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Measuring And Testing > Surface And Cutting Edge Testing > Roughness RoughnessRoughness patent applications listed are from June 2005 to current and include Date, Patent Application Number, Patent Title, Patent Abstract summary and are linked to the corresponding patent application page.01/17/08 - 20080011067 - Fully digitally controller for cantilever-based instruments A controller for cantilever-based instruments, including atomic force microscopes, molecular force probe instruments, high-resolution profilometers and chemical or biological sensing probes. The controller samples the output of the photo-detector commonly used to detect cantilever deflection in these instruments with a very fast analog/digital converter (ADC). The resulting digitized representation of ... 01/10/08 - 20080006083 - Apparatus and method of transporting and loading probe devices of a metrology instrument The preferred embodiments are directed to a probe cassette for a scanning probe microscope that includes a base having at least one probe storage receptacle, a lid mountable on the base with the probe storage receptacle at least substantially covering the at least one receptacle, and a probe retainer that ... 01/03/08 - 20080000293 - Spm cantilever and manufacturing method thereof An SPM cantilever of the present invention including: a support portion (1) fabricated by processing a single crystal silicon wafer; a lever portion (2) formed in a manner extended from the support portion; a probe (3) disposed at a free end side of the lever portion; a coating of graphite ... 12/27/07 - 20070295064 - Methods of imaging in probe microscopy In accordance with an embodiment of the invention, there is a force sensor for a probe based instrument. The force sensor can comprise a detection surface and a flexible mechanical structure disposed a first distance above the detection surface so as to form a gap between the flexible mechanical structure ... 12/20/07 - 20070289369 - Multifunctional probe array system A probe array for includes a handle, a first probe and a second probe. The first probe has a first shank, connected to the handle, and a first tip; and the second probe has a second shank, connected to the handle, and second tip. The first tip contains a different ... 11/22/07 - 20070266780 - Scanning probe microscope With a scanning probe microscope, if a plurality of sample properties are measured using a scanning scheme of allowing a probe to approach and withdraw from a sample, the sample properties need to be accurately and reliably detected in the minimum required measurement time. Further, the acting force between the ... 11/15/07 - 20070261480 - Atomic force microscope tip arrays and methods of manufacturing same The present invention provides methods and apparatus for forming an array of multiple nanotube tips that can be utilized with AFM technology. The multiprobe tips may be independently modified or specifically left unmodified. Software can generate a composite image of data collected from two or more of the independently modified ... 11/08/07 - 20070256480 - Scanning probe microscopy tips composed of nanoparticles and methods to form same A structure and method for improving the spatial resolution of a scanning probe microscope (SPM) tip, which has been coated with a layer of chemically-synthesized nanoparticles. The nanoparticles are either single-species or heterogeneous, such that the single-species nanoparticles can be either ferromagnetic, paramagnetic, superparamagnetic, antiferromagnetic, ferrimagnetic, magneto-optic, ferroelectric, piezoelectric, superconducting, ... 11/01/07 - 20070251306 - Atomic force microscopy scanning and image processing A topographic profile of a structure is generated using atomic force microscopy. The structure is scanned such that an area of interest of the structure is scanned at a higher resolution than portions of the structure outside of the area of interest. An profile of the structure is then generated ... 11/01/07 - 20070251305 - Method and apparatus for reducing lateral interactive forces during operation of a probe-based instrument A cantilever probe-based instrument is controlled to reduce the lateral loads imposed on the probe as a result of probe/sample interaction. In a preferred embodiment, the probe tip and/or sample are driven to move laterally relative to one another as a function of cantilever deflection in order to compensate for ... 10/11/07 - 20070234786 - Nanometer-precision tip-to-substrate control and pattern registration for scanning-probe lithography An interferometric-spatial-phase imaging (ISPI) system includes an alignment mechanism for obtaining continuous six-axis control of a scanning probe tip with respect to a coordinate system attached to a substrate. A gap detection mechanism measures tip height above a substrate and controls tip approach toward the substrate of one or more ... 10/04/07 - 20070227236 - Nanoindenter A new type of indenter is described. This device combines certain sensing and structural elements of atomic force microscopy with a module designed for the use of indentation probes, conventional diamond and otherwise, as well as unconventional designs, to produce high resolution and otherwise superior indentation measurements. ... 09/27/07 - 20070220958 - Optical detection alignment/tracking method and apparatus A method of operating a probe based instrument includes a light source that generates and directs a beam of light towards a probe of the instrument to detect a property of probe deflection. The method automatically adjusts the position of the light beam on the probe based on movement of ... 