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Shirley L. Church. Esq. patentsThe following is a sampling of recent Shirley L. Church. Esq. patent applications (USPTO Patent Application #, Patent Title) sorted by month.
June 2009 - Shirley L. Church. Esq. patents
20090162647 - Erosion resistant yttrium comprising metal with oxidized coating for plasma chamber components 20090142247 - Chemical treatment to reduce machining-induced sub-surface damage in semiconductor processing components comprising silicon carbide April 2009 - Shirley L. Church. Esq. patents
20090087615 - Corrosion-resistant gas distribution plate for plasma processing chamber 20090087615 - Corrosion-resistant gas distribution plate for plasma processing chamber March 2009 - Shirley L. Church. Esq. patents
20090072009 - Method of preventing bonding between a load distribution block and a plate set of stacked sheets during diffusion bonding of a fluid flow structure 20090057375 - Method of improving surface roughness of fluid flow conduits within a diffusion bonded fluid flow structure February 2009 - Shirley L. Church. Esq. patents
20090053888 - Method of depositing a diffusion barrier layer which provides an improved interconnect 20090039057 - Method of increasing etchability of metals having chemical etching resistant microstructure 20090036292 - Plasma-resistant ceramics with controlled electrical resistivity January 2009 - Shirley L. Church. Esq. patents
20090025751 - Method of removing contaminants from a coating surface comprising an oxide or fluoride of a group iiib metal 20090002337 - Capacitive-type touch panel April 2008 - Shirley L. Church. Esq. patents
20080096138 - Method of reducing critical dimension bias during fabrication of a semiconductor device 20080083329 - Method of in-line purification of cvd reactive precursor materials 20080081151 - Vapor deposited nanometer functional coating adhered by an oxide layer January 2008 - Shirley L. Church. Esq. patents
20080026146 - Method of depositing a multilayer coating with a variety of oxide adhesion layers and organic layers 20080000497 - Removal of organic-containing layers from large surface areas December 2007 - Shirley L. Church. Esq. patents
20070281492 - Protective thin films for use during fabrication of semiconductors, mems, and microstructures November 2007 - Shirley L. Church. Esq. patents
20070276217 - Apparatus and method for inducing vibrations in a living body 20070264443 - Apparatus and method for avoidance of parasitic plasma in plasma source gas supply conduits October 2007 - Shirley L. Church. Esq. patents
20070241458 - Metal / metal nitride barrier layer for semiconductor device applications 20070243714 - Method of controlling silicon-containing polymer build up during etching by using a periodic cleaning step 20070226973 - Diffusion bonded fluid flow manifold with partially integrated inter-active component 20070232031 - Uv assisted low temperature epitaxial growth of silicon-containing films September 2007 - Shirley L. Church. Esq. patents
20070213143 - Exterior coatings for golf balls August 2007 - Shirley L. Church. Esq. patents
20070200082 - Manufacture of an integrated fluid delivery system for semiconductor processing apparatus 20070202636 - Method of controlling the film thickness uniformity of pecvd-deposited silicon-comprising thin films 20070178810 - Particle reduction on surfaces of chemical vapor deposition processing apparatus July 2007 - Shirley L. Church. Esq. patents
20070164190 - Appliance stabilizing device with quick release attachment 20070151581 - Cleaning method used in removing contaminants from a solid yttrium oxide-containing substrate 20070154851 - Maintenance of photoresist adhesion on the surface of dielectric arcs for 90 nm feature sizes June 2007 - Shirley L. Church. Esq. patents
20070134416 - Cleaning method used in removing contaminants from the surface of an oxide or fluoride comprising a group iii b metal May 2007 - Shirley L. Church. Esq. patents
20070113663 - Capacitance dual electrode pressure sensor in a diffusion bonded layered substrate 20070095366 - Stripping and cleaning of organic-containing materials from electronic device substrate surfaces January 2007 - Shirley L. Church. Esq. patents
20070020392 - Functional organic based vapor deposited coatings adhered by an oxide layer 20070010099 - Method of pattern etching a silicon-containing hard mask November 2006 - Shirley L. Church. Esq. patents
20060258124 - Low temperature epitaxial growth of silicon-containing films using close proximity uv radiation
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This listing is an abstract for educational and research purposes is only meant as a recent sample of applications filed, not a comprehensive history. Freshpatents.com is not affiliated or associated with Shirley L. Church. Esq. in any way and there may be associated servicemarks. This data is also published to the public by the USPTO and available for free on their website. Note that there may be alternative spellings for Shirley L. Church. Esq. with additional patents listed. Browse our Agent directory for other possible listings.
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