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  Oxime derivatives and the use thereof as latent acidsUSPTO Application #: 20060068325Title: Oxime derivatives and the use thereof as latent acids Abstract: example halogen; R15, R16, R17 and R18 e.g. hydrogen or phenyl; R19, R20, R21, R22 and R23 are e.g. phenyl; are especially suitable for the preparation of photoresists. R1 is for example C1-C18alkylsulfonyl, R2 is halogen or C1-C10haloalkyl; R3 is for example unsubstitude or substituted phenylenedisulfonyl, diphenylenedisulfonyl, or oxydiphenylenedisulfonyl; Ar1 is for example a direct bond, C1-C12alkylene; —O—C-bond or a —O—Si—bond which cleaves upon the action of an acid; A1, A2, A3, A4, A5, A6, A7, A8, A9, A10, A11 and A12 are for example a direct bond, —O—, or —S—, or are C1-C12alkylene or phenylene unsubstituted or substituted; Y0 is C1-C12alkylene which is for example substituted by OR4, or SR7; Y2 is e.g. a trivalent radical of C1-C12alkylene; Y3 is e.g. a tetravalent radical of C1-C12alkylene; X is halogen; Ar′1 is for example C1-C12alkyl which is unsubstituted or substituted; Ar″1 is for example phenylene; provided that at least one of the radicals Ar′1, Ar″11 is substituted by 1 to 3 groups of New oxime sulfonate compounds of the formula I, II, III, IV, V, VI and VII (end of abstract) Agent: Ciba Specialty Chemicals Corporation Patent Department - Tarrytown, NY, US Inventors: Hitoshi Yamato, Toshikage Asakura, Akira Matsumoto, Masaki Ohwa USPTO Applicaton #: 20060068325 - Class: 430270100 (USPTO) Related Patent Categories: Radiation Imagery Chemistry: Process, Composition, Or Product Thereof, Imaging Affecting Physical Property Of Radiation Sensitive Material, Or Producing Nonplanar Or Printing Surface - Process, Composition, Or Product, Radiation Sensitive Composition Or Product Or Process Of Making The Patent Description & Claims data below is from USPTO Patent Application 20060068325. Brief Patent Description - Full Patent Description - Patent Application Claims
[0001] The invention relates to new oxime derivatives, chemically amplified photoresist compositions comprising said compounds and to the use of the compounds as latent acids, which can be activated by irradiation with actinic electromagnetic radiation and electron beams. [0002] In U.S. Pat. No. 4,540,598 surface-coating compositions comprising photosensitive oxime sulfonate compounds, e.g. 4-chloro-.alpha.-trifluoroacetophenonoxime benzenesulfonate and customary acid-curable resins are disclosed. In U.S. Pat. No. 4,736,055 2,2,2-trifluoro-1-phenyl-ethanone oxime-O-(4-hydroxyphenylsulfonate) is described as a component for the preparation of polymers which can be used as resins in positive photoresists. In U.S. Pat. No. 5,627,011 and U.S. Pat. No. 5,759,740 the use of .alpha.-(4-toluene-sulfonyloxyimino)-4-methoxybenzyl cyanide and .alpha.-(4-toluene-sulfonyloxyimino)-3-thienylmethyl cyanide as latent acid catalysts in chemically amplified positive and negative photoresists for wavelengths of 340-390 nm, especially those in the radiation region of the mercury i line (365 nm) is described. In GB 2306958 the use of oxime-sulfonates as latent acid donors in positive and negative photoresists for wavelengths between 180 and 600 nm, especially those in the radiation region beyond 390 nm is reported. In U.S. Pat. No. 5,714,625 non aromatic .alpha.-(alkylsulfonyloxyimino)-1-cyclohexenylacetonitriles and .alpha.-(alkylsulfonyloxyimino)-1-cyclopentenylacetonitriles are disclosed. In EP 241423 oxime sulfonate compounds are employed in about 25% concentration as photolatent acid generators in non-chemically amplified positive resists. In Chemical Abstracts No. 97:144503, 78:97752, Synthesis (1995), 553, some fluoroketoxime sulfonate compounds are described as experimental products for synthetic studies. [0003] In the art exists a need for reactive non-ionic latent acid donors that are thermally and chemically stable and that, after being activated by light, UV-radiation, X-ray irradiation or electron beams can be used as catalysts for a variety of acid-catalysed reactions, such as polycondensation reactions, acid-catalysed depolymerisation reactions, acid-catalysed electrophilic substitution reactions or the acid-catalysed removal of protecting groups. A particular need exists for latent acid catalysts with high stability and good solubility in the field of chemically amplified photoresists. [0004] Surprisingly, it has now been found that specific oxime derivatives, as described below, are especially suitable as catalysts for the aforementioned acid catalyzed reactions. The optical absorption spectra of the specific compounds of the invention are tunable over a wide range of the electromagnetic spectrum and particularly suitable for applications in the deep UV range. Furthermore, chemically