08/16/07 - 20070186629 - Functionalizable nanowire-based afm probe The functionalizable nanowire-based AFM probe comprises a cantilever element, a semiconductor nanowire and a catalyst nanoparticle. The cantilever element comprises a crystalline growth surface at one end. The semiconductor nanowire extends substantially orthogonally from the growth surface and, hence from the cantilever element. The catalyst nanoparticle is located at the ... 08/16/07 - 20070186628 - Insertable nanoscale fet probe The nanoscale FET probe comprises a cantilever element and, at one end of the cantilever element, a nanowire that extends from the cantilever element. The nanowire is electrically connected to the cantilever element at at least one of the ends of the nanowire. The nanowire is capable of being coated ... 08/16/07 - 20070186627 - High aspect ratio afm probe and method of making The high aspect ratio atomic force microscope (AFM) probe has a cantilever element with a crystalline growth surface at one end. The AFM probe additionally has a semiconductor nanowire extending substantially orthogonally from the growth surface. The AFM probe is made by covering the cantilever element with sacrificial material, leaving ... 07/19/07 - 20070163335 - Method and apparatus for measuring electrical properties in torsional resonance mode The preferred embodiments are directed to a method and apparatus of operating a scanning probe microscope (SPM) including oscillating a probe of the SPM at a torsional resonance of the probe, and generally simultaneously measuring an electrical property, e.g., a current, capacitance, impedance, etc., between a probe of the SPM ... 07/12/07 - 20070157712 - Micromotion device and scanning probe microscope A micromotion device for preventing a tubular piezoelectric device which is cylindrically shaped and has cutouts in one end portion. The one end portion of the piezoelectric device is mounted to a mount stage made of a material that is different in coefficient of thermal expansion from the material of ... 07/12/07 - 20070157711 - Digital q control for enhanced measurement capability in cantilever-based instruments A digital system for controlling the quality factor in a resonant device. The resonant device can be any mechanically driven resonant device, but more particularly can be a device that includes a cantilever within its system, such as an atomic force microscope. The quality factor can be digitally controlled to ... 06/28/07 - 20070144244 - Probe module with integrated actuator for a probe microscope A scanning probe microscope comprises a probe module. In some embodiments the module is easily removed from the lateral and vertical scanning mechanisms. The module further comprises one or more vertical motion actuator that may be controlled by a multi-path feedback control loop. By coupling the second vertical motion actuator ... 06/28/07 - 20070144243 - Scanning probe apparatus and drive stage therefor A drive stage, for driving a sample or a probe, capable of ensuring a movable range of a movable portion as a counterweight and always effectively canceling an inertial force to suppress vibration of a supporting member leading to vibration of the sample or the probe includes a counter drive ... 06/07/07 - 20070125160 - Short and thin silicon cantilever with tip and fabrication thereof Thin and short cantilevers possess both a low force constant and a high resonance frequency, thus are highly desirable for atomic force microscope (AFM) imaging and force measurement. According to some embodiments, the invention provides small silicon (Si) cantilevers integrated with a Si tip, for example fabricated from SOI wafers ... 06/07/07 - 20070125159 - Method for analysis of a sample A method and apparatus for analysis of a sample. The method includes an accessing operation for accessing a region of the sample via a tip of at least one probe mounted on a cantilever. A removing operation removes a sample material from the region that is accessed by the tip ... 05/31/07 - 20070119241 - Method and apparatus of driving torsional resonance mode of a probe-based instrument A method of operating a scanning probe microscope includes using a probe having a cantilever, and oscillating the probe at a torsional resonance frequency thereof. In addition, the method includes substantially increasing torsional drive efficiency with dual actuators disposed on the probe or the probe base. First and second actuators ... 05/31/07 - 20070119240 - Semiconductor probe and method of writing and reading information using the same A semiconductor probe and a method of writing and reading information using the same. The semiconductor probe includes a cantilever and a tip formed on an end portion of the cantilever to write or read information on or from a ferroelectric medium on a surface of which an electrode is ... 05/24/07 - 20070113630 - Probe apparatus In a probe apparatus that intermittently irradiates a sample with excitation light to observe the sample while subjecting a cantilever including a probe arranged to face a surface of the sample to self-excited vibration at a predetermined frequency, the sample is irradiated with the excitation light at a predetermined timing ... 05/17/07 - 20070107502 - Overlay measurement methods with firat based probe microscope A method, system and unit for determining alignment in a layered device such as a semiconductor device includes providing a first layer having detectable surface and subsurface material properties and positioning a patterned photoresist layer over the first layer, patterned photoresist layer having detectable surface and subsurface material properties. The ... 05/17/07 - 20070107501 - Nanoscale displacement detector A nanoscale displacement detector includes a cantilever integrated with an optical resonator, referred to herein as a “microresonator.” The microresonator and cantilever are configured such that displacement of the cantilever relative to the microresonator causes a change in the resonant frequency of the microresonator. The change in the resonant frequency ... 