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Three-dimensional micro spike and method of manufacturing the sameRelated Patent Categories: Surgery, Diagnostic Testing, Sampling Nonliquid Body Material (e.g., Bone, Muscle Tissue, Epithelial Cells, Etc.), CuttingThe Patent Description & Claims data below is from USPTO Patent Application 20060178598. Brief Patent Description - Full Patent Description - Patent Application Claims BACKGROUND OF THE INVENTION [0001] 1. Field of the invention [0002] The present invention relates to a micro spike which is a biopsy tool used to pick a tissue, and more particularly to a micro spike having a three-dimensional structure made of a single crystalline silicon and being capable of picking an enough amount of a tissue to examine the tissue while minimizing an examinee's pain with a minimal invasion when picking the tissue, and a method of manufacturing the same. [0003] 2. Description of the Prior Art [0004] In the medical area, biopsy tools are essential in preparing tissue samples for pathological tests. However, since a conventional biopsy tool according to the prior art has a relatively big size, an amount of the extracted tissue samples is unnecessarily much and it causes significant discomfort, risk, and injury to the patients. However, since a biopsy tool according to the prior art has a relatively big size, an amount of a tissue picked is unnecessarily much when picking the tissue. In addition, it is required many amounts of reagents to analyze the sampled tissue and the patient should endure pain and risk resulting from the medical treatment. [0005] For solving the above problems, there are suggested micro biopsy/precision cutting devices having a relatively small size, which are made by applying a micro machining process and a precision process. However, since most of the micro biopsy tools or precision cutting devices having a small size have a complex structure, it is difficult to manipulate the device when performing the biopsy and thus a skillful operator is required. [0006] FIG. 1 shows a catheter used to pick a tissue sample according to the prior art. As shown, the catheter comprises forceps jaws 202, a micro needle 204 and a main body 201. [0007] The catheter 200 shown in FIG. 1 has a structure such that the micro needle 204 having an jagged structure is mounted to a center of the catheter and the forceps jaws 202 are mounted to both sides of the needle. The catheter 200 of FIG. 1 picks a tissue such a manner that a surface of the tissue is stretched when pricking and drawing the tissue 500 with the micro needle 204 and then the forceps jaws 202 pick up and separate the stretched tissue. The catheter has an advantage of securing an accurate picking amount when picking the tissue. [0008] However, when picking the tissue using the catheter 200 of FIG. 1, since two processes of pricking the tissue with the micro needle 204, and picking and separating the tissue with the forceps jaws 202 should be performed, an examinee's pain is increased. In addition, there is an inconvenience that a movement of forceps jaws 202 should be manipulated to separate the tissue under state that the tissue is stretched with the micro needle 204. [0009] Additionally, according to the catheter 200 shown in FIG. 1, since the main body 201, the micro needle 204 and the forceps jaws 202 are integrated, the main body part 201 as well as the micro needle 204 and the forceps jaws 202 should be discarded after the catheter 200 is once used for the tissue picking. In other words, since the prior catheter is disposable, it is not desirable from a point of view of an efficient use of resources. [0010] In the mean time, there are known methods using a substrate bonding, a LIGA (Lithographic, Galvanoformung, Abformung) process, and a laser micro machining process for manufacturing a three-dimensional micro device. Hereinafter, each of the methods will be briefly described. [0011] The substrate bonding method is such that a structure is respectively formed on two substrates and then the two substrates are bonded to form a three-dimensional structure at a last step. According to this method, it is difficult to bond the substrates and there is much possibility of the structure to be transformed due to stress between the two substrates. [0012] The LIGA method is such that a photographing process is performed on a thick photoresist using an ion beam such as ultraviolet or X-ray emitting from a particle accelerator, a gap between the photoresist remaining after development is filled up by an electroplating method, and then a metal mold box for molding is formed. [0013] A three-dimensional LIGA process is a method of manufacturing a three-dimensional structure by performing an exposure process while rotating the ion beam to several directions. This method has a disadvantage such that it is difficult to obtain equipment capable of exposing the ion beam since the equipment is very expensive. In addition, since the three-dimensional structure made according to the LIGA process is hard to plate a photoresist structure after the exposure, it is impossible to make the molding box. Further, since the biopsy devise of the three-dimensional structure consisting of the photoresist material only has very low durability, it is impossible to virtually use it for the biopsy. [0014] Since the laser micro machining method processes an arbitrary shape in a manner of scanning the shape with the laser so as to make the shape, it takes much time to manufacture it. In addition, since a manufacturing cost is high, there is a difficulty in the mass-production. [0015] As described above, according to the prior methods of manufacturing the micro device, there are many difficulties such as a complex manufacturing process, a requirement of expensive manufacturing equipment, and a low durability of the micro device. Accordingly, there is a need of a method capable of manufacturing a three-dimensional biopsy tool having a firm structure while easily manufacturing it. In addition, as described above, there is needed a biopsy tool which is capable of minimizing a risk and a patient's pain when picking the tissue and which can be handled easily. SUMMARY OF THE INVENTION [0016] Accordingly, the present invention has been made to solve the above-mentioned problems occurring in the prior art. The object of the present invention is to provide a micro spike capable of picking an enough amount of a tissue to examine it through a simple process of inserting and extracting the device into and from the tissue and minimizing a patient's pain with a minimal invasion when picking the tissue. [0017] Another object of the invention is to provide a method of manufacturing a micro spike having a firm structure with ease by applying a sacrificial bulk micromachining (SBM) processing method to a single crystalline silicon substrate. [0018] In order to accomplish the object, there is provided a micro spike comprising a main body part made of single crystalline silicon and being insertion-mounted to a medical device for picking a living tissue sample; extension parts inserted into a tissue when picking the tissue sample and integratedly extended from upper and lower parts of one side of the main body part; and a protrusion part integratedly protruded from at least one of side surfaces of the extension parts and inserted into the tissue to pick the tissue sample together with the extension parts when picking the living tissue sample. [0019] In addition, in order to accomplish the object, there is provided a method of manufacturing a three-dimensional micro spike comprising steps of forming an insulation film consisting of a stacked structure of silicon oxide film and silicon nitride film on both surfaces of a single crystalline silicon substrate, performing a photographing process on the insulation film, and thus forming a pattern of the insulation film, so as to define a shape of a micro spike; performing a first reactive ion etching process for the both surfaces of the single crystalline silicon substrate and thus etching the silicon substrate by a thickness of a extension part, so as to determine the thickness of the extension part; vapor-depositing a passivation film on each side surface of the part etched through the reactive ion etching process; performing a second reactive ion etching process for a region except the deposition part of the passivation film so as to define a sacrificial layer; performing an anisotropic wet etching for the silicon substrate etched through the second reactive ion etching process using a basic solution; and performing a dicing process so as to separate the micro spike from the wet-etched silicon substrate. BRIEF DESCRIPTION OF THE DRAWINGS [0020] The above and other objects, features and advantages of the present invention will be more apparent from the following detailed description taken in conjunction with the accompanying drawings, in which: [0021] FIG. 1 shows a micro needle used to pick a tissue sample according to the prior art; Continue reading... Full patent description for Three-dimensional micro spike and method of manufacturing the same Brief Patent Description - Full Patent Description - Patent Application Claims Click on the above for other options relating to this Three-dimensional micro spike and method of manufacturing the same patent application. ### 1. Sign up (takes 30 seconds). 2. Fill in the keywords to be monitored. 3. Each week you receive an email with patent applications related to your keywords. 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