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Utility apparatus and utility method of substrate processing apparatus

USPTO Application #: 20080078526
Title: Utility apparatus and utility method of substrate processing apparatus

Abstract: A utility apparatus of a substrate processing apparatus includes an introducing mechanism to introduce a gas to a first space portion inside the utility apparatus, a cooling mechanism that cools the gas introduced to inside the utility apparatus to a predetermined temperature, and a second space portion disposed in a position above the first space portion to introduce the gas from the first space portion via an opening. A heating mechanism is provided in the second space portion to heat the gas introduced to the second space portion to a predetermined temperature. A humidity adjusting mechanism adjusts the humidity of the gas heated by the heating mechanism, and a plurality of supply paths is provided in a position above the second space portion to send the gas collectively to the substrate processing apparatus.

(end of abstract)
Agent: Kanesaka Berner And Partners LLP - Alexandria, VA, US
Inventor: Kim Dong-Hun
USPTO Applicaton #: 20080078526 - Class: 165 65 (USPTO)

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