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Quartz glass single hole nozzle for feeding fluid and quartz glass multihole burner head for feeding fluidUSPTO Application #: 20060177787Title: Quartz glass single hole nozzle for feeding fluid and quartz glass multihole burner head for feeding fluid Abstract: The present invention provides a quartz glass single hole nozzle for feeding fluid capable of performing high-precision control of a flow rate, a burner for heat processing equipped with the quartz glass single hole nozzle, a quartz glass multihole burner head for feeding fluid preferably used in flame processing or the like, and a quartz glass burner for heat processing equipped with the multihole burner. By using the nozzle, even if a distal end portion of the quartz glass burner, namely the nozzle is broken by contact with a workpiece or the like, it is enough to only replace the broken nozzle with a new one without a necessity for replacing the entire expensive quartz glass burner. When applying the nozzle to a metal burner, there can be given usefulness of the quartz glass such as heat resistance and contamination resistance or the like. The quartz glass single hole nozzle for feeding fluid according to the present invention comprises: a nozzle body portion made of a quartz glass material; and an attaching portion provided at the proximal end of the nozzle body portion, wherein a fluid feed path is bored in the interior of the nozzle body portion and the attaching portion of the nozzle body portion is detachably attachable to the distal end of a burner body for heat processing. (end of abstract) Agent: Rader Fishman & Grauer PLLC - Washington, DC, US Inventors: Toru Mizuno, Hirokazu Mizuno, Ichiro Yanase, Hyung-Bae Kim USPTO Applicaton #: 20060177787 - Class: 431345000 (USPTO) Related Patent Categories: Combustion, Flame Holder Having Attached Handle The Patent Description & Claims data below is from USPTO Patent Application 20060177787. Brief Patent Description - Full Patent Description - Patent Application Claims TECHNICAL FIELD [0001] The present invention relates to a novel quartz glass single hole nozzle for feeding fluid, in which a fluid feeding path is bored, and capable of feeding fluid such as gas, liquid, powder and the like quantitatively, a quartz glass burner for heat processing equipped with the single hole nozzle, a quartz glass multihole burner head for feeding fluid, and a quartz glass burner for heat processing equipped with the multihole burner head. BACKGROUND ART [0002] Conventionally, in order to ensure durability against a high temperature generated in company with combustion, or durability against contamination and degradation in company with a chemical reaction such as a vapor phase reaction at a distal end and in a flow path, a burner made of quartz glass as a material has been known especially as a combustion burner for heat processing. In order to form a flow path in a quartz glass burner, however, a skilled artisan had to manually fabricate the burner from a quartz glass tube as starting materials taking a long time. Especially, a quartz glass burner with many flow paths has been fabricated using many quartz glass tubes as starting materials by a skilled artisan in such a way that the quartz glass tubes are deliberately processed one by one and thereafter the quartz glass tubes are accurately bundled into a single body to thereby complete the quartz glass burner. [0003] However, since such a quartz glass burner is manually fabricated, there have inevitably arisen variations in dimensional precision between product lots and therefore a necessity has occurred for various settings or adjustments for heat processing in each lot of the burners by a scent of an operator manipulating a burner. [0004] Therefore, as disclosed in, for example, JP A 2000-104908, a method has been proposed in which a burner head is mechanically and integrally machined from a quartz glass rod according to a boring method using a drill. [0005] The inventors have continuously investigated and developed uses of the fabrication method, and have repeated serious studies on application thereof to a single hole burner nozzle and a multihole burner of a straight type which were mainly fabricated from metals such as stainless steel, iron, brass or copper in the prior art. As a result, the present invention has been achieved. [0006] That is, conventionally, a metal single hole burner especially used for local heat processing lacks problematically agile operability because it is heavy for an operator, and more than anything else, when heat processing is continued for long time, since a distal end of the metal burner is overheated by reflecting heat from a workpiece, a phenomenon unavoidably occurs that spray of the metal or metal ions from the distal end may be stuck or migrated to the workpiece. [0007] Even in case of no heat processing, when liquids high in corrosiveness and reactivity, for example, strong acids such as hydrochloric acid or strong bases such as caustic soda, or gases high in reactivity such as silicon tetrachloride are fed to the nozzle, an inconvenience inevitably occurs that the metal itself is corroded. [0008] In view of the above, while a quartz glass single hole burner has been employed in a specified field, the burner is not of a type fabricated by directly drilling a high purity synthetic quartz glass rod with a boring diameter precisely set in such a way as disclosed in the present invention; therefore, flow control thereof cannot be necessarily performed with a high precision, and it requires various kinds of adjustment operations based on a scent of an operator manipulating the burner. Especially, in recent years, the heat processing utilizing a robot has been tried. In this case, if the heat processing is operated placing the burner at a fixed position and setting the other operating conditions, there are severely demanded uniformity in performance and reproducibility of a product of the burner itself, with which a complete measure for coping has been requested. [0009] Moreover, when the distal end of the burner is broken by contact with a workpiece, an expensive quartz glass burner has to be totally replaced with a new one; measures to solve the problem have been awaited in various aspects. In a micro-processing field, for example, when a syringe drug glass ampoule for medical use is heat sealed, since a nozzle diameter is especially small, slight dimensional errors result in a difference in a feed rate of fluid; a quantitatively exact specification has been required. A precise specification has been similarly required in an ordinary micro-welding field as well. [0010] Since JP A 2000-104908 described above discloses such a construction as convergence of a gas flow is indispensable, it has been also demanded to fabricate a multihole burner of non-convergence (in which feed paths are parallel to each other) which is employed, for example, in flame processing. However, since it has been difficult to fabricate the multihole burner maintaining an exact straight advance of drilling for boring, a problem has remained that fabrication of the multihole burner involves difficulty. [0011] The inventors