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Shirley L. Church. Esq. patents

The following is a sampling of recent Shirley L. Church. Esq. patent applications (USPTO Patent Application #, Patent Title) sorted by month.

June 2009 - Shirley L. Church. Esq. patents

20090162647 - Erosion resistant yttrium comprising metal with oxidized coating for plasma chamber components
20090142247 - Chemical treatment to reduce machining-induced sub-surface damage in semiconductor processing components comprising silicon carbide

April 2009 - Shirley L. Church. Esq. patents

20090087615 - Corrosion-resistant gas distribution plate for plasma processing chamber
20090087615 - Corrosion-resistant gas distribution plate for plasma processing chamber

March 2009 - Shirley L. Church. Esq. patents

20090072009 - Method of preventing bonding between a load distribution block and a plate set of stacked sheets during diffusion bonding of a fluid flow structure
20090057375 - Method of improving surface roughness of fluid flow conduits within a diffusion bonded fluid flow structure

February 2009 - Shirley L. Church. Esq. patents

20090053888 - Method of depositing a diffusion barrier layer which provides an improved interconnect
20090039057 - Method of increasing etchability of metals having chemical etching resistant microstructure
20090036292 - Plasma-resistant ceramics with controlled electrical resistivity

January 2009 - Shirley L. Church. Esq. patents

20090025751 - Method of removing contaminants from a coating surface comprising an oxide or fluoride of a group iiib metal
20090002337 - Capacitive-type touch panel

April 2008 - Shirley L. Church. Esq. patents

20080096138 - Method of reducing critical dimension bias during fabrication of a semiconductor device
20080083329 - Method of in-line purification of cvd reactive precursor materials
20080081151 - Vapor deposited nanometer functional coating adhered by an oxide layer

January 2008 - Shirley L. Church. Esq. patents

20080026146 - Method of depositing a multilayer coating with a variety of oxide adhesion layers and organic layers
20080000497 - Removal of organic-containing layers from large surface areas

December 2007 - Shirley L. Church. Esq. patents

20070281492 - Protective thin films for use during fabrication of semiconductors, mems, and microstructures

November 2007 - Shirley L. Church. Esq. patents

20070276217 - Apparatus and method for inducing vibrations in a living body
20070264443 - Apparatus and method for avoidance of parasitic plasma in plasma source gas supply conduits

October 2007 - Shirley L. Church. Esq. patents

20070241458 - Metal / metal nitride barrier layer for semiconductor device applications
20070243714 - Method of controlling silicon-containing polymer build up during etching by using a periodic cleaning step
20070226973 - Diffusion bonded fluid flow manifold with partially integrated inter-active component
20070232031 - Uv assisted low temperature epitaxial growth of silicon-containing films

September 2007 - Shirley L. Church. Esq. patents

20070213143 - Exterior coatings for golf balls

August 2007 - Shirley L. Church. Esq. patents

20070200082 - Manufacture of an integrated fluid delivery system for semiconductor processing apparatus
20070202636 - Method of controlling the film thickness uniformity of pecvd-deposited silicon-comprising thin films
20070178810 - Particle reduction on surfaces of chemical vapor deposition processing apparatus

July 2007 - Shirley L. Church. Esq. patents

20070164190 - Appliance stabilizing device with quick release attachment
20070151581 - Cleaning method used in removing contaminants from a solid yttrium oxide-containing substrate
20070154851 - Maintenance of photoresist adhesion on the surface of dielectric arcs for 90 nm feature sizes

June 2007 - Shirley L. Church. Esq. patents

20070134416 - Cleaning method used in removing contaminants from the surface of an oxide or fluoride comprising a group iii b metal

May 2007 - Shirley L. Church. Esq. patents

20070113663 - Capacitance dual electrode pressure sensor in a diffusion bonded layered substrate
20070095366 - Stripping and cleaning of organic-containing materials from electronic device substrate surfaces

January 2007 - Shirley L. Church. Esq. patents

20070020392 - Functional organic based vapor deposited coatings adhered by an oxide layer
20070010099 - Method of pattern etching a silicon-containing hard mask

November 2006 - Shirley L. Church. Esq. patents

20060258124 - Low temperature epitaxial growth of silicon-containing films using close proximity uv radiation



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