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Refrigeration > Low Pressure Cold Trap Process And Apparatus Low Pressure Cold Trap Process And ApparatusLow Pressure Cold Trap Process And Apparatus patent applications listed are from June 2005 to current and include Date, Patent Application Number, Patent Title, Patent Abstract summary and are linked to the corresponding patent application page.08/23/07 - 20070193283 - Interrupted dc operation of thermocouple vacuum gauge A direct current voltage to heat the sensor wire for powering and extracting a signal voltage from a thermocouple-type vacuum sensor. The direct current used produces a DC offset in the sensor output where the heating current flow is stopped for a short interval and the unbiased sensor voltage is ... 06/28/07 - 20070144185 - Cryo pump In a cryo pump 20 that is used in a process chamber 10 into which a process gas is introduced and that includes a first-stage panel, a heat shield plate 24, and a second-stage panel 28, a notch for allowing for entrance of gas molecules and an additional shield 34 ... 05/10/07 - 20070101733 - Radiation shield for cryogenic pump for high temperature physical vapor deposition A method and apparatus to shield a cryogenic pump in a physical vapor deposition chamber comprising a physical vapor deposition chamber, a gasket in thermal contact with the physical vapor deposition chamber, at least one post in contact with the gasket, a radiation shield connected at the top of the ... 12/07/06 - 20060272338 - Vacuum device A vacuum device comprises a plurality of cryopumps (10) connected with one or a plurality of vacuum chambers. The cryopumps (10) are connected via media supply conduits (12) and media return conduits (14) with a compressor (16). An adjusting device (18) is connected before at least one of the cryopumps ... 11/16/06 - 20060254289 - Vacuum device A vacuum device comprises a plurality of cryopumps (10), particularly a plurality of cryopumps connected in parallel. Further, at least one compressor device (16) is provided which is connected to the cryopumps (10) via medium supply conduits (12). A medium return conduit (14) is also connected to the compressor device ... 03/30/06 - 20060064990 - High conductance cryopump for type iii gas pumping A cryopump provides for high pumping speed of Type III gases. An open configuration of a frontal array provides high conductance of gases into a radiation shield which is shaped to focus gases toward a second stage array. The second stage array has an open configuration of baffles coated with ... 02/16/06 - 20060032240 - Valve device A valve device, according to the invention, for connecting to a cryopump, wherein the valve device comprises a body with a through-channel and a connection flange at one end of the through-channel for connecting to a backing pump connection flange of the cryopump; a pressure relief valve which opens when ... 12/15/05 - 20050274129 - Cryogenic adsorption pump for the collection of airborne gases, particles, organic molecules and micro-organisms A cryogenic adsorption pump, system and method including adsorbent material contained in a first container, wherein the first container is cooled inside of a second container. The second container is filled with a cryogenic liquid to effectuate the cooling of the first container, creating a vacuum in the first container. ... 12/15/05 - 20050274128 - Cryopump with enhanced hydrogen pumping This invention is a cryopump for enhanced removal of hydrogen from a vacuum environment. This is achieved through the use of a second stage made readily available to the gases being removed from the vacuum chamber. A plate that is part of the second stage is positioned with opening slots ... 12/01/05 - 20050262852 - Integration of automated cryopump safety purge A system and method is provided to control a purge valve during an unsafe condition associated with a cryopump. An electronic controller may be used to control the opening and closing of one or more purge valves during the unsafe condition. The purge valve can be a cryo-purge valve or ... 10/27/05 - 20050235656 - Cold trap with rapidly regeneration The cryogenic trap of the invention comprises, in a hollow body (3) having an access valve (2) and an outlet valve (6), a cold core (11) associated with a plate (13) having low thermal inertia and movable between a trapping position in contact with the cold core (11), and a ... 09/22/05 - 20050204754 - Vacuum pump damping adapter The invention concerns a damping adapter (3) insertable in a suction duct between a service chamber (2) and a vacuum pump (1). The adapter (3) consists of a tubular duct wall (6) in the form of a flexible bellows surrounded by a damping sleeve (7) supported on two end flanges ... 09/22/05 - 20050204753 - Integrated rough/purge/vent (rpv) valve A single ducted valve assembly provides an integrated cryopump valve having a purge valve port connecting the assembly to a cryopump with a coaxial connection having an inner duct and an outer duct. A pressurized gas interface connects a pressurized gas source to the cryopump through the inner duct. A ... 09/22/05 - 20050204752 - Vacuum-insulating system and method for generating a high-level vacuum A method of generating a high-level vacuum comprises evacuating a chamber having a substantially-pure gas therein to a medium-level vacuum, and freezing the residual gas to generate the high-level vacuum within the chamber. Impurities, such as atmospheric air, may be purged from the chamber by evacuating the chamber to a ... 07/21/05 - 20050155358 - Method and apparatus for detecting and measuring state of fullness in cryopumps The present system and method provides a mechanism for monitoring the level of fullness of a cryopump by measuring the cryopump adsorption capacity. An ion gauge or other total pressure gauge is in contact with the condensing or adsorbing panels of the pump. The gauge sensor, for example, can be ... ### FreshPatents.com Support |