have continuously investigated and developed uses of the fabrication method, and found it to apply the method to a single hole burner head and a multihole burner of straight type which were mainly fabricated from metals such as stainless steel or copper in the prior art. As a result, the present invention has been achieved. DISCLOSURE OF THE INVENTION [0012] It is an object of the present invention to provide a quartz glass single hole nozzle for feeding fluid capable of performing high-precision control of a flow rate. By using the nozzle, even if a distal end portion of the quartz glass burner, namely the nozzle is broken by contact with a workpiece or the like, it is enough to only replace the broken nozzle with a new one without a necessity for replacing the entire expensive quartz glass burner. When applying the nozzle to a metal burner, there can be given usefulness of the quartz glass such as heat resistance and contamination resistance or the like. It is another object of the present invention to provide a burner for heat processing equipped with the quartz glass single hole nozzle. It is still another object to provide a quartz glass multihole burner head for feeding fluid preferably used in flame processing or the like, and a quartz glass burner for heat processing equipped with the multihole burner. [0013] A quartz glass single hole nozzle for feeding fluid according to the present invention comprises: a nozzle body portion made of a quartz glass material; and an attaching portion provided at the proximal end of the nozzle body portion, wherein a fluid feed path is bored in the interior of the nozzle body portion and the attaching portion of the nozzle body portion is detachably attachable to the distal end of a burner body for heat processing. [0014] Furthermore, when the machined quartz glass has machining strain and the strain needs removing, the strain of the entire nozzle may be removed by annealing. From the viewpoint of possible contamination of impurities, it is preferable to use synthetic quartz glass as the quartz glass material. The end portion of the quartz glass single hole nozzle for feeding fluid described above is detachably attachable to the distal end of the burner body for heat processing and hence when the nozzle alone is broken or contaminated, it is advantageous to easily replace the broken or contaminated nozzle with a new one. Note that if the attaching portion at the distal end of the single hole nozzle is provided with an external thread or an internal thread, the attaching and detaching operation is easy. [0015] A quartz glass burner for heat processing according to the present invention comprises: a burner body portion; a burner head portion provided at the distal end of the burner body portion, wherein the quartz glass single hole nozzle for feeding fluid according to the present invention is attached to the burner head portion. [0016] A metal or ceramic burner for heat processing according to the present invention comprises: a burner body portion; and a burner head portion provided at the distal end of the burner body portion, wherein the quartz glass single hole nozzle for feeding fluid according to the present invention is attached to the burner head portion. [0017] A quartz glass burner for heat processing according to the present invention comprises: a burner body portion; a burner head portion provided at the distal end of the burner body portion; and a single hole nozzle having a nozzle body portion in the interior of which a fluid feed path is bored, wherein the single hole nozzle is integrally formed at the distal end of the burner head portion. In the above burner for heat processing, the burner head portion may be bent if necessary. A hand burner according to the present invention is a quartz glass burner for heat processing, a metal or ceramic burner for heat processing, or a burner for heat processing according to the present invention, which an operator can operate by hand. In the case where the entire burner body is made of quartz glass, it weighs about 1/5 of a stainless steel burner, and due to the light weight of the entire body precise operability is secured. [0018] According to the hand burner of the present invention, in order to prevent a long stem portion from breakage, the burner body portion may be covered with a film of silicon rubber or any of other synthetic resins with shrinkability and flexibility when necessary. [0019] A quartz glass multihole burner head for feeding fluid according to the present invention is fabricated by boring a quartz glass material. The multihole burner head is preferably constructed such that the fluid flows out in a state of non-convergence. To be concrete, the quartz glass multihole burner head for feeding fluid according to the present invention comprises: an outer cylinder; an inner cylinder provided in the interior of the outer cylinder at a prescribed space therebetween and having a fluid feed path in the interior thereof, a central cylinder provided in the interior of the inner cylinder at a prescribed space therebetween and having a fluid feed path in the interior thereof; a nozzle portion having many throughholes bored therein and integrally provided at the distal ends of the inner cylinder and the central cylinder; and a tip portion having many fluid path outlets bored therein and provided at the distal end of the outer cylinder located at a prescribed space in front of the distal end of the nozzle portion, wherein the fluid feed paths, the through holes and the fluid path outlets are parallel to each other, when discharging fluid a flow of the fluid is not converged, and the fluid flows out in a state of non-convergence. [0020] A quartz glass burner for heat processing according to the present invention includes: a burner body portion; and a burner head portion provided at the distal end of the burner body portion, wherein the multihole burner head according to the present invention is used as the burner head portion. [0021] That is, in the single hole burner used especially for local heat processing, by precisely drilling the central portion of a circular end surface of a quartz rod to bore a flow path having a prescribed diameter concentrically, with the result that flow rate control of a fluid fed through the flow path can be correctly performed. Furthermore, by providing an external, thread or an internal thread at the end portion of the single hole nozzle according to the present invention, the single hole nozzle can be easily attached to the distal end of a metal burner; therefore, there can be perfectly solved inconveniences associated with a conventional burner that metal impurities and others fly from the distal end portion of the nozzle and then deposit onto a workpiece to contaminate it especially in case of long time heat processing. Since the quartz glass single hole nozzle according to the present invention is detachably attachable, even a burner made of a different material such as metal or ceramic can easily enjoy a material advantage of the quartz glass single hole nozzle, namely high heat resistance and contamination resistance. Continue reading... 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