amplified photoresist compositions comprising oxime derivatives of the present invention are thermally stable, even at high bake temperatures during processing and provide high photospeed. [0005] The invention accordingly relates to a chemically amplified photoresist composition comprising [0006] (a) a compound which cures upon the action of an acid or a compound whose solubility is increased upon the action of an acid; and [0007] (b) as photosensitive acid donor, at least one compound of the formula I, II, III, IV, V, VI or VII wherein [0008] R.sub.1 is C.sub.1-C.sub.18alkylsulfonyl, C.sub.1-C.sub.10haloalkylsulfonyl, camphorylsulfonyl, phenyl-C.sub.1-C.sub.3alkylsulfonyl, C.sub.3-C.sub.12cycloalkylsulfonyl, phenylsulfonyl, naphthylsulfonyl, anthracylsulfonyl or phenanthrylsulfonyl, wherein the groups cycloalkyl, phenyl, naphthyl, anthracyl and phenanthryl of the radicals C.sub.3-C.sub.12cycloalkylsulfonyl, phenyl-C.sub.1-C.sub.3alkylsulfonyl, phenylsulfonyl, naphthylsulfonyl, anthracylsulfonyl and phenanthrylsulfonyl are unsubstituted or substituted by one or more halogen, C.sub.1-C.sub.4haloalkyl, CN, NO.sub.2, C.sub.1-C.sub.16alkyl, phenyl, C.sub.1-C.sub.4alkylthio, OR.sub.4, (CO)OR.sub.7, C.sub.1-C.sub.4alkyl-(CO)O--, R.sub.7OSO.sub.2-- and/or --NR.sub.5R.sub.6; or R.sub.1 is C.sub.2-C.sub.6haloalkanoyl, halobenzoyl, or a group [0009] X.sub.1, X.sub.2 and X.sub.3 independently of each other are O or S; [0010] R.sub.2 is halogen or C.sub.1-C.sub.10haloalkyl; [0011] R.sub.3 is phenylenedisulfonyl, naphthylenedisulfonyl, , diphenylenedisulfonyl, or oxydiphenylenedisulfonyl, wherein these radicals are unsubstituted or substituted by C.sub.1-C.sub.12alkyl; or R.sub.3 is C.sub.2-C.sub.12alkylenedisulfonyl; [0012] Ar.sub.1 is a direct bond, unsubstituted C.sub.1-C.sub.12alkylene, C.sub.1-C.sub.12alkylene which is substituted by C.sub.3-C.sub.30cycloalkyl; or Ar.sub.1 is C.sub.3-C.sub.30cycloalkylene, C.sub.1-C.sub.8haloalkylene, C.sub.2-C.sub.12alkenylene, C.sub.4-C.sub.8-cycloalkenylene, C.sub.6-C.sub.12bicycloalkenylene; or Ar.sub.1 is phenylene, which is unsubstituted or substituted by one or more C.sub.1-C.sub.12alkyl, C.sub.1-C.sub.4haloalkyl, phenyl-C.sub.1-C.sub.3-alkyl, halogen, phenyl, OR.sub.4, NR.sub.5R.sub.6, SR.sub.7, SOR.sub.7, and/or SO.sub.2R.sub.7, optionally the substituents OR.sub.4, SR.sub.7 and NR.sub.5R.sub.6 form 5- or 6-membered rings, via the radicals R.sub.4, R.sub.5, R.sub.6 and/or R.sub.7, with further substituents on the phenylene ring or with one of the carbon atoms of the phenylene ring; or Ar.sub.1 is naphthylene, anthracylene or phenanthrylene ring, wherein the radicals naphthylene, anthracylene and phenanthrylene are unsubstituted or substituted by C.sub.1-C.sub.6alkyl, phenyl, OR.sub.4, NR.sub.5R.sub.6, SR.sub.7, SOR.sub.7, and/or SO.sub.2R.sub.7, optionally the substituents OR.sub.4, SR.sub.7 and NR.sub.5R.sub.6 form 5- or 6-membered rings, via the radicals R.sub.4, R.sub.5, R.sub.6 and/or R.sub.7 with further substituents on the naphthylene, anthracylene or phenanthrylene ring or with one of the carbon atoms of the naphthylene, anthracylene or phenanthrylene ring; or Ar.sub.1 is a heteroarylene ring which is unsubstituted or substituted by C.sub.1-C.sub.6alkyl, phenyl, OR.sub.4, NR.sub.5R.sub.6, SR.sub.7, SOR.sub.7, and/or SO.sub.2R.sub.7, optionally the substituents OR.sub.4, SR.sub.7 and NR.sub.5R.sub.6 form 5- or 6-membered rings, via the radicals R.sub.4, R.sub.5, R.sub.6 and/or R.sub.7 with further substituents on the heteroarylene ring or with one of the carbon atoms of the heteroarylene ring; wherein all radicals Ar.sub.1 optionally additionally are substituted by a group having a --O--C--bond or a --O--Si--bond which cleaves upon the action of an acid; [0013] A.sub.1, A.sub.2, A.sub.3, A.sub.4, A.sub.5, A.sub.6, A.sub.7, A.sub.8, A.sub.9, A.sub.10, A.sub.11 and A.sub.12 independently of each other are a direct bond, --O--, --S--, --NR.sub.4--, --CO--, --O(CO)--, --S(CO)--, --NR.sub.4(CO)--, --SO--, --SO.sub.2--, or --OSO.sub.2--; or A.sub.1, A.sub.2, A.sub.3, A.sub.4, A.sub.5, A.sub.6, A.sub.7, A.sub.8, A.sub.9, A.sub.10, A.sub.11 and A.sub.12 are C.sub.1-C.sub.12alkylene or phenylene wherein these radicals are unsubstituted or substituted by one or more C.sub.1-C.sub.12alkyl, C.sub.1-C.sub.4haloalkyl, halogen, OR.sub.4 and/or SR.sub.7; [0014] Y.sub.1 is C.sub.1-C.sub.12alkylene which is substituted by OR.sub.4, SR.sub.7, halogen and/or phenyl; or Y.sub.1 is C.sub.2-C.sub.12alkylene, which is interrupted by one or more --O--, --S--, --NR.sub.4--, --O(CO)--, --S(CO)--, --NR.sub.4(CO)--, --SO--, --SO.sub.2-- and/or --OSO.sub.2--, and the radical C.sub.2-C.sub.12alkylene being substituted by OR.sub.4, SR.sub.7, halogen and/or phenyl; [0015] Y.sub.2 is a trivalent radical of