04/26/07 - 20070089498 - Method and apparatus of high speed property mapping A probe instrument having a probe that interacts with a sample surface to perform a mechanical property measurement at high speed includes a scanner producing relative motion between the sample and the probe. In addition, a probe actuator produces relative motion between the sample and the probe, in a generally ... 04/26/07 - 20070089497 - Method and device for the contactless excitation of torsional vibrations in a one-sidedly clamped-in spring cantilever of an atomic force microscope A method for exciting free torsional vibrations in a spring cantilever, which is clamped in on one side and has a longitudinal extension, of an atomic force microscope (AFM) is disclosed. The invention provides by the one-sidedly clamped-in spring cantilever being placed at a distance over a surface between which ... 04/19/07 - 20070084273 - Deconvolving tip artifacts using multiple scanning probes The present invention comprises an apparatus and a method for using multiple scanning probes to deconvolve tip artifacts in scanning probe microscopes and other scanning probe systems. The invention uses multiple scanning probe tips of different geometries or orientations to scan a feature, such as a semiconductor line or trench, ... 04/19/07 - 20070084273 - Deconvolving tip artifacts using multiple scanning probes The present invention comprises an apparatus and a method for using multiple scanning probes to deconvolve tip artifacts in scanning probe microscopes and other scanning probe systems. The invention uses multiple scanning probe tips of different geometries or orientations to scan a feature, such as a semiconductor line or trench, ... 03/29/07 - 20070068234 - Gas filled reactive atomic force microscope probe An atomic force microscope (AFM) having a hollowed cantilever ending in a hollowed tip is described, wherein the end of the tip is immersed in a liquid. The AFM includes a gas source that provides and controls the flow of gas into the hollowed tip. The flow rate of the ... 03/22/07 - 20070062266 - Optical microcantilever, manufacturing method thereof, and optical microcantilever holder An optical microcantilever capable of reducing loss when propagating light. An optical microcantilever 10 comprises a support 1, an optical waveguide 2, a light-blocking film 3, a reflecting film 4, a pointed tip 5, a microscopic aperture 6 formed at the end of the tip 5, and a mirror 7 ... 03/22/07 - 20070062265 - Oscillator for atomic force microscope and other applications A device such as a sensor for use in an atomic force microscope. The device comprises a first oscillator, a second oscillator, a pair of first co-axial members interconnecting the first and second oscillators for torsionally suspending the first oscillator, a support structure, and a pair of second co-axial members ... 03/22/07 - 20070062264 - Multifunctional probe array system A probe array for includes a handle, a first probe and a second probe. The first probe has a first shank, connected to the handle, and a first tip; and the second probe has a second shank, connected to the handle, and second tip. The first tip contains a different ... 03/15/07 - 20070056362 - Oscillating probe with a virtual probe tip An oscillating probe of an elongated rod, having a first free end, and a second end that is attached to at least one actuator to apply oscillation cycles to the rod. Oscillation of the elongated rod during at least one complete cycle of oscillation of the actuator causes the free ... 03/08/07 - 20070051169 - Semiconductor probe with high resolution resistive tip and method of fabricating the same A semiconductor probe with a high-resolution tip and a method of fabricating the same are provided. The semiconductor probe includes: a cantilever doped with a first impurity; a resistive convex portion projecting from an end portion of the cantilever and lightly doped with a second impurity opposite in polarity to ... 03/01/07 - 20070044545 - Oscillator and method of making for atomic force microscope and other applications A device having an oscillator such as a sensor for use in an atomic force microscope. A pair of co-axial members interconnect support structure and the oscillator for torsionally suspending the oscillator. The co-axial members are portions of a layer of silicon nitride or other material that is connected to ... 03/01/07 - 20070044544 - Method and apparatus for determining surface characteristics by using spm techniques with acoustic excitation and real-time digitizing By digitizing the UFM signal without using a lock-in amplifier, substantially all of the information initially contained in the UFM output signal may be maintained and may then be used for further data processing. Consequently, any type of model or evaluation algorithm may be used without being restricted to a ... 02/22/07 - 20070039380 - Device for measuring hydralic roughness of the internal surface of a pipeline The device 1 for determining the hydraulic roughness of the internal surface of a pipe 2 has a trolley 4 with wheels 3. Drum 5 is mounted to be rotationally movable on trolley 4. The roughness is determined by measuring the resisting torque of drum 5 or by measuring the ... 02/15/07 - 20070033993 - Dual tip atomic force microscopy probe and method for producing such a probe One inventive aspect is related to an atomic force microscopy probe. The probe comprises a tip configuration with two probe tips on one cantilever arm. The probe tips are electrically isolated from each other and of approximately the same height with respect to the cantilever arm. The outer surface of ... 