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08/16/07 | 60 views | #20070186858 | Prev - Next | USPTO Class 118 | About this Page  118 rss/xml feed  monitor keywords

Susceptor

USPTO Application #: 20070186858
Title: Susceptor
Abstract: A susceptor used in semiconductor epitaxial growth that can simultaneously obtain a plurality of epitaxial films high in uniformity. The susceptor includes a barrel type susceptor having a plurality of surfaces on an outer side of each of which a plurality of substrates can be freely disposed, and a member that has the barrel type susceptor disposed inside thereof and surfaces each of which is oppositely disposed tilting in the same direction as each of the surfaces of the barrel type susceptor. Alternatively, a susceptor includes a barrel type susceptor having a plurality of surfaces on an inner side of each of which a plurality of substrates can be freely disposed, and a member that has the barrel type susceptor disposed at the peripheral portion thereof and surfaces each of which is oppositely disposed tilting in the same direction as each of the surfaces of the barrel type susceptor. (end of abstract)
Agent: Oblon, Spivak, Mcclelland, Maier & Neustadt, P.C. - Alexandria, VA, US
Inventors: Tunenobu Kimoto, Hiroyuki Matsunami, Hirokazu Fujiwara
USPTO Applicaton #: 20070186858 - Class: 118728000 (USPTO)
Related Patent Categories: Coating Apparatus, Gas Or Vapor Deposition, Work Support

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