C.sub.1-C.sub.12alkylene, phenylene, naphthylene, or a heterocyclic ring wherein these radicals are unsubstituted or substituted by C.sub.1-C.sub.12alkyl, halogen, OR.sub.4 and/or SR.sub.7; or [0016] Y.sub.3 is a tetravalent radical of C.sub.1-C.sub.12alkylene, phenylene, naphthylene, or a heterocyclic ring wherein these radicals are unsubstituted or substituted by C.sub.1-C.sub.18alkyl, halogen, OR.sub.4 and/or SR.sub.7; [0017] X is halogen; [0018] R.sub.4 is hydrogen, C.sub.1-C.sub.18alkyl which is unsubstituted or substituted by phenyl, OH, C.sub.1-C.sub.12-alkoxy, C.sub.2-C.sub.12alkoxycarbonyl, phenoxy, phenoxycarbonyl, phenylthio, phenylthiocarbonyl, NR.sub.5R.sub.6, C.sub.1-C.sub.12alkylsulfonyl, phenylsulfonyl, (4-methylphenyl)sulfonyl and/or by C.sub.2-C.sub.6alkanoyl; or R.sub.4 is C.sub.2-C.sub.18alkyl which is interrupted by one or more --O--, and which is unsubstituted or substituted by phenyl, OH, C.sub.1-C.sub.12alkoxy, C.sub.2-C.sub.12alkoxycarbonyl, phenoxy, phenoxycarbonyl, phenylthio, phenylthiocarbonyl, NR.sub.5R.sub.6, C.sub.1-C.sub.12alkylsulfonyl, phenylsulfonyl, (4-methylphenyl)sulfonyl and/or by C.sub.2-C.sub.6alkanoyl; or R.sub.4 is phenyl which is unsubstituted or substituted by OH, C.sub.1-C.sub.18alkyl, halogen and/or C.sub.1-C.sub.12alkoxy; or R.sub.4 is C.sub.2-C.sub.18alkanoyl which is unsubstituted or substituted by phenyl, OH, C.sub.1-C.sub.12alkoxy, C.sub.2-C.sub.12alkoxycarbonyl, phenoxy, phenoxycarbonyl, phenylthio, phenylthiocarbonyl, NR.sub.5R.sub.6, C.sub.1-C.sub.12alkylsulfonyl, phenylsulfonyl, (4-methylphenyl)sulfonyl, and/or by C.sub.2-C.sub.6alkanoyl; or R.sub.4 is C.sub.1-C.sub.18alkylsulfonyl which is unsubstituted or substituted by phenyl, OH, C.sub.1-C.sub.12alkoxy, C.sub.2-C.sub.12alkoxycarbonyl, phenoxy, phenoxycarbonyl, phenylthio, phenylthiocarbonyl, NR.sub.5R.sub.6, C.sub.1-C.sub.12alkylsulfonyl, phenylsulfonyl, (4-methylphenyl)sulfonyl, and/or by C.sub.2-C.sub.6alkanoyl; or R.sub.4 is phenylsulfonyl which is unsubstituted or substituted by one or more halogen, C.sub.1-C.sub.4haloalkyl, CN, NO.sub.2, C.sub.1-C.sub.16alkyl, phenyl, C.sub.1-C.sub.4alkylthio, C.sub.1-C.sub.12alkoxy and/or phenoxy; or R.sub.4 is benzoyl, C.sub.1-C.sub.10haloalkylsulfonyl, camphorylsulfonyl, phenyl-C.sub.1-C.sub.3alkylsulfonyl, C.sub.3-C.sub.12cycloalkylsulfonyl, naphthylsulfonyl, anthracylsulfonyl or phenanthrylsulfonyl; [0019] R.sub.5 and R.sub.8 independently of each other are hydrogen or C.sub.1-C.sub.18alkyl which is unsubstituted or substituted by OH, C.sub.1-C.sub.4alkoxy, C.sub.2-C.sub.12alkoxycarbonyl, phenoxy, phenoxycarbonyl, phenylthio, phenylthiocarbonyl, phenylamino, phenylaminocarbonyl, C.sub.1-C.sub.12alkylsulfonyl, phenylsulfonyl, (4methyl-phenyl)sulfonyl and/or C.sub.1-C.sub.6alkanoyl; or R.sub.5 and R.sub.6 are C.sub.2-C.sub.18alkyl which is interrupted by one or more --O--, and which is unsubstituted or substituted by OH, C.sub.1-C.sub.4alkoxy, C.sub.2-C.sub.12alkoxycarbonyl, phenoxy, phenoxycarbonyl, phenylthio, phenylthiocarbonyl, phenylamino, phenylaminocarbonyl, C.sub.1-C.sub.12alkylsuffonyl, phenylsulfonyl, (4-methylphenyl)sulfonyl and/or C.sub.1-C.sub.6alkanoyl; or R.sub.5 and R.sub.6 are phenyl which is unsubstituted or substituted by OH, C.sub.1-C.sub.18alkyl, halogen and/or C.sub.1-C.sub.12alkoxy; or R.sub.5 and R.sub.6 are C.sub.2-C.sub.18alkanoyl, which is unsubstituted or substituted by phenyl, OH, C.sub.1-C.sub.12-alkoxy, C.sub.2-C.sub.12alkoxycarbonyl, phenoxy, phenoxycarbonyl, phenylthio, phenylthiocarbonyl, phenylamino, phenylaminocarbonyl, C.sub.1-C.sub.12alkylsulfonyl, phenylsulfonyl, (4-methylphenyl)sulfonyl, and/or by C.sub.2-C.sub.6alkanoyl; or R.sub.5 and R.sub.6 are C.sub.1-C.sub.18alkylsulfonyl which is unsubstituted or substituted by phenyl, OH, C.sub.1-C.sub.12alkoxy, C.sub.2-C.sub.12alkoxycarbonyl, phenoxy, phenoxycarbonyl, phenylthio, phenylthiocarbonyl, phenylamino, phenylamino-carbonyl, C.sub.1-C.sub.12alkylsulfonyl, phenylsulfonyl, (4-methylphenyl)sulfonyl, and/or by C.sub.2-C.sub.6alkanoyl; or R.sub.5 and R.sub.6 are phenylsulfonyl which is unsubstituted or substituted by one or more halogen, C.sub.1-C.sub.4haloalkyl, CN, NO.sub.2, C.sub.1-C.sub.16alkyl, phenyl, C.sub.1-C.sub.4alkylthio, C.sub.1-C.sub.12alkoxy and/or phenoxy; or R.sub.5 and R.sub.6 are benzoyl, C.sub.1-C.sub.10haloalkylsulfonyl, camphorylsulfonyl, phenyl-C.sub.1-C.sub.3alkylsulfonyl, C.sub.3-C.sub.12cycloalkylsulfonyl, naphthylsulfonyl, anthracylsulfonyl or phenanthrylsulfonyl; or R.sub.5 and R.sub.6, together with the nitrogen atom to which they are attached, form a 5-, 6- or 7-membered ring which may be interrupted by --O-- or by --NR.sub.4--; [0020] R.sub.7 is hydrogen, phenyl, C.sub.1-C.sub.18alkyl which is unsubstituted or substituted by