02/15/07 - 20070033992 - Method for attaching rod-shaped nano structure to probe holder The present invention relates to a method for manufacturing a probe for detecting surface signals or chemical signals through a long and slender rod-shaped nano structure such as tungsten nanowire, carbon nanotube, boron nanotube, etc., being attached to a tip end portion thereof. According to the method, a holder, acting ... 02/15/07 - 20070033991 - Tracking qualification and self-optimizing probe microscope and method A scanning probe microscope and method of operation for monitoring and assessing proper tracking between the tip and sample, as well as automating at least some aspects of AFM setup previously done manually. Preferably, local slopes corresponding to the acquired data are compared to determine a tracking metric that is ... 02/08/07 - 20070028677 - Method of error correction A measurement system has a surface sensing device mounted on an articulating probe head, which in turn is mounted on a coordinate positioning apparatus. The surface sensing device is moved relative to a surface by driving at least one of the coordinate positioning apparatus and probe head in at least ... 02/01/07 - 20070022804 - Scanning probe microscopy inspection and modification system A scanning probe microscopy (SPM) inspection and/or modification system which uses SPM technology and techniques. The system includes various types of microstructured SPM probes for inspection and/or modification of the object. The components of the SPM system include microstructured calibration structures. A probe may be defective because of wear or ... 01/18/07 - 20070012095 - Scanning probe microscope A scanning probe microscope for precisely measuring the elasticity or plastic deformation of a sample surface without being affected by the adsorption layer of the sample surface. The probe of the microscope and the sample are placed at a distance from each other. The probe and sample are brought into ... 01/18/07 - 20070012094 - Integrated displacement sensors for probe microscopy and force spectroscopy In accordance with an embodiment of the invention, there is a force sensor for a probe based instrument. The force sensor can comprise a detection surface and a flexible mechanical structure disposed a first distance above the detection surface so as to form a gap between the flexible mechanical structure ... 01/18/07 - 20070012093 - Scanning capacitance microscope, method of driving the same, and recording medium storing program for implementing the method Provided are a scanning capacitance microscope, which can be very sensitive to a variation of capacitance between a tip and a sample and can make a clear and accurate measurement by preventing stray capacitance, a method of the scanning capacitance microscope, and a recording medium having embodied thereon a program ... 12/21/06 - 20060283240 - Force scanning probe microscope A force scanning probe microscope (FSPM) and associated method of making force measurements on a sample includes a piezoelectric scanner having a surface that supports the sample so as to move the sample in three orthogonal directions. The FSPM also includes a displacement sensor that measures movement of the sample ... 12/14/06 - 20060277981 - Micro structure, cantilever, scanning probe microscope and a method of measuring deformation quantity for the fine structure It is desired that highly efficient and highly sensitive sensors being extremely small size is provided in desired position, desired shape and size for a micro structure that causes the elastic deformation at least a part thereof. Moreover, it is also required that facilitating to assemble and adjust the components, ... 12/07/06 - 20060272399 - System for wide frequency dynamic nanomechanical analysis Dynamic nanomechanical analysis of a sample is performed by using a cantilever probe that interacts with the sample using a force applied across a wide range of frequencies that includes frequencies greater than 300 Hz. The motion of the cantilever probe is detected in response to the applied force over ... 12/07/06 - 20060272398 - Beam tracking system for scanning-probe type atomic force microscope Disclosed is a novel scanning-probe type atomic force microscope wherein false deflection of probe is reduced. Probe of the scanning-probe type atomic force microscope moves in both the horizontal direction and the vertical direction during the scanning, while the sample is kept stationary. In order to reduce the false deflection ... 11/23/06 - 20060260388 - Probe and method for a scanning probe microscope A measurement instrument probe has an outwardly extending sensing lever having at least two sections, one section that, at least during operation, has a different effective spring constant than an effective spring constant of another section of the lever. The sensing lever preferably includes a cantilever that is fixed at ... 11/16/06 - 20060254348 - Scanning probe device and processing method of scanning probe There is provided a device in which a probe can be used for both of observation and correction, and which can, even if a next generation photomask of ultra minute structure is made an object, perform a desired processing without injuring a normal portion in a process of obtaining information ... 11/16/06 - 20060254347 - Scanning probe device and processing method by scanning probe There is provided a device in which a probe can be used for both of observation and correction, and which can, even if a next generation photomask of ultra minute structure is made an object, perform a desired processing without injuring a normal portion in a process of obtaining information ... 