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Low Pressure Cold Trap Process And Apparatus

Low Pressure Cold Trap Process And Apparatus patent applications listed include Date, Patent Application Number, Patent Title, Patent Abstract summary and are linked to the corresponding patent application page.

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Refrigeration


Low Pressure Cold Trap Process And Apparatus



Cryopump
12/18/14 - 20140366562 - A cryopump includes a cryopump including: a refrigerator; a first cryopanel including a radiation shield; and a second cryopanel enclosed by the first cryopanel and cooled to a lower temperature than that of the first cryopanel. The radiation shield includes an attaching pedestal located lateral to the second cryopanel for...

Cryopump and vacuum pumping method
11/27/14 - 20140345300 - A cryopump includes an adsorption cryopanel including a front surface configured to receive incidence of a non-condensable gas and a back surface having an adsorption region of the non-condensable gas, and a reflection cryopanel including a reflection surface of the non-condensable gas facing the back surface. The adsorption cryopanel may...

Systems and methods for cryogenic refrigeration
11/06/14 - 20140326001 - Systems and methods for improving the performance of dilution refrigeration systems include cryocondensation traps employed in the helium circuit of a dilution refrigerator may be modified to improve performance. A cryocondensation trap employs a cryocondensation surface having at least one temperature that preferably matches the temperature at which at least...

Refrigerator and cold trap
10/02/14 - 20140290282 - This invention provides a cold trap using a Stirling refrigerator. A refrigerator includes a drive piston configured to drive a free piston so as to reciprocally move a working medium between a heat dissipation portion and a heat absorption portion, a vibration sensor configured to measure a vibration of a...

Cryopump and method for vacuum pumping non-condensable gas
09/25/14 - 20140283531 - A cryopump includes: a radiation shield that includes a shield front end that defines a shield opening, a shield bottom portion, and a shield side portion that extends between the shield front end and the shield bottom portion; and a cryopanel assembly that is cooled to a lower temperature than...

Cryopump and vacuum pumping method
09/25/14 - 20140283532 - A cryopump includes a first cryopanel including a radiation shield and a plate member across a shield opening and a second cryopanel enclosed by the first cryopanel and cooled to a lower temperature than that of the first cryopanel. The plate member includes a plate main portion and a plate...

Cryopump and method for regenerating the cryopump
09/18/14 - 20140260338 - A method of regenerating a cryopump includes a first discharging process that includes alternately evacuating a cryopump housing and supplying a purge gas in a first pressure range, and a second discharging process that includes evacuating the cryopump housing to a low pressure region below the first pressure range. The...

Cryopump system, method of operating the same, and compressor unit
09/18/14 - 20140260339 - A cryopump system includes a cryopump, a compressor of a working gas for the cryopump, a control device configured to control an operation frequency of the compressor, a gas line connecting the cryopump and the compressor, and a gas quantity adjustment unit configured to switch a working gas quantity of...

Cryopump
09/11/14 - 20140250923 - A cryopump includes: a cryopanel assembly including a plurality of cryopanels each having an adsorption area on both surfaces thereof; a radiation shield forming a gas receiving space that surrounds the cryopanel assembly; and a radiation cover disposed in a cryopump inlet. The radiation cover includes a main plate located...

Cryopump and method of operating the cryopump
08/21/14 - 20140230461 - A cryopump includes a high-temperature cryopanel, a low-temperature cryopanel, and a cooling system. The cooling system has: a refrigerator provided with a first stage for cooling the high-temperature cryopanel and a second stage for cooling the low-temperature cryopanel; and a control unit configured to control a cool-down operation in which...

Cryopump and cryopump mounting structure
08/21/14 - 20140230462 - A cryopump for evacuating a vacuum chamber is provided with a radiation shield provided with a shield opening end surrounding a shield opening for receiving a gas and a lid member having a connection opening narrower than a shield opening for connecting the shield opening to the vacuum chamber. The...

