. An adhesion-prevention member is provided at outer peripheries of the evaporation ... 04/06/06 - 20060070575 - Solution-vaporization type cvd apparatus The vaporizer of the solution-vaporization type CVD apparatus comprises: the orifice tube dispersing at least one kind of a raw-material solution in a carrier gas in a fine particulate or misty form; at least one path for at least one kind of the raw-material solution, the at least one path ... 03/16/06 - 20060054089 - Source for thermal physical vapor deposition of organic electroluminescent layers The present invention disclosed the deposition source installed in a chamber, heated by applied electric power to transfer heat to a vapor deposition material received therein and applying a vaporized deposition material generated therein to a substrate to form deposition organic electroluminescent layers onto the substrate, and comprising a vessel ... 03/09/06 - 20060048711 - Systems and methods of forming tantalum silicide layers A method of forming (and apparatus for forming) tantalum silicide layers (including tantalum silicon nitride layers), which are typically useful as diffusion barrier layers, on a substrate by using a vapor deposition process with a tantalum halide precursor compound, a silicon precursor compound, and an optional nitrogen precursor compound. ... 02/23/06 - 20060037540 - Delivery system Systems for delivering solid organometallic compounds in the vapor phase to reactors are provided. Such systems include a dual-chambered cylinder design for use with a frit of solid organometallic source material for chemical vapor phase deposition systems, and a method for transporting a carrier gas saturated with the organometallic compound ... 02/23/06 - 20060037539 - Vaporizer, various apparatuses including the same and method of vaporization A vaporizer that does not cause clogging or other failure, permits long-term use and enables stable supply of raw materials to a reaction section. In particular, a vaporizer which not only enables continuous and stable supply of raw materials adjusted to stoichiometric ratios but also exerts an effect of reducing ... 02/09/06 - 20060027170 - Deposition boat and manufacturing method of organic el display therewith A deposition boat includes a boat on which a deposition material is placed; a cap body having an opening through which a vapor of the deposition material goes and partially overlapping with the boat; and a fixing member that is disposed on the overlapping portion of the cap body with ... 12/22/05 - 20050279285 - Phosphor sheet manufacturing apparatus There is provided a stimulable phosphor sheet manufacturing apparatus which forms a stimulable phosphor layer through vacuum evaporation in a vacuum chamber. A substrate is conveyed linearly, evaporation sources are arranged in a direction perpendicular to a direction in which the substrate is conveyed, and/or the apparatus includes the evaporation ... 12/08/05 - 20050268855 - Evaporative deposition with enhanced film uniformity and stoichiometry A method and apparatus for forming a thermally-evaporated binary (or greater) thin film are disclosed in which the surface area of an evaporation container is effectively increased by using an inert medium added to source materials that are to form the binary (or greater) film. Using this method and apparatus, ... 12/08/05 - 20050268854 - Film forming apparatus and film forming method To provide a film forming apparatus in which an impurity contained in an organic compound is separated to be removed and a film is formed without decreasing the purity of the purified organic compound, whereby a high-purity organic compound is formed. A film forming apparatus of the present invention includes ... 12/08/05 - 20050268853 - Vapor phase deposition apparatus, method for depositing thin film and method for manufacturing semiconductor device A vapor phase deposition apparatus 100 for forming a thin film comprising a chamber 1060, a piping unit 120 for supplying a source material of the thin film into the chamber 1060 in a gaseous condition, a vaporizer 202 for vaporizing the source material in a source material container 112 ... 12/01/05 - 20050263075 - Delivery systems for efficient vaporization of precursor source material A delivery system for vaporizing and delivering vaporized solid and liquid precursor materials at a controlled rate having particular utility for semiconductor manufacturing applications. The system includes a vaporization vessel, a processing tool and a connecting vapor line therebetween, where the system further includes an input flow controller and/or an ... 12/01/05 - 20050263074 - Film formation source, vacuum film formation apparatus, organic el panel and method of manufacturing the same A film formation source of a vacuum film formation apparatus for forming thin film on the film formation surface of a substrate comprises: a material accommodating unit containing a film formation material; heating means for heating the film formation material contained within the material accommodating unit; a film formation flow ... 11/24/05 - 20050257745 - Film formation source, vacuum film formation apparatus, method of manufacturing organic el device, and organic el device Film formation is conducted with a high level of directivity. A film formation source of a vacuum film formation apparatus, comprises a material container for housing a film forming material, heating means for heating the film forming material inside the material container, and a rectifier provided at an ejection port ... 11/10/05 - 20050247267 - Molecular beam source for use in accumulation of organic thin-films A molecular beam source for use in accumulation of organic thin-films, for enabling forming of a uniform thin-film on film-forming surfaces of a large-sized substrate, but without producing deposition or separation of a film-forming material in an opening for discharging molecules of the film-forming material, wherein a valve 33 is ... 11/03/05 - 20050241585 - System for vaporizing materials onto a substrate surface A system for vaporizing materials onto a substrate surface, comprising: a material deposition chamber containing a substrate; at least two separate source chambers, each source chamber having a material source containing a quantity of material and including controllable means for vaporizing the material in the source and creating a plume ... 