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  Pdms valve-less micro pump structure and method for producing the sameUSPTO Application #: 20060083639Title: Pdms valve-less micro pump structure and method for producing the same Abstract: A PDMS valve-less micro pump structure includes a PDMS body having a contour surface, a membrane covering the contour surface of the PDMS body, and a PZT actuator located on the membrane. The contour surface of the PDMS body to be sealed by the membrane and the PZT actuator has in series a lead-in cavity, a lead-in nozzle structure, a main cavity, a lead-out nozzle structure, and a lead-out cavity. The PZT actuator is located right above the main cavity. By providing the PDMS as a material to form the body of the micro pump, the micro pump can then be mass-produced with less cost and simpler structuring. Also, substantial elasticity and bio-compatibility for the micro pump can be achieved. (end of abstract) Agent: Bruce H. Troxell Suite 1404 - Falls Church, VA, US Inventors: Min-Sheng Liu, Chi-Chuan Wang, Bing-Chwen Yang, Yu-Ching Cheng, Wen-Jeng Chang USPTO Applicaton #: 20060083639 - Class: 417413200 (USPTO) Related Patent Categories: Pumps, Motor Driven, Electric Or Magnetic Motor, Collapsible Wall Pump, Diaphragm Type, Piezoelectric Driven The Patent Description & Claims data below is from USPTO Patent Application 20060083639. Brief Patent Description - Full Patent Description - Patent Application Claims
BACKGROUND OF THE INVENTION [0001] (1) Field of the Invention [0002] The invention relates to a valve-less micro pump structure and a method for producing the same, and more particularly to the structure that includes an elastomer main body made of polydimethylsiloxane (PDMS). [0003] (2) Description of the Prior Art [0004] In micro electric mechanical engineering, particularly that of biomedical field, micro fluid-detection and control components are crucial in utilization related to the precision automation industry. Among all the micro components, the micro pump as a fluid-control element is one of the key elements to make a micro fluid mechanism work. [0005] In the art, micro pumps with micro valve structures are usually made of a silicon-base material by a semiconductor manufacturing process. These micro pumps often have the following weakness. [0006] 1. The semiconductor manufacturing process for producing the micro pumps cannot meet a rapid production requirement. [0007] 2. Cost for the silicon-base material for producing the micro pumps is high. [0008] 3. For the silicon-base material for producing the micro pumps is brittle, inherent problems in fatigue and pitting can never be neglected. [0009] Also, it is well known that a brittle material is not suitable for application in the biomedical engineering. [0010] 4. The brittle silicon-base material for producing the micro pumps is vulnerable to impact and thus crack. [0011] 5. The silicon-base material for producing the micro pumps has poor bio-compatibility, and so limits the application of the micro electric mechanical components. [0012] Therefore, to overcome various disadvantages from adopting the silicon-base material to the micro pumps by a semiconductor manufacturing process, a substitute material and an improved method for forming the micro pumps are definitely welcome to the skilled persons in the art. SUMMARY OF THE INVENTION [0013] Accordingly, it is an object of the present invention to provide a PDMS valve-less micro pump structure and a method for producing the same, in which the PDMS material is widely used to have the production of the micro pumps to be simply structured, low cost, flexible, and more bio-compatible. [0014] The PDMS valve-less micro pump structure includes a PDMS body, a membrane, and a piezoelectric (PZT) actuator. [0015] The PDMS body, as an elastomer made of a PDMS material, has a contour surface. The contour surface further is curved to form a main cavity, a lead-in cavity and a lead-out cavity. The lead-in cavity can be located aside to the main cavity and in spatial communication with the main cavity through a lead-in nozzle. Also, the lead-out cavity can be located also aside to the main cavity and in spatial communication with the main cavity through a lead-out nozzle. [0016] The membrane having a center hole is layered on top of the PDMS body (i.e. on the contour surface) to seal the lead-in cavity, the lead-in nozzle, the lead-out nozzle and the lead-out cavity, but have the center hole positioned on top of the main cavity so as to expose the main cavity through the center hole. [0017] The PZT actuator is mounted on top of the membrane by a predetermined peripheral sealing way that can seal the main cavity by covering the center hole of the membrane. [0018] In one embodiment of the present invention, the membrane of the PDMS valve-less micro pump structure can be made of a PDMS material, and preferably have a thickness ranged between 200 .mu.m and 300 .mu.m. [0019] In one embodiment of the present invention, the PZT actuator can further include a PZT plate, a copper plate layered under the PZT plate, an insulation layer sandwiched between the PZT plate and the copper plate to avoid electrically shorting in between, and a bottom layer layered under the copper plate to prohibit direct contact between the copper plate and a fluid in the main cavity. Preferably, the insulation layer and the bottom layer are both layers made of the PDMS material. [0020] In one embodiment of the present invention, the predetermined peripheral sealing way to mount the PZT actuator onto the membrane can be a sealing way having supports at nodes of the PZT actuator, having supports at a periphery of the PZT actuator, or having bonding at the periphery of the PZT actuator. [0021] In the present invention, the PDMS valve-less micro pump structure, i.e. the PDMS body as described above, can be produced in accordance with a method having the following steps of: [0022] (1) Preparing a die, the die having a profiling protrusion forming on a top surface to configure concavely the main cavity, the lead-in cavity, the lead-in nozzle, the lead-out cavity, and the lead-out nozzle of the PDMS body; Continue reading... Full patent description for Pdms valve-less micro pump structure and method for producing the same Brief Patent Description - Full Patent Description - Patent Application Claims Click on the above for other options relating to this Pdms valve-less micro pump structure and method for producing the same patent application. ###  How KEYWORD MONITOR works... a FREE service from FreshPatents1. Sign up (takes 30 seconds). 2. Fill in the keywords to be monitored. 3. Each week you receive an email with patent applications related to your keywords. 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