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William C. Cray Cymer, Inc. patents

The following is a sampling of recent William C. Cray Cymer, Inc. patent applications (USPTO Patent Application #, Patent Title) sorted by month.

March 2008 - William C. Cray Cymer, Inc. patents

20080071403 - High power laser flat panel workpiece treatment system controller

December 2007 - William C. Cray Cymer, Inc. patents

20070297467 - Bandwidth control device

July 2007 - William C. Cray Cymer, Inc. patents

20070160103 - Gas discharge laser light source beam delivery unit

May 2007 - William C. Cray Cymer, Inc. patents

20070102653 - Euv light source
20070098033 - External optics and chamber support system

February 2007 - William C. Cray Cymer, Inc. patents

20070023705 - Euv light source collector lifetime improvements

January 2007 - William C. Cray Cymer, Inc. patents

20070013913 - Spectral metrology for high repetition rate gas discharge laser
20070001130 - Lpp euv plasma source material target delivery system
20070002919 - Gas discharge laser line narrowing module

December 2006 - William C. Cray Cymer, Inc. patents

20060289806 - Lpp euv drive laser input system
20060291517 - High pulse repetition rate gas discharge laser

October 2006 - William C. Cray Cymer, Inc. patents

20060233214 - Hybrid electrode support bar
20060227839 - Gas discharge laser output light beam parameter control
20060222034 - 6 khz and above gas discharge laser system

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