phenyl, OH, C.sub.1-C.sub.12alkoxy, C.sub.2-C.sub.12alkoxycarbonyl, phenoxy, phenoxycarbonyl, phenylthio, phenylthiocarbonyl, NR.sub.5R.sub.6, C.sub.1-C.sub.12alkylsulfonyl, phenylsulfonyl, (4-methylphenyl)sulfonyl, and/or by C.sub.2-C.sub.6alkanoyl; or R.sub.7 is C.sub.2-C.sub.18alkyl which is interrupted by one or more --O-- and which is unsubstituted or substituted by phenyl, OH, C.sub.1-C.sub.12alkoxy, C.sub.2-C.sub.12alkoxycarbonyl, phenoxy, phenoxycarbonyl, phenylthio, phenylthiocarbonyl, NR.sub.5R.sub.6, C.sub.1-C.sub.12alkylsulfonyl, phenylsulfonyl, (4-methylphenyl)sulfonyl, and/or by C.sub.2-C.sub.6alkanoyl; or R.sub.7 is C.sub.2-C.sub.18alkanoyl which is unsubstituted or substituted by phenyl, OH, C.sub.1-C.sub.12alkoxy, C.sub.2-C.sub.12alkoxycarbonyl, phenoxy, phenoxycarbonyl, phenylthio, phenylthiocarbonyl, NR.sub.5R.sub.6, C.sub.1-C.sub.12alkylsulfonyl, phenylsulfonyl, (4methylphenyl)sulfonyl, and/or by C.sub.2-C.sub.6alkanoyl; or R.sub.7 is C.sub.1-C.sub.18alkylsulfonyl which is unsubstituted or substituted by phenyl, OH, C.sub.1-C.sub.12alkoxy, C.sub.2-C.sub.12alkoxycarbonyl, phenoxy, phenoxycarbonyl, phenylthio, phenylthiocarbonyl, NR.sub.5R.sub.6, C.sub.1-C.sub.12alkylsulfonyl, phenylsulfonyl, (4-methylphenyl)sulfonyl, and/or by C.sub.2-C.sub.6alkanoyl; or R.sub.7 is phenylsulfonyl which is unsubstituted or substituted by one or more halogen, C.sub.1-C.sub.4haloalkyl, CN, NO.sub.2, C.sub.1-C.sub.16alkyl, phenyl, C.sub.1-C.sub.4alkylthio, C.sub.1-C.sub.12alkoxy and/or phenoxy; or R.sub.7 is benzoyl, C.sub.1-C.sub.10haloalkylsulfonyl, camphorylsulfonyl, phenyl-C.sub.1-C.sub.3alkylsulfonyl, C.sub.3-C.sub.12cycloalkylsulfonyl, naphthylsulfonyl, anthracylsulfonyl or phenanthrylsulfonyl; [0021] R.sub.8, R.sub.9 and R.sub.10 independently of one another are C.sub.1-C.sub.6alkyl which is unsubstituted or substituted by halogen; or R.sub.8, R.sub.9 and R.sub.10 are phenyl which is unsubstituted or substituted by C.sub.1-C.sub.4alkyl or halogen; or R.sub.9 and R.sub.10 together are 1,2-phenylene or C.sub.2-C.sub.6alkylene which is unsubstituted or substituted by C.sub.1-C.sub.4alkyl or halogen; [0022] Ar'.sub.1 is C.sub.1-C.sub.12alkyl which is unsubstituted or substituted by C.sub.3-C.sub.30cycloalkyl; or Ar'.sub.1 is C.sub.3-C.sub.30cycloalkyl, C.sub.1-C.sub.8haloalkyl, C.sub.2-C.sub.12alkenyl, C.sub.4-C.sub.8cycloalkenyl, C.sub.6-C.sub.12bicycloalkenyl, camphoryl; or Ar'.sub.1 is phenyl, which is unsubstituted or substituted by one or more C.sub.1-C.sub.12-alkyl, C.sub.1-C.sub.4haloalkyl, phenyl-C.sub.1-C.sub.3-alkyl, halogen, phenyl, OR'.sub.4, NR'.sub.5R'.sub.6, SR'.sub.7, SOR'.sub.7, and/or SO.sub.2R'.sub.7, optionally the substituents OR'.sub.4, SR'.sub.7 and NR'.sub.5R'.sub.6 form 5- or 6-membered rings, via the radicals R'.sub.4, R'.sub.5, R'.sub.6 and/or R'.sub.7, with further substituents on the phenyl ring or with one of the carbon atoms of the phenyl ring; or Ar'.sub.1 is naphthyl, anthracyl or phenanthryl, wherein the radicals naphthyl, anthracyl and phenanthryl are unsubstituted or substituted by C.sub.1-C.sub.6alkyl, phenyl, OR'.sub.4, NR'.sub.5R'.sub.6, SR'.sub.7, SOR'.sub.7, and/or SO.sub.2R'.sub.7, optionally the substituents OR'.sub.4, SR'.sub.7 and NR'.sub.5R'.sub.6 form 5- or 6-membered rings, via the radicals R'.sub.4, R'.sub.5, R'.sub.6 and/or R'.sub.7 with further substituents on the naphthyl, anthracyl or phenanthryl ring or with one of the carbon atoms of the naphthyl, anthracyl or phenanthryl ring; or Ar'.sub.1 is a heteroaryl radical which is unsubstituted or substituted by C.sub.1-C.sub.6alkyl, phenyl, OR'.sub.4 , NR'.sub.6R'.sub.6, SR'.sub.7, SOR'.sub.7, and/or SO.sub.2R'.sub.7, optionally the substituents OR'.sub.4, SR'.sub.7 and NR'.sub.5R'.sub.6 form 5- or 6-membered rings, via the radicals R'.sub.4, R'.sub.5, R'.sub.6 and/or R'.sub.7 with further substituents on the heteroaryl ring or with one of the carbon atoms of the heteroaryl ring; and wherein the radicals C.sub.1-C.sub.12alkyl, phenyl, naphthyl, anthracyl, phenanthryl or the heteroaryl radical optionally are substituted by 1 to 3 of the groups groups and/or and wherein all radicals Ar'.sub.1 optionally additionally are substituted by a group having a --O--C--bond or a --O--Si--bond which cleaves upon the action of an acid; [0023] Ar''.sub.1 is phenylene, naphthylene, diphenylene or oxydiphenylene, wherein these radicals are unsubstituted or substituted by C.sub.1-C.sub.12alkyl; or [0024] Ar''.sub.1 is C.sub.1-C.sub.12alkylene or wherein all radicals [0025] Ar''.sub.1 optionally are substituted by 1 to 3 of the groups groups and/or and wherein all radicals Ar''.sub.1 optionally additionally are substituted by a group having a --O--C--bond or a --O--Si--bond which cleaves upon the action of an acid; [0026] D is --O--, --S--, --NR.sub.4--, --CO--, --O(CO)--, --S(CO)--, --NR.sub.4(CO)--, --SO--, --SO.sub.2--, or --OSO.sub.2--; [0027] D.sub.1 is C.sub.1-C.sub.12alkyene or C.sub.2-C.sub.12alkylene, which is interrupted by one or more --O--, --S--, --NR'.sub.4--, --CO--, --O(CO)--, --S(CO)--, --NR'.sub.4(CO)--, --SO--, --SO.sub.2--, and/or --OSO.sub.2; and wherein the radicals C.sub.1-C.sub.12alkylene and C.sub.2-C.sub.12alkylene optionally are substituted by 1 to 3 of the groups groups and/or [0028] R'.sub.4 is hydrogen, C.sub.1-C.sub.18alkyl which is unsubstituted or substituted by phenyl, OH, C.sub.1-C.sub.12alkoxy, C.sub.2-C.sub.12alkoxycarbonyl, phenoxy, phenoxycarbonyl, phenylthio, phenylthiocarbonyl, NR'.sub.5R'.sub.6, C.sub.1-C.sub.12alkylsulfonyl, phenylsulfonyl, (4-methylphenyl)sulfonyl and/or by C .sub.2-C.sub.6alkanoyl; or R'.sub.4 is C.sub.2-C.sub.18alkyl which is interrupted by one or more --O--, and which is unsubstituted or substituted by phenyl, OH, C.sub.1-C.sub.12alkoxy, C.sub.2-C.sub.12alkoxycarbonyl, phenoxy, phenoxycarbonyl, phenylthio, phenylthiocarbonyl, NR'.sub.5R'.sub.6, C.sub.1-C.sub.12alkylsulfonyl, phenylsulfonyl, (4-methylphenyl)sulfonyl and/or by C.sub.2-C.sub.6alkanoyl; or R'.sub.4 is phenyl which is unsubstituted or substituted by OH, C.sub.1-C.sub.18alkyl, halogen and/or C.sub.1-C.sub.12alkoxy; or R'.sub.4 is C.sub.2-C.sub.18alkanoyl which is unsubstituted or substituted by phenyl, OH, C.sub.1-C.sub.12alkoxy, C.sub.2-C.sub.12alkoxycarbonyl, phenoxy, phenoxycarbonyl, phenylthio, phenylthiocarbonyl, NR'.sub.5R'.sub.6, C.sub.1-C.sub.12alkylsulfonyl, phenylsulfonyl, (4-methylphenyl)sulfonyl, and/or by C.sub.2-C.sub.6alkanoyl; or R'.sub.4 is C.sub.1-C.sub.18alkylsulfonyl which is unsubstituted or substituted by phenyl, OH, C.sub.1-C.sub.12-alkoxy, C.sub.2-C.sub.12alkoxycarbonyl, phenoxy, phenoxycarbonyl, phenylthio, phenylthiocarbonyl, NR'.sub.5R'.sub.6, C.sub.1-C.sub.12alkylsulfonyl, phenylsulfonyl, (4-methylphenyl)sulfonyl, and/or by C.sub.2-C.sub.6alkanoyl; or R'.sub.4 is phenylsulfonyl which is unsubstituted or substituted by one or more halogen, C.sub.1-C.sub.4haloalkyl, CN, NO.sub.2, C.sub.1-C.sub.16alkyl, phenyl, C.sub.1-C.sub.4alkylthio, C.sub.1-C.sub.12alkoxy and/or phenoxy; or R'.sub.4 is benzoyl, C.sub.1-C.sub.10haloalkylsulfonyl, camphorylsulfonyl, phenyl-C.sub.1-C.sub.3alkylsulfonyl, C.sub.3-C.sub.12cycloalkylsulfonyl, naphthylsulfonyl, anthracylsulfonyl or phenanthrylsulfonyl; and wherein the radicals C.sub.1-C.sub.18alkyl, C.sub.2-C.sub.18alkyl, phenyl, C.sub.2-C.sub.18alkanoyl, phenylsulfonyl, benzoyl, C.sub.1-C.sub.10haloalkylsulfonyl, camphorsulfonyl, phenyl-C.sub.1-C.sub.3alkylsulfonyl, C.sub.3-C.sub.12cycloalkylsulfonyl, naphthylsulfonyl, anthracylsulfonyl or phenanthrylsulfonyl optionally are substituted by 1 to 3 of the groups groups and/or [0029] R'.sub.5 and R'.sub.6 independently of each other are hydrogen or C.sub.1-C.sub.18alkyl which is unsubstituted or substituted by OH, C.sub.1-C.sub.4alkoxy, C.sub.2-C.sub.12alkoxycarbonyl, phenoxy, phenoxycarbonyl, phenylthio, phenylthiocarbonyl, phenylamino, phenylaminocarbonyl, C.sub.1-C.sub.12alkylsulfonyl, phenylsulfonyl, (4-methyl-phenyl)sulfonyl and/or C.sub.1-C.sub.6alkanoyl; or R'.sub.5 and R'.sub.6 are C.sub.2-C.sub.18alkyl which is interrupted by one or more --O--, and which is unsubstituted or substituted by OH, C.sub.1-C.sub.4alkoxy, C.sub.2-C.sub.12alkoxycarbonyl, phenoxy, phenoxycarbonyl, phenylthio, phenylthiocarbonyl, phenylamino, phenylaminocarbonyl, C.sub.1-C.sub.12alkylsulfonyl, phenylsulfonyl, (4methylphenyl)suffonyl and/or C.sub.1-C.sub.6alkanoyl; or R'.sub.5 and R'.sub.6 are phenyl which is unsubstituted or substituted by OH, C.sub.1-C.sub.18alkyl, halogen and/or C.sub.1-C.sub.12alkoxy; or R'.sub.5 and R'.sub.6 are C.sub.2-C.sub.18alkanoyl, which is unsubstituted or substituted by phenyl, OH, C.sub.1-C.sub.12alkoxy, C.sub.2-C.sub.12alkoxycarbonyl, phenoxy, phenoxycarbonyl, phenylthio, phenylthiocarbonyl, phenylamino, phenylaminocarbonyl, C.sub.1-C.sub.12alkylsulfonyl, phenylsulfonyl, (4-methylphenyl)sulfonyl, and/or by C.sub.2-C.sub.6alkanoyl; or R'.sub.5 and R'.sub.6 are C.sub.1-C.sub.18alkylsulfonyl which is unsubstituted or substituted by phenyl, OH, C.sub.1-C.sub.12alkoxy, C.sub.2-C.sub.12alkoxycarbonyl, phenoxy, phenoxycarbonyl, phenylthio, phenylthiocarbonyl, phenylamino, phenylamino-carbonyl, C.sub.1-C.sub.12alkylsulfonyl, phenylsulfonyl, (4-methylphenyl)sulfonyl, and/or by C.sub.2-C.sub.6alkanoyl; or R'.sub.5 and R'.sub.6 are phenylsulfonyl which is unsubstituted or substituted by one or more halogen, C.sub.1-C.sub.4haloalkyl, CN, NO.sub.2, C.sub.1-C.sub.16alkyl, phenyl, C.sub.1-C.sub.4alkylthio, C.sub.1-C.sub.12alkoxy and/or phenoxy; or R'.sub.5 and R'.sub.6 are benzoyl, C.sub.1-C.sub.10haloalkylsulfonyl, camphorylsulfonyl, phenyl-C.sub.1-C.sub.3alkylsulfonyl, C.sub.3-C.sub.12cycloalkylsulfonyl, naphthylsulfonyl, anthracylsulfonyl or