Cold trap and mounting structure of cold trap
06/26/14 - 20140174108 - A cold trap includes a duct, which is for connecting a volume to be evacuated to a vacuum pump, and a cold panel surrounded by the duct. The duct includes an inlet flange at an evacuation target side and an outlet flange at a vacuum pump side. The outlet flange...

Cryopump, cryopanel structure, and vacuum evacuation method
05/15/14 - 20140130523 - A cryopump includes a nested array of cryopanels. A hydrogen molecule incident into a clearance in the nested array of cryopanels is reflected by a cryopanel. The reflected hydrogen molecule is adsorbed by another cryopanel. Each of the cryopanels may have an inverted frustum shape....

Cryopump
11/28/13 - 20130312431 - A cryopump has a simple-to-manufacture frontal baffle plate with improved gas distribution and has a large-area second-stage array plate to capture Type II gases. The cryopump has a first-stage frontal baffle plate having orifices and flaps bent from and attached to the orifices. The cryopump has a second-stage top plate...

Low profile cryopump
10/24/13 - 20130276466 - Faster cool down time is achieved in a low profile cryopump by having heat transferred directly from the inlet louver to the first stage heat station through one or more tapered thermal busses, and by obviating the need of a thermal shield over the second stage cylinder of the expander...

Cryopump drain and vent
10/24/13 - 20130276467 - A means of rapidly melting a large quantity of type II cryogen in a cryopump that is configured to contain the liquid in the warm cryopanel with the inlet to the cryopump facing up or sideways, and venting the liquid and gas in a controlled way. Rapid melting is preferably...

Cryopump with controlled hydrogen gas release
09/19/13 - 20130239593 - A cryopump system includes a cryopump having a first cooling stage and a second cooling stage connected to the first cooling stage, the second cooling stage including a gas adsorber having a hydrogen adsorbing capacity of at least about 2 standard liters. The thermal storage capacity of the second cooling...

Cryopump system, and method of operating the same, and compressor unit
09/12/13 - 20130232999 - A cryopump system includes a cryopump configured to perform a preparatory operation including a cooldown from a room temperature to a cryogenic temperature and to perform a vacuum pumping operation at the cryogenic temperature, a compressor unit of a working gas for the cryopump, a gas line connecting the cryopump...

Cryopump and method for regenerating the cryopump
09/05/13 - 20130227968 - A method for regenerating a cryopump includes stopping a pressure sensor for the cryopump, starting to heat a cryogenic surface for adsorbing gas molecules, starting the rough evacuation of the cryopump while the pressure sensor is stopped, and terminating the rough evacuation while the pressure sensor is stopped. This method...

Cryopump, method of regenerating cryopump, and control device for cryopump
08/29/13 - 20130219924 - A cryopump includes: a first panel to be cooled by a first stage of a refrigerator; a second panel to be cooled by a second stage of the refrigerator; a panel temperature sensor provided with the first panel and/or the second panel; a stage temperature sensor provided with the first...

Multi-refrigerator high speed cryopump
08/15/13 - 20130205805 - A refrigerator system or cryopump includes a first refrigerator having at least first and second stages, and a second refrigerator. A thermal coupling between the first stage of the first refrigerator and a cold end of the second refrigerator is restricted to maintain a temperature difference between the cold end...

Cryopump
08/08/13 - 20130199210 - A cryopump includes a low-temperature cryopanel, a high-temperature cryopanel provided outside the low-temperature cryopanel, and a housing provided outside the high-temperature cryopanel. The high-temperature cryopanel includes an extension panel extending outward. The housing includes an inlet flange surrounding the extension panel....

Cryopump and method for repairing cryopumps
08/01/13 - 20130192276 - A cryopump includes a housing, an electrical control unit which controls the cryopump, a purge valve provided on a passage between an external purge gas source and the inside of the housing, a rough valve provided on a passage between an external pump and the inside of the housing, a...

