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Utility apparatus and utility method of substrate processing apparatus

USPTO Application #: 20080078327
Title: Utility apparatus and utility method of substrate processing apparatus

Abstract: A utility apparatus supplies a liquid to a substrate processing apparatus having a plurality of blocks of heat treatment apparatus groups. A plurality of supply ports supplies the liquid for each vertical block, horizontal block, or heat treatment apparatus. A plurality of recovery ports collects the liquid supplied to each vertical block, horizontal block, or heat treatment apparatus. Detecting mechanisms are provided respectively in the plurality of recovery ports to detect a temperature of the recovered liquid. A control mechanism controls based on detection information of the detecting mechanisms.

(end of abstract)
Agent: Kanesaka Berner And Partners LLP - Alexandria, VA, US
Inventor: Kim Dong-Hun
USPTO Applicaton #: 20080078327 - Class: 118724 (USPTO)

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