| Rework process for removing residual uv adhesive from c4 wafer surfaces -> Monitor Keywords |
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Rework process for removing residual uv adhesive from c4 wafer surfacesUSPTO Application #: 20080099149Title: Rework process for removing residual uv adhesive from c4 wafer surfaces Abstract: A method for the removal of residual UV radiation-sensitive adhesive from the surfaces of semiconductor wafers, remaining thereon from protective UV radiation-sensitive tapes which were stripped from the semiconductor wafers. Moreover, provided is an arrangement for implementing the removal of residual sensitive adhesive, which remain from tapes employed as protective layers on semiconductor wafers, particularly wafers having surfaces including C4 connections. (end of abstract) Agent: Scully, Scott, Murphy & Presser, P.C. - Garden City, NY, US Inventors: Steven R. Codding, Timothy C. Krywanczyk, Edward J. Sprogis, Jocelyn Sylvestre, Matthew R. Whalen USPTO Applicaton #: 20080099149 - Class: 156382000 (USPTO)
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