| Planarization with reduced dishing -> Monitor Keywords |
|
|
  Planarization with reduced dishingUSPTO Application #: 20070163993Title: Planarization with reduced dishing Abstract: A method of forming a planarized layer on a substrate, where the substrate is cleaned, and the layer is formed having a surface with high portions and low portions. A resistive mask is formed over the low portions of the layer, but not over the high portions of the layer. The surface of the layer is etched, where the high portions of the layer are exposed to the etch, but the low portions of the layer underlying the resistive mask are not exposed to the etch. The etch of the surface of the layer is continued until the high portions of the layer are at substantially the same level as the low portions of the layer, thereby providing an initial planarization of the surface of the layer. The resistive mask is removed from the surface of the layer, and all of the surface of the layer is planarized to provide a planarized layer. (end of abstract) USPTO Applicaton #: 20070163993 - Class: 216052000 (USPTO) Related Patent Categories: Etching A Substrate: Processes, Mechanically Shaping, Deforming, Or Abrading Of Substrate
Click on the above for other options relating to this Planarization with reduced dishing patent application. ###  How KEYWORD MONITOR works... a FREE service from FreshPatents1. Sign up (takes 30 seconds). 2. Fill in the keywords to be monitored. 3. Each week you receive an email with patent applications related to your keywords. Start now! - Receive info on patent apps like Planarization with reduced dishing or other areas of interest. ### Previous Patent Application: Method and device for contacting semiconductor chips Next Patent Application: Charge-free layer by layer etching of dielectrics Industry Class: Etching a substrate: processes ### FreshPatents.com Support Thank you for viewing the Planarization with reduced dishing patent info. IP-related news and info Results in 0.60846 seconds Other interesting Feshpatents.com categories: Novartis , Pfizer , Philips , Polaroid , Procter & Gamble , |
|||
