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Remco Jager patents

Recent bibliographic sampling of Remco Jager patents listed/published in the public domain by the USPTO (USPTO Patent Application #,Title):



01/16/14 - 20140014850 - Charged particle multi-beamlet lithography system with modulation device
The invention relates to a charged particle lithography system for patterning a target. The lithography system has a beam generator for generating a plurality of charged particle beamlets, a beam stop array with a beam-blocking surface provided with an array of apertures; and a modulation device for modulating the beamlets...
Inventors: Marco Jan-jaco Wieland, Remco Jager, Alexander Hendrik Vincent Van Veen, Stijn Willem Herman Karel Steenbrink

11/22/12 - 20120292491 - Charged particle beam modulator
The invention relates to a charged particle lithography system comprising a beam generator for generating a plurality of charged particle beamlets, a beam stop array and a modulation device. The beam stop array has a surface for blocking beamlets from reaching a target surface and an aperture array in the...
Inventors: Marco Jan-jaco Wieland, Remco Jager, Alexander Hendrik Vincent Van Veen, Stijn Willem Herman Karel Steenbrink, Teunis Van De Peut, Henk Derks (Mapper Lithography Ip B.v.)

11/01/12 - 20120273658 - Modulation device and charged particle multi-beamlet lithography system using the same
The invention relates to a charged-particle multi-beamlet lithography system. The system comprises a beam generator for generating a plurality of beamlets, a beamlet blanker array for patterning the plurality of beamlets, an optical fiber arrangement, and a projection system. The beamlet blanker array comprises a substrate provided with a first...
Inventors: Marco Jan-jaco Wieland, Teunis Van De Peut, Alexander Hendrik Vincent Van Veen, Remco Jager, Stijn Willem Herman Karel Steenbrink, Ralph Van Melle, Henk Derks (Mapper Lithography Ip B.v.)

10/27/11 - 20110261340 - Modulation device and charged particle multi-beamlet lithography system using the same
The invention relates to a charged-particle multi-beamlet lithography system for transferring a pattern onto the surface of a target using a plurality of charged particle beamlets. The system includes a beam generator, a beamlet blanker array, a shielding structure and a projection system. The beam generator is arranged for generating...
Inventors: Marco Jan-jaco Wieland, Remco Jager, Alexander Hendrik Vincent Van Veen, Stijn Willem Herman Karel Steenbrink (Mapper Lithography Ip B.v.)

10/27/11 - 20110260040 - Charged particle multi-beamlet lithography system with modulation device
A charged particle lithography system for transferring a pattern onto the surface of a target. The system comprises a beam generator for generating a plurality of charged particle beamlets, the plurality of beamlets defining a column, a beam stop array having a surface for blocking beamlets from reaching the target...
Inventors: Marco Jan-jaco Wieland, Remco Jager, Alexander Hendrik Vincent Van Veen, Stijn Willem Herman Karel Steenbrink (Mapper Lithography Ip B.v.)

02/24/11 - 20110042579 - Charged particle lithography apparatus and method of generating vacuum in a vacuum chamber
The invention relates to a charged particle lithography apparatus with a charged particle source for creating one or more charged particle beams, a charged particle projector for projecting the beams onto a wafer; and a moveable wafer stage for carrying the wafer. The charged particle source, charged particle projector, and...
Inventors: Guido De Boer, Sander Baltussen, Remco Jager, Jerry Johannes Martinus Peijster, Tijs Frans Teepen, Joris Anne Henri Van Nieuwstadt, Willem Maurits Weeda, Alexander Hendrik Vincent Van Veen (Mapper Lithography Ip B.v.)

Mapper Lithography Ip B.v.

Archived*
(*May have duplicates - we are upgrading our archive.)

20120273658 - Modulation device and charged particle multi-beamlet lithography system using the same


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The bibliographic references displayed about Remco Jager's patents are for a recent sample of Remco Jager's publicly published patent applications. The inventor/author may have additional bibliographic citations listed at the USPTO.gov. FreshPatents.com is not associated or affiliated in any way with the author/inventor or the United States Patent/Trademark Office but is providing this non-comprehensive sample listing for educational and research purposes using public bibliographic data published and disseminated from the United States Patent/Trademark Office public datafeed. This information is also available for free on the USPTO.gov website. If Remco Jager filed recent patent applications under another name, spelling or location then those applications could be listed on an alternate page. If no bibliographic references are listed here, it is possible there are no recent filings or there is a technical issue with the listing--in that case, we recommend doing a search on the USPTO.gov website.

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