11/16/06 - 20060254346 - Method to transiently detect sample features using cantilevers An approach to determine cantilever movement is presented. An observer based state estimation and statistical signal detection and estimation techniques are applied to Atomic Force Microscopes. A first mode approximation model of the cantilever is considered and an observer is designed to estimate the dynamic states. The cantilever-sample interaction is ... 11/16/06 - 20060254345 - Probe with embedded heater for nanoscale analysis The invention is a heated thermal probe suitable for use in micro- thermal analysis or other high resolution thermal measurements and actions. The probe is, in the preferred embodiment, a microfabricated cantilever with a sharp probe tip of a type used in Scanning Probe Microscopes (SPM's) which further includes an ... 11/02/06 - 20060243036 - Atomic force microscope with probe with improved tip movement An atomic force microscope probe provides an indentation testing function in a direction along an axis. The probe has a tip and an arm structure holding the tip. The arm structure has one end mounted on a fixed stage, the other end coupled to the AFM tip, and a hollow ... 11/02/06 - 20060243035 - Surface roughness/contour profile measuring instrument A surface roughness/contour profile measuring instrument capable of automatic movement of a pickup to a measurement position has been disclosed. The surface roughness/contour profile measuring instrument comprises a pickup and a pickup moving mechanism and measures the surface roughness or the contour profile of the surface of a work, and ... 10/26/06 - 20060236757 - Torsional harmonic cantilevers for detection of high frequency force components in atomic force microscopy A method for measuring high frequency force of interaction between a tip of a cantilever and a sample includes providing a cantilever having a cantilever arm and a probe tip formed on a free end of the cantilever arm where the cantilever arm has a first shape and an axis ... 10/19/06 - 20060230820 - Measuring head A unit damper apparatus 18 is used as a damper apparatus 18 which absorbs an impact and a vibration conveyed from a contact 14 to a seesaw member 12, and a structure of this unit damper apparatus 18 is the structure which absorbs circular movement of the seesaw member 12 ... 10/19/06 - 20060230819 - System for sensing a sample A profiler or scanning probe microscope may be scanned across a sample surface with a distance between them controlled to allow the sensing tip to contact the surface intermittently in order to find and measure features of interest. The distance is controlled so that when the sensing tip is raised ... 10/19/06 - 20060230818 - Planar resonant tunneling sensor and method of fabricating and using the same Planar resonant tunneling sensor devices and methods for using the same are provided. The subject devices include first and second electrodes present on a surface of a planar substrate and separated from each other by a nanodimensioned gap. The devices also include a first member for holding a sample, and ... 10/12/06 - 20060225490 - Adaptable end effector for atomic force microscopy based nano robotic manipulators An improved nanomanipulation system is provided for performing nanomanipulation operations in relation to a sample surface. The system includes: an atomic force microscope having a probe for performing nanomanipulation operations on the sample surface, where the probe includes a cantilever having a layer of piezoelectric material; a position detector configured ... 09/28/06 - 20060213261 - Real time detection of loss of cantilever sensing loss An approach to detect when a cantilever loses interaction with a sample, thereby detecting when a portion of an image obtained using a cantilever is spurious is presented. An observer based estimation of cantilever deflection is compared to the cantilever deflection and the resulting innovation is used to detect when ... 09/28/06 - 20060213260 - Atomic force microscope and method of energy dissipation imaging using the same An atomic force microscope and method of energy dissipation imaging using such atomic force microscope. The atomic force microscope has a cantilever equipped with a probe for making contact with a sample, a vibrating unit for vibrating the cantilever, a vibration control unit for controlling the vibrating unit based on ... 09/21/06 - 20060207318 - System for sensing a sample A profiler or scanning probe microscope may be scanned across a sample surface with a distance between them controlled to allow the sensing tip to contact the surface intermittently in order to find and measure features of interest. The distance is controlled so that when the sensing tip is raised ... 09/21/06 - 20060207317 - Scanning probe microscope To provide a scanning probe microscope which measures an electric property of a sample with a high degree of accuracy without being affected by light leak. The scanning probe microscope is provided with a self detection type probe 6 including a cantilever 3 whose probe 2 is disposed at its ... 09/07/06 - 20060196255 - Drive unit A drive unit is provided that is capable of providing a high-accuracy measurement operation while suppressing a posture change of a detector even if the detector is moved. The drive unit includes a cross section of horizontally-oriented-U-shape guide rail provided to a frame, and the outside to be parallel to ... 08/31/06 - 20060191329 - Dynamic activation for an atomic force microscope and method of use thereof A scanning probe microscope method and apparatus that modifies imaging dynamics using an active drive technique to optimize the bandwidth of amplitude detection. The deflection is preferably measured by an optical detection system including a laser and a photodetector, which measures cantilever deflection by an optical beam bounce technique or ... 