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  Patterned substrate, electro-optical device, and method for manufacturing an electro-optical deviceUSPTO Application #: 20080100203Title: Patterned substrate, electro-optical device, and method for manufacturing an electro-optical device Abstract: A patterned substrate includes a base layer; a droplet holding space surrounded by a barrier that is formed over the base layer; and a pattern formed by discharging droplets containing a pattern formation material into the droplet holding space surrounded by the barrier. A recess that is lyophilic with respect to the droplets and that expands outward in a planar direction of the base layer is provided on a base layer side of the barrier. (end of abstract) Agent: GlobalIPCounselors, LLP - Washington, DC, US Inventor: Hirofumi Sakai USPTO Applicaton #: 20080100203 - Class: 313504 (USPTO) The Patent Description & Claims data below is from USPTO Patent Application 20080100203. Brief Patent Description - Full Patent Description - Patent Application Claims
BACKGROUND [0001]1. Technical Field [0002]The present invention relates to a patterned substrate, an electro-optical device, and a method for manufacturing an electro-optical device. 2. Related Art [0003]Known displays equipped with light emitting elements include organic electroluminescence displays (organic EL displays) used as an electro-optical device equipped with an organic electroluminescence element (organic EL element). [0004]Methods for manufacturing organic EL elements are generally classified by the kind of material that makes up the organic EL layer thereof. When the material that makes up the organic EL layer is a low-molecular weight organic material, a vapor phase process is utilized, in which the organic EL layer is formed by the vapor deposition of this low-molecular weight organic material. On the other hand, when the material that makes up the organic EL layer is a high-molecular weight organic material, a liquid phase process is utilized, in which the high-molecular weight organic material is dissolved in an organic solvent or the like, and a coating of this solution is applied and dried. [0005]With an inkjet method, which is a type of liquid phase process, tiny droplets (micro-droplets) of solution are discharged, so the location where the organic EL layer is formed, the film thickness, and the like can be controlled more precisely than with other liquid phase processes (such as spin coating). [0006]With an inkjet method, however, the shape of the pattern after drying is affected by the shape of the micro-droplets that land on the pattern formation surface. Consequently, if the micro-droplets that land are not flat in shape (if they have a convex hemispherical shape, for instance), this can lead to the problem of non-uniform pattern shape. [0007]In view of this, it has been proposed in the past that the uniformity of this pattern shape be increased with an inkjet method (see JP-A-2004-133031, for example). In Patent JP-A-2004-133031, the pattern formation surface is bounded by a first film (first barrier) that is lyophilic with respect to the droplets, and a second barrier that repels the droplets is formed over this first barrier. The second barrier forms a droplet holding space that holds the droplets, and droplets that go through this droplet holding space and land on the pattern formation surface wet and spread out over the surface due to the surface tension of the first barrier. This improves the uniformity of the shape of the pattern formed on the pattern formation surface. [0008]With JP-A-2004-133031, however, since the first barrier is formed in the same size as the droplet holding space, the range over which the surface tension of the first barrier works is limited to the size of the inner periphery of the droplet holding space (second barrier). Consequently, this can lead to a problem in that the discharged droplets do not wet and spread out over the outer periphery of the pattern formation surface. [0009]Therefore, if the contact range of this first barrier with respect to the droplets could be expanded, the droplets that landed on the pattern formation surface would be better able to wet and spread out over the surface, which in turn would improve the shape uniformity of the pattern formed by the droplets. SUMMARY [0010]An advantage of the invention is to provide a patterned substrate, an electro-optical device, and a method for manufacturing an electro-optical device, with which the shape uniformity of a pattern formed by droplets is increased. [0011]The patterned substrate of an aspect of the invention is furnished with a base layer; a droplet holding space surrounded by a barrier that is formed over the base layer; and a pattern formed by discharging droplets containing a pattern formation material into the droplet holding space surrounded by the, wherein a recess that expands outward in the planar direction of the base layer is provided on the base layer side of the barrier. [0012]With this patterned substrate, because a lyophilic recess is formed, the area that is lyophilic to the droplets is correspondingly larger, and because the droplets will be drawn into this recess, there will be a corresponding improvement in how well the droplets discharged into the droplet holding space wet and spread out over the surface outward in the planar direction of the base layer. Therefore, the pattern can be formed in a more uniform shape, which in turn improves the productivity of the patterned substrate. [0013]In this patterned substrate, the barrier preferably includes a first barrier formed over the base layer and a second barrier formed over the first barrier, the droplet holding space is formed by the second barrier, and the recess is formed by the first barrier, which is located farther outside in the planar direction than the second barrier. [0014]With this patterned substrate, because the first barrier is located farther outside in the planar direction of the base layer than the second barrier, there is a corresponding improvement in how well the droplets discharged into the droplet holding space wet and spread out over the surface outward in the planar direction of the base layer. [0015]In this patterned substrate, the first barrier is preferably formed such that it widens outward in the planar direction from a position across from the droplet holding space of the base layer toward the second barrier. [0016]With this patterned substrate, because the first barrier is formed so that it widens from a position across from the droplet holding space toward the second barrier, the area that is lyophilic to the droplets is correspondingly larger, and the droplets discharged into the droplet holding space wet and spread out more effectively. [0017]In this patterned substrate, the first barrier is formed such that it narrows outward in the planar direction from a position across from the droplet holding space of the base layer toward the second barrier. [0018]With this patterned substrate, because the first barrier is formed such that it narrows from a position across from the droplet holding space of the base layer toward the second barrier, the area that is lyophilic to the droplets is correspondingly larger, and the droplets discharged into the droplet holding space wet and spread out more effectively. [0019]In this patterned substrate, the first barrier is lyophilic with respect to the droplets, and the second barrier repels the droplets. [0020]With this patterned substrate, because the second barrier repels the droplets, the droplets discharged into the droplet holding space can be guided more effectively to the first barrier side. Therefore, the uniformity of the pattern shape can be further improved. [0021]In this patterned substrate, the pattern formation material is preferably a light emitting element formation material, and the pattern is a light emitting element. [0022]With this patterned substrate, a light emitting element can be formed in a more uniform shape, and the productivity of a patterned substrate equipped with this light emitting element can be increased. Continue reading... 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