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09/07/06 - USPTO Class 137 | 35 views | #20060196538 | Prev - Next | About this Page

Systems for depositing material onto workpieces in reaction chambers and methods for removing byproducts from reaction chambers

Title: Systems for depositing material onto workpieces in reaction chambers and methods for removing byproducts from reaction chambers

Related Patent Categories: Fluid Handling, Processes, Involving Pressure Control

Brief Patent Description - Full Patent Description - Patent Claims

The Patent Description & Claims data below is from USPTO Patent Application 20060196538, Systems for depositing material onto workpieces in reaction chambers and methods for removing byproducts from reaction chambers.

1-23. (canceled)

24. A method for removing byproducts from a reaction chamber through a first mainline, the first mainline being coupled to the reaction chamber and having first and second branchlines downstream from the reaction chamber, the method comprising: exhausting byproducts from the reaction chamber through the first mainline; collecting byproducts in a first trap in the first branchline of the first mainline; and collecting byproducts in a second trap in the second branchline of the first mainline.

25. The method of claim 24, further comprising dynamically controlling the flow of byproducts into the second branchline to maintain a pressure differential in the first mainline within a desired range.

26. The method of claim 24, further comprising dynamically controlling the flow of byproducts into the second branchline to maintain a generally consistent throughput in the first mainline.

27. The method of claim 24, further comprising: monitoring the difference between the pressure in the first mainline upstream from the first trap and the pressure in the first mainline downstream from the first trap; and regulating a throttling valve in the second branchline in response to the monitored pressure differential in the first mainline to flow byproducts into the second branchline to maintain the pressure differential in the first mainline within a desired range.

28. The method of claim 24, further comprising: closing a first valve in the first branchline upstream from the first trap and a second valve in the first branchline downstream from the first trap; and servicing and/or replacing the first trap while collecting byproducts in the second trap.

29. The method of claim 24 wherein the first mainline further comprises a third branchline and a fourth branchline each downstream from the first and second branchlines, and wherein the method further comprises: drawing byproducts from the reaction chamber through the first mainline with a first vacuum pump coupled to the third branchline of the first mainline; and drawing byproducts from the reaction chamber through the first mainline with a second vacuum pump coupled to the fourth branchline of the first mainline.

30. A method for removing byproducts from a reaction chamber through a first mainline, the first mainline having first and second branchlines downstream from the reaction chamber, the method comprising: exhausting byproducts from the reaction chamber through the first mainline; and dynamically controlling the flow of byproducts into the second branchline of the first mainline to maintain a pressure differential in the first mainline within a desired range.

31. The method of claim 30, further comprising: collecting byproducts in a first trap in the first branchline of the first mainline; and collecting byproducts in a second trap in the second branchline of the first mainline.

32. The method of claim 30, further comprising: monitoring the difference between the pressure in the first mainline upstream from a first trap and the pressure in the first mainline downstream from the first trap, the first trap being disposed in the first branchline; wherein dynamically controlling the flow of byproducts comprises regulating a throttling valve in the second branchline in response to the monitored pressure differential in the first mainline to maintain the pressure differential in the first mainline within the desired range.

33. The method of claim 30 wherein the first mainline further comprises a third branchline and a fourth branchline each downstream from the first and second branchlines, and wherein the method further comprises: drawing byproducts from the reaction chamber through the first mainline with a first vacuum pump coupled to the third branchline of the first mainline; and drawing byproducts from the reaction chamber through the first mainline with a second vacuum pump coupled to the fourth branchline of the first mainline.

34. A method for removing byproducts from a reaction chamber, the method comprising: exhausting byproducts from the reaction chamber through a first mainline; collecting byproducts in a first trap in a first branchline of the first mainline; monitoring the difference between the pressure in the first mainline upstream from the first trap and the pressure in the first mainline downstream from the first trap; and regulating a throttling valve in a second branchline of the first mainline in response to the monitored pressure differential in the first mainline to flow byproducts into the second branchline to maintain the pressure differential in the first mainline within a desired range.

35. The method of claim 34, further comprising collecting byproducts in a second trap in the second branchline.

36. The method of claim 34 wherein the throttling valve comprises a first valve, and wherein the method further comprises: closing a second valve in the first branchline upstream from the first trap and a third valve in the first branchline downstream from the first trap after regulating the first valve; collecting byproducts in a second trap in the second branchline; and servicing and/or replacing the first trap while collecting byproducts in the second trap.

37. The method of claim 34 wherein the first mainline further comprises a third branchline and a fourth branchline each downstream from the first and second branchlines, and wherein the method further comprises: drawing byproducts from the reaction chamber through the first mainline with a first vacuum pump coupled to the third branchline of the first mainline; and drawing byproducts from the reaction chamber through the first mainline with a second vacuum pump coupled to the fourth branchline of the first mainline.

38. A method for removing byproducts from a reaction chamber, the method comprising: removing byproducts from the reaction chamber through a first mainline; collecting byproducts in a first trap in a first branchline of the first mainline; closing a first valve in the first branchline upstream from the first trap and a second valve in the first branchline downstream from the first trap; servicing and/or replacing the first trap; and collecting byproducts in a second trap in a second branchline of the first mainline while the first and second valves are closed.

39. The method of claim 38 wherein the first mainline further comprises a third branchline and a fourth branchline each downstream from the first and second branchlines, and wherein the method further comprises: drawing byproducts from the reaction chamber through the first mainline with a first vacuum pump coupled to the third branchline of the first mainline; and drawing byproducts from the reaction chamber through the first mainline with a second vacuum pump coupled to the fourth branchline of the first mainline.

40. A method for removing byproducts from a reaction chamber, the method comprising: drawing byproducts from the reaction chamber through a first mainline with a first vacuum pump coupled to a first branchline of the first mainline; and drawing byproducts from the reaction chamber through the first mainline with a second vacuum pump coupled to a second branchline of the first mainline.

41. The method of claim 40, further comprising collecting byproducts in a trap in the first mainline.

42. The method of claim 40 wherein the first mainline further comprises a third branchline and a fourth branchline each upstream from the first and second branchlines, and wherein the method further comprises: collecting byproducts in a first trap in the third branchline of the first mainline; and collecting byproducts in a second trap in the fourth branchline of the first mainline.

43. The method of claim 40, further comprising dynamically controlling a throttling valve in the second branchline to maintain a generally consistent throughput in the first mainline.

44. The method of claim 40, further comprising dynamically controlling a throttling valve in the second branchline to maintain a generally consistent vacuum conductance in the first mainline.

45. The method of claim 40, further comprising: monitoring a pressure in the first mainline; and regulating a throttling valve in the second branchline in response to the monitored pressure to maintain a generally consistent pressure in the first mainline.

Brief Patent Description - Full Patent Description - Patent Claims

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