08/31/06 - 20060191328 - Straightness correcting method for surface texture measuring instrument, and surface texture measuring instrument A surface texture measuring instrument is provided that is capable of performing a correction operation depending on the rotation angle position of a detector even when the detector is rotated for measurement. ... 08/24/06 - 20060185424 - Integrated measuring instrument A surface analyzing system including in one system both an integrating optical instrument, such as a scatterometer, and individual-feature-measuring instrument, such as a scanning probe microscope or a beam imaging system, for example, a scanning electron microscope. In a preferred embodiment, the two instruments are capable of characterizing a wafer ... 08/17/06 - 20060179927 - Apparatus for measurement of friction force at the interface of a slider and rotating disk A slider-disk interface tester for measuring the friction force at the interface uses a “negative-pitch” slider in contact with a rotating disk. The tester includes a base that supports a motor for rotating the disk and an actuator for supporting the slider and moving it to a desired radial location ... 07/20/06 - 20060156798 - Carbon nanotube excitation system A carbon nanotube excitation system is disclosed. The excitation system is suitable to vibrate the nanotube and to excite at least one nanotube resonant frequency. Types of excitation systems include but are not limited to electromagnetic system having a coil or an antenna, mechanical system having piezoelectric elements, electrostatic system ... 07/13/06 - 20060150721 - Fluid delivery for scanning probe microscopy The following invention pertains to the introduction of a gas (or fluid) around a SPM probe or nanotool™ to control chemical activity e.g. oxygen to promote oxidation, argon to inhibit oxidation or clean dry air (CDA) to inhibit moisture to control static charging due to the action of the probe ... 07/13/06 - 20060150720 - Probe for a scanning microscope A scanning microscope probe in which a palladium covering film is formed on the surface of the protruding portion of a cantilever, and the base end portion of a nanotube is disposed in contact with the palladium covering film with the tip end portion of the nanotube protruding to the ... 07/13/06 - 20060150719 - Method for determining tribological properties of a sample surface using a scanning microscope (sem) and associated scanning microscope Described is a method for examining a surface of a sample using an atomic force scanning microscope (AFM) comprising a cantilever with a longitudinal extension along which a measuring tip is disposed, which is selectively arranged relative to said sample surface by a driver means and whose spatial position is ... 06/15/06 - 20060123895 - Drive head and personal atomic force microscope having the same Provided are a drive head and a personal atomic force microscope having the same, and the drive head includes a cantilever provided with a bend detector and for moving a probe, a drive head for moving the cantilever up and down, and a scanner for moving a sample in x- ... 06/15/06 - 20060123894 - Spm sensor An SPM sensor (1) for a scanning probe microscope with a cantilever (3), a holding element (2) at one end of the cantilever (3) and a sensor tip (4) at the other end of the cantilever (3) and to a method for producing sensors of this type. The EBD structure ... 06/01/06 - 20060112760 - Scanner for probe microscopy A scanner for probe microscopy that avoids low resonance frequencies and accounts better for piezo nonlinearities. The x, y and z axes of a linear stack scanner are partially decoupled from each other while maintaining all mechanical joints stiff in the direction of actuation. The scanning probe microscope comprises a ... 05/04/06 - 20060090550 - Surface texture measuring probe and microscope utilizing the same A surface texture measuring probe (60) includes a probe head (65), a first supporting body (61), a second supporting body (62), a piezoelectric element (63) and a balancer (64). The first supporting body includes a first supporter (611) having an inner space, and a plurality of beams (613) respectively extending ... 04/20/06 - 20060081040 - Surface information measuring apparatus and surface information measuring method To measure surface information and physical information of a sample with high accuracy by promoting linearity in Z direction by nullifying cross talk in XY directions as less as possible, there is provided a surface information measuring apparatus including a probe having a stylus, a Z actuator fixed with the ... 04/13/06 - 20060075807 - Alignment-tolerant lens structures for acoustic force actuation of cantilevers In accordance with one aspect of the present invention, a cantilever of a probe-based instrument is deflected by directing a beam of ultrasonic acoustic energy at the cantilever to apply acoustic radiation pressure to the cantilever. The energy is generated by an acoustic actuator. The transmitted beam preferably is focused ... 03/30/06 - 20060065047 - Atomic force microscope An apparatus includes a sample stage, a cantilever mount, a cantilever-force detector, a cantilever feedback system, and a sample stage feedback system. The sample stage is configured for holding a sample. The cantilever mount is configured for mechanically fixing a mechanical cantilever having a scanning tip. The cantilever-force detector is ... 03/02/06 - 20060042364 - Angled tip for a scanning force microscope A microscope probe includes a cantilever having a carbon nanostructure attached thereto at a distally oriented angle. A method of making the microscope probe can include the steps of: providing a cantilever; depositing a masking layer on a surface of the cantilever; developing a deterministic spot of the masking layer; ... 