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Patricia M. Savu patentsRecent bibliographic sampling of Patricia M. Savu patents listed/published in the public domain by the USPTO (USPTO Patent Application #,Title):
06/05/14 - 20140154632 - Perfluoroalkyl sulfonamides surfactants for photoresist rinse solutions
A method of modifying a surface of a photoresist material including exposing the photoresist material to an aqueous ionic surfactant solution and varying the pH of the aqueous ionic surfactant solution until a fluorochemical layer is formed in or on the photoresist material. The aqueous ionic surfactant solution includes a...
Inventors: Jason M. Kehren, Patricia M. Savu, Matthew J. Pinnow (3m Innovative Properties Company)
04/19/12 - 20120094487 - Compositions and methods for modifying a surface suited for semiconductor fabrication
The method of the present invention comprises providing a wafer including a first, second and third material; contacting the third material in the presence of a working liquid with abrasive composites fixed to an abrasive article; and moving the wafer until an exposed surface of the wafer is substantially planar...
Inventors: Heather K. Kranz, Thomas E. Wood, David A. Kaisaki, John J. Gagliardi, John C. Clark, Patricia M. Savu, Phillip G. Clark (3m Innovative Properties Company)
12/23/10 - 20100320416 - Fluorinated sulfonamide surfactants for aqueous cleaning solutions
Described are anionic N-substituted fluorinated sulfonamide surfactants, and use thereof in cleaning and in acid etch solutions. The cleaning and etch solutions are used with a wide variety of substrates, for example, in the cleaning and etching of silicon oxide-containing substrates....
Inventors: Patricia M. Savu, William M. Lamanna, Michael J. Parent (3m Innovative Properties Company)
09/30/10 - 20100243471 - Composition, method and process for polishing a wafer
A composition for use in polishing a wafer is disclosed. The composition includes an aqueous solution of initial components substantially free of loose abrasive particles and having a pH in the range of about 2 to 7, the aqueous solution including at least one polyelectrolyte and a surfactant. In certain...
Inventors: Naichao Li, John J. Gagliardi, Philip G. Clark, Patricia M. Savu (3m Innovative Properties Company)
06/24/10 - 20100160458 - Method of making a composition and aqueous composition preparable thereby
Rf represents a perfluoroalkyl group having from 1 to 12 carbon atoms. R1, R2, R3, and R4 each independently represent H or an alkyl group having from 1 to 6 carbon atoms. R5 represents H, an alkyl group having from 1 to 6 carbon atoms, or a hydroxyalkyl group having...
Inventors: Patricia M. Savu, Philip G. Clark, Michael J. Parent, Jason M. Kehren (3m Innovative Properties Company)
02/25/10 - 20100044050 - Fluorinated surfactants and methods of using the same
A composition comprising a nonionic fluorinated polymeric surfactant having a weight average molecular weight of least 100,000 grams per mole, the nonionic fluorinated polymeric surfactant comprising: divalent units independently represented by formula (I): in a range from 30% to 65% by weight, based on the total weight of the nonionic...
Inventors: Patricia M. Savu, Michael J. Sierakowski
02/04/10 - 20100025038 - Methods of using stable hydrocarbon foams
A method of treating a subterranean geological formation comprising hydrocarbons comprising injecting a foam into the formation at a rate and pressure sufficient to open at least one fracture therein and a method of completing a well in a subterranean geological formation penetrated by a well bore comprising introducing a...
Inventors: Patricia M. Savu, Michael J. Sierakowski, Arnold Wong
06/25/09 - 20090162700 - Coatings and methods for particle reduction
The present disclosure relates to high purity apparati, e.g., magnetic hard disk drives, and more specifically, to coatings for particle reduction of surfaces of such apparati. The provided coatings include thin polymer coatings with reactive pendant groups having crosslinking functionality and ability to anchor to substrate surfaces to suppress particle...
Inventors: Jason M. Kehren, Patricia M. Savu (3m Innovative Properties Company)
(*May have duplicates - we are upgrading our archive.)
20120094487 - Compositions and methods for modifying a surface suited for semiconductor fabrication
The bibliographic references displayed about Patricia M. Savu's patents are for a recent sample of Patricia M. Savu's publicly published patent applications. The inventor/author may have additional bibliographic citations listed at the USPTO.gov. FreshPatents.com is not associated or affiliated in any way with the author/inventor or the United States Patent/Trademark Office but is providing this non-comprehensive sample listing for educational and research purposes using public bibliographic data published and disseminated from the United States Patent/Trademark Office public datafeed. This information is also available for free on the USPTO.gov website. If Patricia M. Savu filed recent patent applications under another name, spelling or location then those applications could be listed on an alternate page. If no bibliographic references are listed here, it is possible there are no recent filings or there is a technical issue with the listing--in that case, we recommend doing a search on the USPTO.gov website.
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