phenanthrylsulfonyl; or R'.sub.5 and R'.sub.6, together with the nitrogen atom to which they are attached, form a 5-, 6- or 7-membered ring which may be interrupted by --O-- or by --NR'.sub.4--; and wherein the radicals C.sub.1-C.sub.18alkyl, C.sub.2-C.sub.18alkyl, phenyl, C.sub.2-C.sub.18alkanoyl, C.sub.1-C.sub.18alkylsulfonyl, phenylsulfonyl, benzoyl, C.sub.1-C.sub.10haloalkylsulfonyl, camphorsulfonyl, phenyl-C.sub.1-C.sub.3alkylsulfonyl, C.sub.3-C.sub.12cycloalkylsulfonyl, naphthylsulfonyl, anthracylsulfonyl or phenanthrylsulfonyl optionally are substituted by 1 groups and/or [0030] R'.sub.7 is hydrogen, phenyl, C.sub.1-C.sub.18alkyl which is unsubstituted or substituted by phenyl, OH, C.sub.1-C.sub.12alkoxy, C.sub.2-C.sub.12alkoxycarbonyl, phenoxy, phenoxycarbonyl, phenylthio, phenylthiocarbonyl, NR'.sub.5R'.sub.6, C.sub.1-C.sub.12alkylsulfonyl, phenylsulfonyl, (4-methylphenyl)sulfonyl, and/or by C.sub.2-C.sub.6alkanoyl; or R'.sub.7 is C.sub.2-C.sub.18alkyl which is interrupted by one or more --O-- and which unsubstituted or substituted by phenyl, OH, C.sub.1-C.sub.12alkoxy, C.sub.2-C.sub.12alkoxycarbonyl, phenoxy, phenoxycarbonyl, phenylthio, phenylthiocarbonyl, NR'.sub.5R'.sub.6, C.sub.1-C.sub.12alkylsulfonyl, phenylsulfonyl, (4-methylphenyl)sulfonyl, and/or by C.sub.2-C.sub.6alkanoyl; or R'.sub.7 is C.sub.2-C.sub.18alkanoyl which is unsubstituted or substituted by phenyl, OH, C.sub.1-C.sub.12alkoxy, C.sub.2-C.sub.12alkoxycarbonyl, phenoxy, phenoxycarbonyl, phenylthio, phenylthiocarbonyl, NR'.sub.5R'.sub.6, C.sub.1-C.sub.12alkylsulfonyl, phenylsulfonyl, (4-methylphenyl)sulfonyl, and/or by C.sub.2-C.sub.6alkanoyl; or R'.sub.7 is C.sub.1-C.sub.18alkylsulfonyl which is unsubstituted or substituted by phenyl, OH, C.sub.1-C.sub.12alkoxy, C.sub.2-C.sub.12alkoxycarbonyl, phenoxy, phenoxycarbonyl, phenylthio, phenylthiocarbonyl, NR'.sub.5R'.sub.6, C.sub.1-C.sub.12alkylsulfonyl, phenylsulfonyl, (4-methylphenyl)sulfonyl, and/or by C.sub.2-C.sub.6alkanoyl; or R'.sub.7 is phenylsulfonyl which is un-substituted or substituted by one or more halogen, C.sub.1-C.sub.4haloalkyl, CN, NO.sub.2, C.sub.1-C.sub.16alkyl, phenyl, C.sub.1-C.sub.4alkylthio, C.sub.1-C.sub.12alkoxy and/or phenoxy; or R'.sub.7 is benzoyl, C.sub.1-C.sub.10haloalkylsulfonyl, camphorylsulfonyl, phenyl-C.sub.1-C.sub.3alkylsulfonyl, C.sub.3-C.sub.12cycloalkylsulfonyl, naphthylsulfonyl, anthracylsulfonyl or phenanthrylsulfonyl; and wherein the radicals C.sub.1-C.sub.18alkyl, C.sub.2-C.sub.18alkyl, C.sub.2-C.sub.18alkanoyl, C.sub.1-C.sub.18alkylsulfonyl, phenylsulfonyl, benzoyl, C.sub.1-C.sub.10haloalkylsulfonyl, camphorsulfonyl, phenyl-C.sub.1-C.sub.3alkylsulfonyl, C.sub.3-C.sub.12cycloalkylsulfonyl, naphthylsulfonyl, anthracylsulfonyl or phenanthrylsulfonyl optionally are substituted by 1 to 3 of the groups groups provided that at least one of the radicals Ar'.sub.1, Ar''.sub.1, D.sub.1, R'.sub.4, R'.sub.5, R'.sub.6 or R'.sub.7 is substituted by 1 to 3 groups of groups [0031] R.sub.15, R.sub.16, R.sub.17 and R.sub.18 independently of each other are hydrogen or phenyl which is unsubstituted or substituted by one or more C.sub.1-C.sub.12alkyl, halogen, --NO.sub.2, --CN, phenyl, C.sub.1-C.sub.4-alkoxy, hydroxy, C.sub.2-C.sub.12alkoxycarbonyl, phenoxy, phenoxycarbonyl, C.sub.1-C.sub.4alkylthio, phenylthio, C.sub.2-C.sub.12alkanoyl, C.sub.2-C.sub.12alkanoyloxy, benzoyl and/or benzoyloxy; or R.sub.15, R.sub.16, R.sub.17 and R.sub.18 are C.sub.1-C.sub.12 alkyl, C.sub.2-C.sub.12alkyl which is interrupted by one or more --O--, and wherein the radicals C.sub.1-C.sub.12 alkyl and C.sub.2-C.sub.12alkyl are unsubstituted or substituted by one or more halogen, hydroxy, --NO.sub.2, --CN, phenyl, C.sub.2-C.sub.12alkoxycarbonyl, phenoxy, phenoxycarbonyl, C.sub.1-C.sub.4alkylthio, phenylthio, C.sub.2-C.sub.12alkanoyl, C.sub.2-C.sub.12alkanoyloxy, benzoyl and/or benzoyloxy; or R.sub.15 and R.sub.16, if appropriate together with C.sub.1-C.sub.2alkylene, --O--, --S--, or --CO--, form fused ring; or R.sub.15 and R.sub.16, if appropriate together with C.sub.1-C.sub.2alkylene, --O--, --S--, or --CO--, form a 5-, 6-, or 7-membered ring; [0032] R.sub.19 is phenyl, which is unsubstituted or substituted by one or more C.sub.1-C.sub.12alkyl, halogen, --NO.sub.2, --CN, phenyl, C.sub.1-C.sub.4alkoxy, C.sub.2-C.sub.12alkoxycarbonyl, phenoxy, phenoxycarbonyl, C.sub.1-C.sub.4alkylthio, phenylthio, C.sub.2-C.sub.12alkanoyl, C.sub.2-C.sub.12alkanoyloxy, benzoyl, benzoyloxy; or R.sub.19 is C.sub.1-C.sub.12alkyl, or C.sub.2-C.sub.12alkyl which is interrupted by one or more --O--, wherein the radicals C.sub.1-C.sub.12alkyl, and C.sub.2-C.sub.12alkyl are unsubstituted or substituted by one or more halogen, hydroxy, --NO.sub.2, --CN, phenyl, C.sub.2-C.sub.12alkoxycarbonyl, phenoxy, phenoxycarbonyl, C.sub.1-C.sub.4alkylthio, phenylthio, C.sub.2-C.sub.12alkanoyl, C.sub.2-C.sub.12alkanoyloxy, benzoyl