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06/28/07 | 17 views | #20070148788 | Prev - Next | USPTO Class 438 | About this Page  438 rss/xml feed  monitor keywords

Semiconductor piezoresistive sensor and operation method thereof

USPTO Application #: 20070148788
Title: Semiconductor piezoresistive sensor and operation method thereof
Abstract: A semiconductor piezoresistive sensor, which is electrically connected with a circuit, includes a semiconductor base, at least one piezoresistive element and a conductive layer. The semiconductor base includes a diaphragm and a base. The base is disposed adjacent to and around the diaphragm. The piezoresistive element is formed in the diaphragm and is electrically connected with the circuit. The conductive layer is electrically connected with the diaphragm. (end of abstract)
USPTO Applicaton #: 20070148788 - Class: 438003000 (USPTO)
Related Patent Categories: Semiconductor Device Manufacturing: Process, Having Magnetic Or Ferroelectric Component

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