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02/23/06 | 1 views | #20060038131 | Prev - Next | USPTO Class 250 | About this Page  250 rss/xml feed  monitor keywords

Scintillator panel and radiation image sensor

USPTO Application #: 20060038131
Title: Scintillator panel and radiation image sensor
Abstract: An Ag film as a light-reflecting film is formed on one surface of an a-C substrate of a scintillator panel. The entire surface of the Ag film is covered with an SiN film for protecting the Ag film. A scintillator having a columnar structure, which converts an incident radiation into visible light, is formed on the surface of the SiN film. The scintillator is covered with a polyparaxylylene film together with the substrate. (end of abstract)
Agent: Drinker Biddle & Reath Attn: Intellectual Property Group - Philadelphia, PA, US
Inventors: Takuya Homme, Toshio Takabayashi, Hiroto Sato, Takaharu Suzuki, Yoshio Natsume
USPTO Applicaton #: 20060038131 - Class: 250370110 (USPTO)
Related Patent Categories: Radiant Energy, Invisible Radiant Energy Responsive Electric Signalling, Semiconductor System, Scintillation System
The Patent Description & Claims data below is from USPTO Patent Application 20060038131.
Brief Patent Description - Full Patent Description - Patent Application Claims  monitor keywords



RELATED APPLICATIONS

[0001] This is a Continuation-In-Part application of International Patent Application serial No.09/971,943 filed on Oct. 9, 2001 now pending.

BACKGROUND OF THE INVENTION

[0002] 1. Field of the Invention

[0003] The present invention relates to a scintillator panel and radiation image sensor which are used for medical X-ray photography or the like.

[0004] 2. Related Background Art

[0005] While X-ray sensitive films have conventionally been used in medical and industrial X-ray photography, radiation imaging systems using radiation detectors have been coming into widespread use from the viewpoint of convenience and storability of photographed results. In such a radiation imaging system, pixel data caused by two-dimensional radiation are acquired as an electric signal by a radiation detector, and this signal is processed by a processing unit, so as to be displayed on a monitor.

SUMMARY OF THE INVENTION

[0006] Conventionally known as a typical radiation detector is one having a structure in which a scintillator panel comprising a scintillator formed on a substrate made of aluminum, glass, fused silica, or the like and an imaging device are cemented together. In this radiation detector, the radiation entering from the substrate side is converted by the scintillator into visible light, which is then detected by the imaging device (see JP7-21560A).

[0007] Meanwhile, though it is necessary for the scintillator panel to have a sufficiently high optical output in order to attain clear images in a radiation detector, the optical output has not been sufficient in the above-mentioned radiation detector.

[0008] It is an object of the present invention to provide a scintillator panel having an enhanced optical output, and a radiation image sensor using a scintillator panel having an enhanced optical output.

[0009] A scintillator panel according to the present invention comprises (1) a radiation-transmitting substrate, (2) a light reflective metal thin film disposed on the substrate, (3) a protective film covering an entire surface of the reflective metal thin film, and (4) a scintillator deposited on the protective film. And the protective film has a function to protect the reflective metal thin film against the scintillator.

[0010] According to the scintillator panel of the present invention, since the entire surface of the reflective metal thin film is covered with the protective film, any decomposition of this thin film based on water contained in the scintillator in a small amount can be prevented, and any degradation in function of the reflective metal thin film as a reflecting film can be prevented. Hence, an increased optical output of the scintillator panel can be maintained.

[0011] Another scintillator panel of the present invention comprises (1) a radiation-transmitting substrate, (2) a reflective metal thin film disposed on the substrate, (3) a protective film disposed on the reflective metal thin film, and (4) a scintillator deposited on the protective film at a position except an edge portion thereof. The reflective metal thin film transmits radiation and reflects light irradiated from the scintillator, and has a function to protect the reflective metal thin film against the scintillator.

[0012] According to this scintillator panel, since the scintillator and reflective metal thin film are separated, any decomposition of this film based on water contained in the scintillator in a small amount can be prevented, and any degradation in function of the reflective metal thin film as a reflecting film can be prevented. Hence, an increased optical output of the scintillator panel can be maintained.

[0013] The reflective film may be directly or indirectly disposed on the substrate. And the reflective film may be substantially made of a material containing a substance selected from the group consisting of Al, Ag, Cr, Cu, Ni, Ti, Mg, Rh, Pt, and Au.

[0014] The protective film may be an inorganic film like a metal oxide film or an organic film like polyimide. The inorganic film may be substantially made of a material containing a substance selected for the group consisting of LiF, MgF.sub.2, SiO.sub.2, TiO.sub.2, Al.sub.2O.sub.3, MgO, SiN. Or the metal oxide film may be an oxidized material of the reflective metal thin film.

[0015] The protective film preferably comprises an inorganic film such as SiN and an organic film such as polyimide.

[0016] The scintillator may be covered with an organic film. According to this configuration, the water-vapor resistance of the scintillator can be improved.

[0017] Preferably, the organic film further covers at least an outer periphery of said protective film. According to this configuration, the organic film covers over the scintillator and the outer periphery of said protective film and reaches to the surface of the substrate around the protective film. Whereby the water-vapor resistance of the scintillator can be further improved as compared to a structure in which only the scintillator is covered with an organic film. And the scintillating material depositing outside the scintillator layer is prevented to contact with the reflective metal thin film.

[0018] If this organic film further covers an entire surface of the substrate then it is preferable to further improve the water-vapor resistance as compared to a structure in which only the scintillator and at least part of the substrate surface are covered with an organic film.

[0019] A radiation image sensor according to the present invention is characterized in that an image sensing element is arranged to face the scintillator of the scintillator panel. According to the radiation image sensor of the present invention, since the scintillator panel can maintain an increased optical output, the output of the radiation image sensor can be maintained.

BRIEF DESCRIPTION OF THE DRAWINGS

[0020] FIG. 1 is a sectional view of a scintillator panel according to the first embodiment, and FIG. 2 is a sectional view of a radiation image sensor according to the first embodiment;

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