and/or benzoyloxy; [0033] R.sub.20, R.sub.21 and R.sub.22 independently of each other are phenyl, which is unsubstituted or substituted by one or more C.sub.1-C.sub.12 alkyl, halogen, --NO.sub.2, --CN, phenyl, C.sub.1-C.sub.4alkoxy, hydroxy, C.sub.2-C.sub.12alkoxycarbonyl, phenoxy, phenoxycarbonyl, C.sub.1-C.sub.4alkylthio, phenylthio, C.sub.2-C.sub.12alkanoyl, C.sub.2-C.sub.12alkanoyloxy, benzoyl and/or benzoyloxy; or R.sub.20, R.sub.21 and R.sub.22 independently of each other are C.sub.1-C.sub.12 alkyl, C.sub.2-C.sub.12alkyl which is interrupted by one or more --O--, and wherein the radicals C.sub.1-C.sub.12 alkyl and C.sub.2-C.sub.12alkyl are unsubstituted or substituted by one or more halogen, hydroxy, --NO.sub.2, --CN, phenyl, C.sub.2-C.sub.12alkoxycarbonyl, phenoxy, phenoxycarbonyl, C.sub.1-C.sub.4alkylthio, phenylthio, C.sub.2-C.sub.12alkanoyl, C.sub.2-C.sub.12alkanoyloxy, benzoyl and/or benzoyloxy; or R.sub.20 and R.sub.21, if appropriate together with C.sub.1-C.sub.2alkylene, --O--, --S--, or --CO--, form a fused ring; or R.sub.20 and R.sub.21, if appropriate together with C.sub.1-C.sub.2alkylene, --O--, --S--, or --CO--, form a 5-, 6-, or 7-membered ring; and [0034] R.sub.23 and R.sub.24 independently of each other are phenyl, which is unsubstituted or substituted by one or more of C.sub.1-C.sub.12alkyl, halogen, --NO.sub.2, --CN, phenyl, C.sub.1-C.sub.4alkoxy, hydroxy, C.sub.2-C.sub.12-alkoxycarbonyl, phenoxy, phenoxycarbonyl, C.sub.1-C.sub.4alkylthio, phenylthio, C.sub.2-C.sub.12alkanoyl, C.sub.2-C.sub.12alkanoyloxy, benzoyl and/or benzoyloxy; or R.sub.23 and R.sub.24, if appropriate together with C.sub.1-C.sub.2alkylene, --O--, --S--, or --CO--, form fused ring. [0035] The compounds of the formulae I, II, III, IV, V, VI and VII are characterized in that they contain at least two halogen atoms on one of the carbon atoms next to the oxime group. Preferably the compounds contain three halogen atoms on one of the carbon atoms next to the oxime group. [0036] C.sub.1-C.sub.18alky is linear or branched and is, for example, C.sub.1-C.sub.8-, C.sub.1-C.sub.6- or C.sub.1-C.sub.4-alkyl. Examples are methyl, ethyl, propyl, isopropyl, n-butyl, sec-butyl, isobutyl, tert-butyl, pentyl, hexyl, heptyl, 2,4,4-trimethylpentyl, 2-ethylhexyl, octyl, nonyl, decyl, undecyl, dodecyl, tetradecyl, pentadecyl, hexadecyl, heptadecyl and octadecyl, preferably C.sub.1-C.sub.4alkyl, such as methyl, isopropyl or butyl. [0037] C.sub.1-C.sub.8alkyl, C.sub.1-C.sub.6alkyl and C.sub.1-C.sub.4alkyl are likewise linear or branched and are, for example, as defined above up to the appropriate number of carbon atoms. Of interest are, for example, C.sub.1-C.sub.8-, especially C.sub.1-C.sub.6-, preferably C.sub.1-C.sub.4-alkyl, such as methyl or butyl. R.sub.1 is for example C.sub.2-C.sub.12-, C.sub.4-C.sub.12-, C.sub.8-C.sub.12-, C.sub.4-C.sub.8-alkyl. [0038] C.sub.2-C.sub.12alkyl, which is interrupted once or several times by --O--, is interrupted, for example, from one to five times, for example from one to three times or once or twice, by non-successive --O--. Accordingly, resulting structural units are for example: --O(CH.sub.2).sub.2OH, --O(CH.sub.2).sub.2OCH.sub.3, --O(CH.sub.2CH.sub.2O).sub.2CH.sub.2CH.sub.3, --CH.sub.2--O--CH.sub.3, --CH.sub.2CH.sub.2--O--CH.sub.2CH.sub.3, --[CH.sub.2CH.sub.2O].sub.y--CH.sub.3, wherein y=1-5, --(CH.sub.2CH.sub.2O).sub.5CH.sub.2CH.sub.3, --CH.sub.2--CH(CH.sub.3)--O--CH.sub.2--CH.sub.2CH.sub.3 or --CH.sub.2--CH(CH.sub.3)--O--CH.sub.2--CH.sub.3. [0039] C.sub.3-C.sub.30cycloalkyl is a mono- or polycyclic aliphatic ring, for example a mono-, bi- or tricyclic aliphatic ring, e.g. C.sub.3-C.sub.20-, C.sub.3-C.sub.18-, C.sub.3-C.sub.12-, C.sub.3-C.sub.10cycloalkyl. Examples of monocyclic rings are cyclopropyl, cyclobutyl, cyclopentyl, cyclohexyl, or cycloheptyl, especially cyclopentyl and cyclohexyl. Examples of polycyclic rings are perhydroanthracyl, perhydrophenyathryl, perhydronaphthyl, perhydrofluorenyl, perhydrochrysenyl, perhydropicenyl, adamantyl, bicyclo-[1.1.1]pentyl, bicyclo[4.2.2]decyl, bicyclo[2.2.2]octyl, bicyclo[3.3.2]decyl, bicyclo[4.3.2]undec-yl, bicyclo[4.3.3]dodecyl, bicyclo[3.3.3]undecyl, bicyclo[4.3.1]decyl, bicyclo[4.2.1]nonyl, bicyclo[3.3.1]nonyl, bicyclo[3.2.1]octyl and the like. Also "spiro"-cycloalkyl compounds are covered by the definition C.sub.3-C.sub.30cycloalkyl in the present context, e.g. spiro[5.2]octyl, spiro[5.4]decyl, spiro[5.5]undecyl. More examples of polycyclic cycloalkyl groups, which are subject of the respective definition in the compounds of the present invention are listed in EP 878738, page 11 and 12, wherein to the formulae (1)-(46) a bond to achieve the "yl" has to be added. The person skilled in the art is aware of this