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Takahiro Nakayama patents

Recent patents with Takahiro Nakayama listed as an inventor - additional entries may be under other spellings.

Takahiro Nakayama - Related organizations: Canon Kabushiki Kaisha patents

Drawing apparatus and method of manufacturing article

03/06/14 - 20140065549 - The present invention provides a drawing apparatus for performing drawing on a substrate using a plurality of charged particle beams, the apparatus including an aperture array including an opening region including a region in which a plurality of openings are formed to generate the plurality of charged particle beams, and
Inventors: Takahiro Nakayama, Kentaro Sano

Exposure apparatus, exposure method, and method of manufacturing article

02/27/14 - 20140055765 - The present invention provides an exposure apparatus for exposing a shot on a substrate to first pulsed light, the apparatus including an optical element for guiding the first pulsed light to the substrate, an irradiation device configured to irradiate the optical element with second pulsed light having an infrared wavelength
Inventors: Takahiro Nakayama, Akira Miyake

### Takahiro Nakayama patent invention listings

The bibliographic references displayed about Takahiro Nakayama's patents are for a recent sample of Takahiro Nakayama's publicly published patent applications. The inventor/author may have additional bibliographic citations listed at the is not associated or affiliated in any way with the author/inventor or the United States Patent/Trademark Office but is providing this non-comprehensive sample listing for educational and research purposes using public bibliographic data published and disseminated from the United States Patent/Trademark Office public datafeed. This information is also available for free on the website. If Takahiro Nakayama filed recent patent applications under another name, spelling or location then those applications could be listed on an alternate page. If no bibliographic references are listed here, it is possible there are no recent filings or there is a technical issue with the listing--in that case, we recommend doing a search on the website.


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