10/20/05 - 20050229856 - Means and method for a liquid metal evaporation source with integral level sensor and external reservoir A liquid metal evaporation source for use in Molecular Beam Epitaxy and related metal vacuum deposition techniques. An evaporator is maintained at a high temperature to evaporate a liquid metal, a reservoir for holding the liquid metal source is maintained at a temperature above the melting point of the metal ... 10/13/05 - 20050223995 - Vacuum treatment installation with a variable pump arrangement A vacuum treatment installation, in particular a coating line for the continuous coating of plate-like substrates moving continuously along the line, preferably a glass-coating line having at least one, preferably a plurality of successively arranged vacuum chambers (1) or chamber zones (2 to 8, 17) that are pumped out by ... 10/06/05 - 20050217584 - Film formation source, film formation apparatus, film formation method, organic el panel, and method of manufacturing organic el panel It is an object of the invention to continuously perform, under a desired condition and for a long time period, a film formation process capable of producing a high quality film. A film formation apparatus comprises: a discharge outlet disposed within a film formation chamber and facing a film formation ... 09/29/05 - 20050211172 - Elongated thermal physical vapor deposition source with plural apertures A container for vaporizing a solid material includes a housing having side walls, a bottom wall, and a cover enclosing an interior volume. The cover includes at least one aperture to permit egress of vapor efflux from the housing. A heater heats at least a portion of the housing to ... 08/25/05 - 20050183671 - Fixing member for evaporation apparatus An electric heater is placed so as to cover an upper opening of a crucible. Then, a plurality of angle members are disposed along the side portions of the electric heater and are pressed and fixed by clamps. The clamp includes, at its bottom, a curved portion formed by bending ... 08/25/05 - 20050183670 - Patterned thin-film deposition using collimating heated masked assembly Scanning localized evaporation and deposition of an evaporant on a substrate utilizes a mask assembly comprised of a series of mask elements with openings thereon and spaced apart in a stack. The openings are aligned so as to direct the evaporant therethrough onto the substrate. The mask elements are heated ... 08/04/05 - 20050166847 - Solid source precursor delivery system A solid source precursor material is delivered to a deposition chamber in vaporized form by utilizing a solid source precursor delivery system having either single or multiple stations(s) having a collection/delivery reservoir that is an intermediate stage between a solid source reservoir and a processing deposition chamber. Each collection/delivery reservoir ... 08/04/05 - 20050166846 - Large area deposition in high vacuum with high thickness uniformity The invention relates to an effusing source for film deposition made of a reservoir comprising one hole characterized by the fact that the hole diameter is less than one order of magnitude than the mean free path of the molecules determined by the pressure and its thickness is at least ... 07/14/05 - 20050150461 - Apparatus of depositing thin film with high uniformity A deposition apparatus of depositing deposition material on a wafer in a vacuum chamber includes a deposition boat installed in the vacuum chamber to vaporize the deposition material, a wafer guide on which the wafer is loaded, the wafer guide having a rotational member rotating together with the wafer, a ... 07/07/05 - 20050145180 - Non-contact cool-down station for wafers A stationary cooling station for cooling wafers after the wafers have been subjected to semiconductor processing supports the wafer by flowing gas in accordance with the Bernoulli principle. An upper wall of the cooling station contains a plurality of gas outlets that direct gas to flow over the top surface ... 07/07/05 - 20050145179 - Accessory member for dispensers of alkali metals An accessory member for alkali metals dispensers is provided in the form of a screen (30; 40; 60) of substantially tubular shape, one end (34; 44; 64) of which can be applied to an alkali metals dispenser (10). The cross-section of the one end is superposable to an entire alkali ... 06/16/05 - 20050126495 - Deposited-film forming apparatus With the deposited-film forming apparatus according to the first embodiment of the present invention, the distance between the tubular barrel and the evaporating section can be varied, unlike the prior art deposited-film forming apparatus and hence, the efficient formation of the deposited film on the surface of each of the ... 06/16/05 - 20050126494 - Process and apparatus for depositing a ceramic coating A process and apparatus for depositing a ceramic coating, such as a thermal barrier coating (TBC) for a gas turbine engine component. The process deposits a coating whose composition includes multiple oxide compounds and a carbon-based constituent, e.g., elemental carbon, carbides, and carbon-based gases. The process uses at least one ... 06/16/05 - 20050126493 - Linear or planar type evaporator for the controllable film thickness profile The present invention relates to an evaporator for manufacturing a thin film, and more particularly to a linear or planar type evaporator for evaporating and depositing a source material on a substrate located over the evaporator by using a slit with a certain pattern, comprising a crucible formed of an ... 06/16/05 - 20050126492 - Vapor deposition of solid oligomers A monomer is selected to produce a polymeric film having desirable characteristics for a particular application. The monomer is ppolymerized under controlled conditions to produce a solid oligomer having those characteristics at a molecular weight suitable for evaporation under vacuum at a temperature lower than its thermal decomposition temperature. The ... 06/09/05 - 20050120959 - Vacuum deposition device and pretreatment method for vacuum deposition The vacuum deposition device includes a vacuum deposition chamber, a vacuum evacuator for evacuating an inside of the chamber, an evaporating unit for evaporating one or more film forming materials in the chamber, a holding unit provided above the evaporating unit for holding a substrate for the vacuum deposition, and ... 06/02/05 - 20050115505 - Delivery of solid chemical precursors Systems and methods are provided for delivering solid precursors. In certain embodiments of the present application, a flow monitor is used to measure and regulate the flow of vaporized solid precursor material from a vaporization chamber to a deposition chamber. The flow monitor chokes the supply of vapor into the ... ### FreshPatents.com Support |