fact. [0040] In, general, the cycloaliphatic rings may form repeating structural units. [0041] C.sub.2-C.sub.12alkenyl radicals may be mono- or polyunsaturated, linear or branched and are for example C.sub.2-C.sub.8-, C.sub.2-C.sub.6- or C.sub.2-C.sub.4alkenyl. Examples are allyl, methallyl, vinyl, 1,1-dimethylallyl, 1-butenyl, 3-butenyl, 2-butenyl, 1,3-pentadienyl, 5-hexenyl or 7-octenyl, especially allyl or vinyl. [0042] C.sub.4-C.sub.8cycloalkenyl, may have one or more double bonds and is for example C.sub.4-C.sub.6-cycloalkenyl or C.sub.5-C.sub.8-cycloalkenyl. Examples are cyclobutenyl, cyclopentenyl, cyclohexenyl or cyclooctenyl, especially cyclopentenyl and cyclohexenyl, preferably cyclohexenyl. [0043] C.sub.6-C.sub.12bicycloalkenyl refers to a bicyclic alkenyl group, which may possess one or more double bonds and wherein the double bonds are either situated in the same ring, but may also be situated in both rings. If several double bonds are present in the bicyclus, the double bonds are conjugated or non-conjugated, preferably the double bonds are conjugated. Examples are bicyclo[4.2.4]dodec-3,7-dien-5-yl, bicyclo[4.2.4]dodec-3-en-5-yl, bicyclo[4.2.4] dodec-4-en-6-yl, bicyclo[4.2.3]-non-3-en-5-yl, bicyclo[4.2.3]-non-4-en-6-yl, bicyclo[4.2.3]-non-7-en-8-yl, bicyclo[4.2.3]-non-8-en-7-yl, wherein the examples are referring to the following numbering [0044] C.sub.1-C.sub.12alkylene is linear or branched and is, for example, C.sub.1-C.sub.8-, C.sub.1-C.sub.6- or C.sub.1-C.sub.4-alkylene. Examples are methylene, ethylene, propylene, butylene, pentylene, hexylene, heptylene, octylene, nonylene, decylene, undecylene and dodecylene. Preferred is C.sub.1-C.sub.8alkylene, especially C.sub.1-C.sub.6alkylene, preferably C.sub.1-C.sub.4alkylene, such as methylene or butylene. C.sub.2-C.sub.12alkylenedisulfonyl accordingly is an alkylene radical as indicated above, which at both "yl"-moieties bears a sulfonyl group. Examples are --SO.sub.2--(CH.sub.2CH.sub.2).sub.z--SO.sub.2--, with z=1-6, e.g. --SO.sub.2--CH.sub.2CH.sub.2--SO.sub.2--, or --SO.sub.2--CH(CH.sub.3)CH.sub.2--SO.sub.2--. [0045] Phenylenedisulfonyl, diphenylenedisulfonyl and oxydiphenylendisulfonyl also bear the sulfonyl groups at the "yl" moiety. Accordingly, resulting structures are [0046] Substituted phenyl carries from one to five, for example one, two or three, especially one or two, substituents on the phenyl ring. The substitution is preferably in the 4-, 3,4-, 3,5- or 3,4,5-position of the phenyl ring. [0047] The radicals C.sub.1-C.sub.18alkyl in the group C.sub.1-C.sub.18alkylsulfonyl are meant to be linear or branched and have the meanings described above. [0048] The radicals C.sub.3-C.sub.30ocycloalkyl in the group C.sub.3-C.sub.30cyloalkylsulfonyl have the meanings described above. [0049] When the radicals naphthyl, phenanthryl, heteroaryl and anthracyl are substituted by one or more radicals, they are, for example, mono- to penta-substituted, for example mono-, di- or tri-substituted, especially mono- or di-substituted. [0050] When Ar'.sub.1 is a phenyl radical substituted by OR'.sub.4, NR'.sub.5R'.sub.6 and/or by SR'.sub.7 and the substituents OR'.sub.4, NR'.sub.5R'.sub.6 and SR'.sub.7 form 5- or 6-membered rings, via the radicals R'.sub.4, R'.sub.5, R'.sub.6 or R'.sub.7, with other substituents on the phenyl ring or with one of the carbon atoms of the phenyl ring, for example the following structural units are obtained In the present application, the term "heteroaryl" denotes unsubstituted and substituted radicals, for example 3-thienyl, 2-thienyl, wherein R'.sub.5 and R'.sub.6 are as defined above, thianthrenyl, isobenzofuranyl, xanthenyl, phenoxanthiinyl, wherein Y is S, O or NR'.sub.4 and R'.sub.4 is as defined above. Examples thereof are pyrazolyl, thiazolyl, oxazolyl, isothiazolyl or isoxazolyl. Also included are, for example, furyl, pyrrolyl, 1,2,4-triazolyl, or 5-membered ring heterocycles having a fused-on aromatic group, for example benzimidazolyl, benzothienyl, benzofuranyl, benzoxazolyl and benzothiazolyl. [0051] Other examples of "heteroaryls" are pyridyl, especially 3-pyridyl, wherein R'.sub.4 is as defined above, pyrimidinyl, pyrazinyl, 1,3,5-triazinyl, 2,4-, 2,2- or 2,3-diazinyl, indolizinyl, isoindolyl, indolyl, indazolyl, purinyl, isoquinolyl, quinolyl, phenoxazinyl or phenazinyl. In this application, the term "heteroaryl" also denotes the radicals thioxanthyl, xanthyl, wherein m is 0 or 1 and R'.sub.4, R'5, R'.sub.6 are as defined above, or anthraquinonyl. Each of the heteroaryls may carry the substituents indicated above or in claim 1. [0052] Camphoryl, 10-camphoryl, are camphor-10-yl, namely C.sub.2-C.sub.6alkanoyl is, for example, acetyl, propionyl, butanoyl or hexanoyl, especially acetyl. Continue reading... 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