Cold trap and method of controlling cold trap
08/01/13 - 20130192277 - A cold trap includes two individually controllable cooling units. The cold trap is provided in an evacuation path for connecting a vacuum chamber to a turbomolecular pump, The first cooling unit includes a first panel unit provided in the evacuation path such that the panel is exposed, and a first...

System and method for trapping and collecting volatile compounds
05/23/13 - 20130125564 - A system and method for trapping and collecting volatile compounds is described. The system and method generally include a trapping column including adsorption materials positioned within a lumen of the trapping column, an oven for heating the trapping column, and a cold-trap condenser. When a sample containing a volatile compound...

Cryogenic pump with a device for preventing the memory effect
05/02/13 - 20130104571 - The invention relates to a device (21) for avoiding the memory effect in cryogenic pumps having a first cooling stage (23) and a second cooling stage (25) which adjoins the first cooling stage (23) in the axial direction. A cylindrical shield (31) has an opening (37) and a base (35),...

Contaminant cold trap for a vapor-compression refrigeration apparatus
04/18/13 - 20130091871 - Apparatuses and methods are provided for facilitating cooling of an electronic component. The apparatus includes a vapor-compression refrigeration system. The vapor-compression refrigeration system includes an expansion component, an evaporator and a compressor coupled in fluid communication via a refrigerant flow path. The evaporator is coupled to and cools the electronic...

Cryopump and method of manufacturing the same
03/14/13 - 20130061609 - A cryopump includes an array of cryosorption panels which are surrounded by a cryopump inner open space opened to a cryopump opening and a radiation shield which surrounds the cryopump inner open space. At least one of the cryosorption panels includes a front panel surface divided into an adsorption region...

Cryopump and method of manufacturing the same
01/10/13 - 20130008189 - A cryopump includes an array of a plurality of cryosorption panels which are surrounded by a cryopump inner open space opened to a cryopump opening and a radiation shield which surrounds the cryopump inner open space. At least one of the plurality of cryosorption panels includes a panel end which...

Gas balanced brayton cycle cold water vapor cryopump
01/10/13 - 20130008190 - The primary invention is to cool a water vapor cryopump using a Gas Balanced Brayton cycle refrigerator. The refrigerator is comprised of a compressor, a gas balanced reciprocating engine and a counterflow heat exchanger. It is connected to the cryopump through insulated transfer lines. Options include a gas storage volume...

Cryopump control apparatus, cryopump system, and method for monitoring cryopump
12/20/12 - 20120317999 - A cryopump comprises a cryopanel that cools and thus condenses or adsorbs gas, and a pump housing that contains the cryopanel. a regeneration process of the cryopump includes a basic purge process, an evacuation processes, and an optional purge process that is executed additionally if required. The optional purge process...

Cryopump control apparatus, cryopump system, and method for evaluating vacuum retention of cryopumps
12/06/12 - 20120304669 - A cryopump control apparatus controls an evacuation process of a cryopump that includes a cryopanel which cools and thus condenses or adsorbs gas, and a pump housing which contains the cryopanel. The cryopump control apparatus includes a pressure control unit and a vacuum retention evaluation unit. The pressure control unit...

Cryopump system and method for regenerating cryopumps
11/15/12 - 20120285182 - A cryopump system includes: a plurality of cryopumps connected to a common roughing pump and provided with a plurality of rough valves, respectively; and a controller configured to control each of the rough valves for regenerating a corresponding one of the plurality of cryopumps. A delay time is set between...

Cryopump and evacuation method
10/18/12 - 20120260675 - A cryopump includes a refrigerator which cools a cryopanel and a controller which receives a control signal representing an operation mode from a beam irradiating apparatus and controls the refrigerator based on the control signal. The operation mode includes an irradiation mode for irradiating a beam to a target and...

Cryopump system, compressor, and method for regenerating cryopumps
10/11/12 - 20120255314 - A cryopump system includes: a cryopump including a refrigerator for executing cooling operation for cooling a cryopanel and heating operation for regenerating the cryopanel; and a compressor for supplying operating gas to the refrigerator. The cryopump system raises the temperature of operating gas in the compressor during the heating operation...