02/16/06 - 20060032296 - Software synchronization of multiple scanning probes A method and apparatus for scanning multiple scanning probe microscopes in close proximity, to scan overlapping scan areas at the same time while avoiding collision employs a control system providing drive signals to a first Atomic Force Microscope (AFM) and calculated drive signals to additional AFMs based on the first ... 01/26/06 - 20060016251 - Topography and recognition imaging atomic force microscope and method of operation A recognition force microscope for detecting interactions between a probe and a sensed agent on a scanned surface and methods for its operation are provided. The microscope includes a scanning probe having a tip that is sensitive to a property of the scanned surface, and the probe is adapted to ... 01/19/06 - 20060010969 - Surface finish tester apparatus and methods Automated apparatus and methods for testing surface finishes. In at least one preferred embodiment, automated apparatus capable of reliably, automatically testing surface finishes in industrial environments. In at least one further preferred embodiment, an automated, robotic surface finish tester programmable to measure surface finishes of a plurality of spatially separate ... 01/12/06 - 20060005615 - Method and apparatus for evanescent field measuring of particle-solid separation Evanescent wave scattering by a scanning probe in a scanning probe microscope is utilized to determine and monitor separation between a scanning probe and a sample. A laser light is totally internally reflected at the interface between a more optically dense (incident) medium and less optically dense (transmitting) medium, exciting ... 01/12/06 - 20060005614 - Torsional harmonic cantilevers for detection of high frequency force components in atomic force microscopy A cantilever for the use in atomic force microscopy includes a cantilever arm having a fixed end being attached to a base member and a free end where the cantilever arm has a first shape and an axis of torsion associated with the first shape, and a probe tip projecting ... 01/05/06 - 20060000263 - Method and apparatus for obtaining quantitative measurements using a probe based instrument A cantilever probe-based instrument is controlled to counteract the lateral loads imposed on the probe as a result of probe sample interaction. The probe preferably includes an active cantilever, such as a so-called bimorph cantilever. Force counteraction is preferably achieved by monitoring a lateral force-dependent property of probe operation such ... 12/22/05 - 20050279158 - Atomic force microscope and corrector thereof and measuring method An atomic force microscope includes a tip (12). The tip is shifted to determine a height of a surface interval (44) of an object, wherein the surface interval is substantially sloped at an angle above the horizontal and defines a point (42a). The atomic force microscope includes a light source ... 12/01/05 - 20050262931 - System for sensing a sample A profiler or scanning probe microscope may be scanned across a sample surface with a distance between them controlled to allow the sensing tip to contact the surface intermittently in order to find and measure features of interest. The distance is controlled so that when the sensing tip is raised ... 12/01/05 - 20050262930 - Scanning probe microscopy apparatus and techniques Scanning probe techniques based on the measurement of impedance spectroscopy using a conductive an SPM tip is provided and applied to the study of local transport properties, especially at a grain boundary. The contributions of the grain boundaries and tip-surface interaction can be distinguished based on the analysis of the ... 11/17/05 - 20050252282 - Methods of fabricating structures for characterizing tip shape of scanning probe microscope probes and structures fabricated thereby A characterizer for determining the shape of a probe tip for an atomic force microscope and methods of fabricating and using the characterizer. The characterizer includes a micromachined crystalline structure with opposed edges separated by a width suitable for characterizing a dimension of the probe tip. At least one of ... 11/10/05 - 20050247117 - Probe with hollow waveguide and method for producing the same A probe for detecting light or irradiating light comprises a cantilever supported at an end thereof by a substrate, a hollow tip formed at a free end of the cantilever, a microaperture formed at the end of the tip, and a hollow waveguide formed inside the cantilever. A method for ... 11/03/05 - 20050241375 - Cantilever probes for nanoscale magnetic and atomic force microscopy The various embodiments discloses a cantilever probe comprising a first electrode and a second electrode engaged to a substrate and a branched cantilever wherein the cantilever comprises a nanostruture. Furthermore, the probe comprises a first arm of the cantilever engaged to the first electrode and a second arm of the ... 11/03/05 - 20050241374 - High aspect ratio tip atomic force microscopy cantilevers and method of manufacture The present invention provides a method for the selective growth of single carbon nanotubes (CNT) on the tip apex of a conventional cantilever. Selective CNT growth is established by coating the backside of a cantilever, having a through-hole at a tip apex, with a catalyst material followed by a cover ... 10/20/05 - 20050229684 - Method and apparatus for detecting topographical features of microelectronic substrates An apparatus and method for detecting characteristics of a microelectronic substrate. The microelectronic substrate can have a first surface with first topographical features, such as roughness elements, and a second surface facing opposite from the first surface and having second topographical features, such as protruding conductive structures. In one embodiment, ... 