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  Probe card and method for testing magnetic sensorUSPTO Application #: 20080106257Title: Probe card and method for testing magnetic sensor Abstract: A probe card comprises a plurality of coils for impressing a magnetic field in changeable directions to a magnetic sensor and a group of probes for detecting an output signal of the magnetic sensor. A manufacturing cost of the magnetic sensor can be decreased. (end of abstract) Agent: Dickstein Shapiro LLP - New York, NY, US Inventor: Takashi Suzuki USPTO Applicaton #: 20080106257 - Class: 324202000 (USPTO) The Patent Description & Claims data below is from USPTO Patent Application 20080106257. Brief Patent Description - Full Patent Description - Patent Application Claims
CROSS REFERENCE TO RELATED APPLICATION [0001] This application is a continuation of U.S. application Ser. No. 11/178,180, filed on Jul. 8, 2005, which is based on Japanese Patent application 2004-203281, filed on Jul. 9, 2004, Japanese Patent application Docket No. C50094-1: Japanese Patent Application No. 2005-202816, filed on Jul. 12, 2005, and Japanese Patent application Docket No. C50095-1: Japanese Patent Application No. 2005-205493, filed on Jul. 14, 2005, the entire contents of which are incorporated herein by reference. BACKGROUND OF THE INVENTION [0002] A) Field of the Invention [0003] The present invention relates to a probe card and a method for testing a magnetic sensor. [0004] B) Description of the Related Art [0005] Conventionally in a magnetic sensor test, an output signal from a packaged magnetic sensor is measured by placing the sensor into a magnetic field generated by Helmholtz coil or the like (e.g., refer to Japanese Laid-open Patent No. Hei09-50601. [0006] The testing method disclosed in the Japanese Laid-open Patent No. Hei09-50601, a cost for assembling a magnetic sensor may be wasteful if the magnetic sensor is judged as defection because the test is executed after that the magnetic sensor has been packaged. [0007] On the other hand, Japanese Laid-open Patent No.Sho62-55977 discloses a method for testing a magnetic sensor by a testing device having a coil prober as a magnetism generator. In this testing method, an output signal from a magnetic sensor in a wafer is measured by approaching a tip of the coil prober to the magnetic sensor and impressing a magnetic field to the magnetic sensor. Therefore, the magnetic sensor can be tested in a wafer state. [0008] However, the magnetic field generated from the tip of the coil prober is a single direction. Therefore, for testing outputs of the magnetic sensor corresponding to a plurality of directions of outer magnetic fields, the coil prober and the magnetic sensor have to be rotated relatively. SUMMARY OF THE INVENTION [0009] It is an object of the present invention to provide a probe card that can decrease a manufacturing cost of a magnetic sensor module. [0010] It is another object of the present invention to provide a method for testing a magnetic sensor module that can decrease a manufacturing cost of a magnetic sensor module. [0011] According to one aspect of the present invention, there is provided a probe a probe card, comprising: a plurality of coils for impressing a magnetic field in changeable directions to a magnetic sensor; and a group of probes for detecting an output signal of the magnetic sensor. [0012] According to another aspect of the present invention, there is provided a method for testing a magnetic sensor, comprising the steps of: (a) contacting a probe card to a wafer on which a magnetic sensor is formed; (b) impressing a magnetic field to the magnetic sensor by supplying current to a plurality of coils formed in the probe card; (c) detecting an output signal of the magnetic sensor by the probe card; and (d) changing a direction of the magnetic field impressed to the magnetic sensor by changing the current supplied to the plurality of the coils. [0013] According to still another aspect of the present invention, there is provided a method for testing a magnetic sensor module, comprising the steps of: (a) contacting at least one of magnetic sensor modules formed on a wafer, each magnetic sensor having a magnetic sensor and a digital signal processor, with a probe card having a coil for impressing a magnetic field to the magnetic sensor; (b) testing the digital signal processor by inputting a testing signal to the digital signal processor via the probe card and by obtaining a response signal corresponding to the testing signal from the digital signal processor via the probe card; (c) testing the magnetic sensor by supplying current to the coil for impressing a magnetic field to the magnetic sensor and obtaining a response signal from the magnetic sensor module via the probe card; and (d) separating the magnetic sensor module from the probe card. [0014] According to yet another aspect of the present invention, there is provided a method for testing a magnetic sensor module, comprising the steps of: (a) enclosing a packaged magnetic sensor module having a magnetic sensor and a digital signal processor into a testing socket having a coil for impressing a magnetic field to the magnetic sensor; (b) testing the digital signal processor by inputting a testing signal to the digital signal processor via the testing socket and by obtaining a response signal corresponding to the testing signal from the digital signal processor via the testing socket; (c) testing the magnetic sensor by supplying current to the coil for impressing a magnetic field to the magnetic sensor and obtaining a response signal from the magnetic sensor module via the testing socket; and (d) removing the packaged magnetic sensor module from the testing socket. BRIEF DESCRIPTION OF THE DRAWINGS [0015] FIG. 1 is a schematic diagram showing a testing system according to a first embodiment of the present invention. [0016] FIG. 2 is a schematic diagram for explaining the magnetic sensor module 300 to be tested by the testing system 1 according to the first embodiment of the present invention. [0017] FIG. 3 is an enlarged diagram showing a peripheral of the probe card at the time of the test. [0018] FIG. 4 is a plan view showing the probe card. [0019] FIG. 5A to FIG. 5C are graphs for explaining relation ship of supplied current to the coils and the combined magnetic field. [0020] FIG. 6 is a flowchart for testing the magnetic sensor module 300 by the prober 100 equipped with the probe card 130. Continue reading... Full patent description for Probe card and method for testing magnetic sensor Brief Patent Description - Full Patent Description - Patent Application Claims Click on the above for other options relating to this Probe card and method for testing magnetic sensor patent application. ###  How KEYWORD MONITOR works... a FREE service from FreshPatents1. Sign up (takes 30 seconds). 2. Fill in the keywords to be monitored. 3. Each week you receive an email with patent applications related to your keywords. Start now! - Receive info on patent apps like Probe card and method for testing magnetic sensor or other areas of interest. ### Previous Patent Application: Revolution indicator and a program for the revolution indicator Next Patent Application: Compliant tactile sensor Industry Class: Electricity: measuring and testing ### FreshPatents.com Support Thank you for viewing the Probe card and method for testing magnetic sensor patent info. 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