Cryopump and vacuum pumping method
09/06/12 - 20120222431 - A cryopump 10 includes: a first cryopanel including a radiation shield 18 having a shield opening 20 and a louver 23 arranged in the shield opening 20; a second cryopanel 24 surrounded by the first cryopanel; and a refrigerator 14 configured to cool the first cryopanel to a first cooling...

Cryopump and vacuum valve device
07/19/12 - 20120180503 - A cryopump includes: a vent valve provided with a cryopump housing to discharge a gas pumped on a cryopanel to the outside of the cryopump housing; and a control unit configured to determine, based on the pressure measured by a pressure sensor, whether a positive pressure is generated in the...

Cryopump system and method for controlling the cryopump system
03/22/12 - 20120067065 - A cryopump system includes: a plurality of cryopumps; a plurality of compressor units arranged to operate in parallel in accordance with a control output, respectively, to supply refrigerant gas to the plurality of cryopumps; and a cryopump controller operative to determine the control output for each of the plurality of...

Cryopump and filter device
03/15/12 - 20120060518 - A cryopump includes: a cryopump housing arranged to define an inner space of the cryopump from an outer environment; an exhaust duct arranged to connect with the cryopump housing so as to exhaust fluid from the inner space of the cryopump to the outer environment; and a filter structure. The...

Cryopump and cryogenic refrigerator
03/15/12 - 20120060519 - A refrigerator includes a displacer coupling structure, wherein one of two coupled displacers protrudes into the other of the two coupled displacers to the extent that an end of a regenerator built in the one of the two coupled displacers positions itself inside of the other of the two coupled...

Cold trap and cold trap regeneration method
11/03/11 - 20110265495 - A cold trap is provided with a cold panel provided in a pumping path such that the panel is exposed, a refrigerator thermally coupled to the cold panel and operative to cool the cold panel; and a controller configured, in a regeneration process for evaporating a gas frozen on the...

Process chamber with integrated pumping
11/03/11 - 20110265496 - A process chamber with integrated pumping including a process chamber, refrigerators and arrays, or pumping surface, that are integral to the process chamber....

Cold trap and vacuum evacuation apparatus
09/22/11 - 20110225989 - A cold trap includes a refrigerator and a cold panel that is thermally connected with the refrigerator to be cooled. A rough surface is formed on the cold panel. The cold trap is arranged, for example, in an evacuation channel for connecting a vacuum chamber with a turbo-molecular pump in...

Method and apparatus for providing temperature control to a cryopump
07/07/11 - 20110162391 - Cryopump components are improved using thin layer heating elements for temperature control or to serve as heaters. These heating elements may be located and prevent pooling during regeneration. The temperature control may also be achieved through the use of ceramic heating elements. The ceramic heating elements may also include a...

Expander speed control
02/10/11 - 20110030392 - Apparatus and method for controlling the speed for a GM type expander includes relays that interrupt power when the current in the line is zero. The speed controller apparatus limits the maximum speed providing the expander with sufficient gas to meet its cooling requirements....

Cryopump and method of monitoring cryopump
01/27/11 - 20110016890 - A cryopump pumps gas from a vacuum chamber in a vacuum apparatus performing vacuum processing. The cryopump comprises: a refrigerator; a cryopanel cooled by the refrigerator; and a controller configured to control an operating cycle of the refrigerator such that the cryopanel is controlled so as to have a target...

Cryopump network
01/27/11 - 20110016891 - A vacuum network control system includes a plurality of nodes configured for control over operational processes of the system. The plural nodes are configured, in a network ring or other topology, as a selectable master node for controlling the operational processes. Control can be distributed among, and passed between, each...

Exhaust system
07/29/10 - 20100186427 - An exhaust system includes an entrapment vacuum pump equipped with a refrigerator, a master compressor which is driven in a driving frequency band to make constant a pressure difference between gas recovered from the refrigerator via a low-pressure gas recovery pipe and compressed gas supplied to the refrigerator via a...

