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Mitsuru Hiura patents

Recent patents with Mitsuru Hiura listed as an inventor - additional entries may be under other spellings.


Mitsuru Hiura - Related organizations: Canon Kabushiki Kaisha patents

Imprint apparatus, imprint method, and method of manufacturing article

07/09/15 - 20150190961 - The present invention provides an imprint apparatus which performs an imprint process of molding an imprint material on a substrate with a mold and forming a pattern on the substrate, the apparatus including a detector configured to detect a shearing force generated in at least one of the mold and
Inventors: Kazuki Nakagawa, Yosuke Murakami, Mitsuru Hiura

Imprint apparatus and article manufacturing method using same

01/01/15 - 20150001751 - An imprint apparatus forms a pattern of a resin on a region to be processed of a substrate using a mold including a pattern region on which a pattern is formed and includes a correction unit configured to correct a shape of a target region that is either the pattern
Inventors: Yozo Matsuda, Noriyasu Hasegawa, Mitsuru Hiura, Tatsuya Hayashi

Imprinting method, imprinting apparatus, and device manufacturing method

11/27/14 - 20140346700 - An imprinting method of this disclosure includes supplying an imprint material on a substrate having a pattern including a mark on the substrate formed thereon; bringing a mold having a pattern including a mark on the mold into contact with the imprint material; curing the imprint material in a state
Inventors: Hiroshi Sato, Mitsuru Hiura

Imprint apparatus and method of manufacturing article

08/01/13 - 20130193602 - An imprint apparatus cures an imprint material, while a pattern formed on a mold is kept in contact with the imprint material, thereby transferring the pattern onto the imprint material. The apparatus includes a measurement unit which performs, in parallel, alignment measurement in which a relative position between the mold
Inventors: Akiyoshi Suzuki, Ken-ichiro Shinoda, Mitsuru Hiura

Imprint apparatus and article manufacturing method

07/18/13 - 20130181365 - An apparatus for bringing a mold having a pattern region and a first mark into contact with an imprint material on a substrate having a second mark, includes a deforming mechanism configured to deform the mold such that a portion of the mold where the first mark is formed protrudes
Inventors: Ken-ichiro Shinoda, Akiyoshi Suzuki, Mitsuru Hiura


### Mitsuru Hiura patent invention listings

The bibliographic references displayed about Mitsuru Hiura's patents are for a recent sample of Mitsuru Hiura's publicly published patent applications. The inventor/author may have additional bibliographic citations listed at the USPTO.gov. FreshPatents.com is not associated or affiliated in any way with the author/inventor or the United States Patent/Trademark Office but is providing this non-comprehensive sample listing for educational and research purposes using public bibliographic data published and disseminated from the United States Patent/Trademark Office public datafeed. This information is also available for free on the USPTO.gov website. If Mitsuru Hiura filed recent patent applications under another name, spelling or location then those applications could be listed on an alternate page. If no bibliographic references are listed here, it is possible there are no recent filings or there is a technical issue with the listing--in that case, we recommend doing a search on the USPTO.gov website.

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