10/13/05 - 20050223785 - Scanning probe device and processing method by scanning probe There is provided a device in which a probe can be used for both of observation and correction, and which can, even if a next generation photomask of ultra minute structure is made an object, perform a desired processing without injuring a normal portion in a process of obtaining information ... 10/06/05 - 20050217354 - Scanning probe microscope There is provided a scanning probe microscope capable of simply and accurately confirming whether or not a sample shape satisfies specified conditions. A pseudo reference image Sref1 comprises a pair of reference line profiles Lref1 and Lref2 arranged apart form each other in parallel. An operator moves and rotates the ... 09/29/05 - 20050210967 - Method of fabricating a surface probing device and probing device produced thereby A method of making a probe having a cantilever and a tip include providing a substrate having a surface and forming a tip extending substantially orthogonally from the surface. The method includes depositing an etch stop layer on the substrate, whereby the etch stop layer protects the tip during process. ... 09/29/05 - 20050210966 - Scanning probe microscope and measuring method by means of the same A scanning probe microscope capable of radiating light on a sample without moving the sample from the scanning probe microscope and measuring the sample with controlling the condition under which the sample is placed and without changing the location of the sample is provided. The scanning probe microscope includes a ... 09/15/05 - 20050199047 - Liquid cell and passivated probe for atomic force microscopy and chemical sensing The invention provides a liquid cell for an atomic force microscope. The liquid cell includes a liquid cell housing with an internal cavity to contain a fluid, a plurality of conductive feedthroughs traversing the liquid cell housing between the internal cavity and a dry side of the liquid cell, a ... 09/15/05 - 20050199046 - Scanning probe microscope A scanning probe microscope is capable of not only avoiding contact between a sample and a probe but also capable of shortening the time from detection of the sample during scanning by the probe to raising the probe to the top surface of the sample. A Z-axis controlling amount calculating ... 09/01/05 - 20050188752 - Digital control of quality factor in resonant systems including cantilever based instruments a digital system for controlling the quality factor in a resonant device. The resonant device can be any mechanically driven resonant device, but more particularly can be a device that includes a cantilever within its system, such as an atomic force microscope. The quality factor can be digitally controlled to ... 08/11/05 - 20050172704 - Methods utilizing scanning probe microscope tips and products thereof or produced thereby The invention provides a lithographic method referred to as “dip pen” nanolithography (DPN). DPN utilizes a scanning probe microscope (SPM) tip (e.g., an atomic force microscope (AFM) tip) as a “pen,” a solid-state substrate (e.g., gold) as “paper,” and molecules with a chemical affinity for the solid-state substrate as “ink.” ... 08/11/05 - 20050172703 - Scanning probe microscopy inspection and modification system A scanning probe microscopy (SPM) inspection and/or modification system which uses SPM technology and techniques. The system includes various types of microstructured SPM probes for inspection and/or modification of the object. The components of the SPM system include microstructured calibration structures. A probe may be defective because of wear or ... 07/28/05 - 20050160802 - Spm cantilever and fabricating method thereof Disclosed herein is SPM cantilever having a support portion, a lever portion extended from the support portion and a probe portion formed at a free end of the lever portion, said probe portion having a generally plate-like form and the probe portion having an additionally sharpened terminal end portion. The ... 07/14/05 - 20050150280 - Metallic thin film piezoresistive transduction in micromechanical and nanomechanical devices and its application in self-sensing spm probes Thin metallic films are used as the piezoresistive self-sensing element in microelectromechanical and nanoelectromechanical systems. The specific application to AFM probes is demonstrated. ... 07/07/05 - 20050145021 - Method and apparatus for manipulating a sample A method and apparatus for manipulating the surface of a sample including a cantilever, a first tip mounted on the cantilever, and a second tip mounted on the cantilever, the first and the second tip being configured to combine to form an imaging probe and to separate to form a ... 06/30/05 - 20050138996 - Use of arrays of atomic force microscope/scanning tunneling microscope tips to scan nanocodes A surface analysis device is disclosed for identifying molecules by simultaneously scanning nanocodes on a surface of a substrate. The device includes a scanning array that is capable of simultaneously scanning the nanocodes on the surface of the substrate and an analyzer that is coupled with the scanning array. The ... 06/09/05 - 20050120781 - Scanning probe microscope The present invention is intended to solve the problem that the tip of the probe of a scanning probe microscope cannot be conditioned stably due to overload in a contact region. This problem is solved by a scanning probe microscope for scanning the probe and a sample relative to each ... ### FreshPatents.com Support |