Cryopump
05/13/10 - 20100115971 - A cryogenic refrigerator of a cryopump generates cryogenic cooling in an expansion volume by reciprocally moving a displacer in a cylinder. A cryopanel and a cup-shaped shield are received in a vacuum chamber of the cryopump and are cooled by the cryogenic cooling. The shield protects the cryopanel from radiant...

Cryopump
04/01/10 - 20100077771 - A cryopump includes a second-stage cryopanel, a radiation shield that surrounds the second-stage cryopanel and has a shield opening, and a first-stage cryopanel provided in the shield opening. The first-stage cryopanel includes a first panel provided with opening regions thereon in a first distribution, and a second panel arranged closer...

Cryotrap and vacuum processing device with cryotrap
01/21/10 - 20100011783 - A cryotrap which is set in a vacuum vessel, and has an exhaust panel which condenses and exhausts a gas by cooling, and a cooling stage which is connected to a refrigerator and thereby cooled, includes a cooling storage body fixed on a cooling stage while maintaining thermal contact with...

Cryopump louver extension
01/21/10 - 20100011784 - A standard size cryopump adapted to be mounted behind a nonstandard gate valve by extending the inlet array to a larger diameter. A standard size cryopump adapted to be mounted behind a nonstandard gate valve by using an extension attached to flanges, where the flanges correspond to the diameter of...

Cryopump
01/07/10 - 20100000235 - A cryopump includes a radiation shield provided with a main inlet at one end thereof and a sub-inlet in a side thereof; and a cryopanel assembly cooled to a temperature lower than that of the radiation shield. The cryopanel assembly includes an upper structure having at least one cryopanel and...

Cryopump
11/19/09 - 20090282841 - A cryopump includes: a refrigerator having a first cooling stage and a second cooling stage cooled to a temperature lower than that of the first cooling stage; a radiation shield on side surface of which is formed an opening, in which the refrigerator is inserted through the opening such that...

Cold trap to increase gas residence time to increase condensation of vapor molecules
10/08/09 - 20090249801 - A cold trap is disclosed with a chamber having partitions or surfaces that direct the incoming wet vapor to substantially all of the cold inner surfaces of the cold trap. Typically, the cold inner surfaces are the inner walls of the chamber. The interaction of the wet vapor and the...

Cryopump and evacuation method
07/02/09 - 20090165469 - A cryopump includes: a cryopump chamber having an inlet port through which a gas to be pumped is introduced; a refrigerator provided with a second cooling stage provided in the cryopump chamber; an intermediate member thermally coupled to the second cooling stage; and a cryopanel having a connecting part connected...

Cryopump, cryopump unit, vacuum processing apparatus including cryopump unit, and cryopump regeneration method
07/02/09 - 20090165470 - A cryopump regeneration method includes a temperature raising step of raising the temperature of a cryopanel so as to vaporize gas molecules condensed on the exhaust surface of the cryopanel, an evacuation step of evacuating a pump vessel, a determination step of determining whether the internal pressure of the pump...

Cryopump apparatus and operation method therefor
05/21/09 - 20090126374 - A cryopump apparatus includes a sensor which detects at least one of the temperature and pressure in a cryopump, a controller which detects a change in at least one of the temperature and pressure in the cryopump on the basis of the detection result obtained by the sensor, thereby determining...

Cooling trap unit
04/30/09 - 20090107154 - A cooling trap unit including a vacuum vessel with a drain port, a refrigerator connected to the vacuum vessel such that an endothermic unit is located on a vacuum side, and a cooling panel which is fixed to the endothermic unit to be in tight contact with it and condenses...

Conduit trap and condensation recovery device
03/05/09 - 20090056346 - The present invention provides a conduit trap, which can also operate as condensation recovery device when installed in a refrigeration system drainage line. The conduit trap is generally a hollow body defining a fluid path that includes an upper conduit 20, having a waste outlet 30 and optionally a condensation...