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  Method for making devices using ink jet printingUSPTO Application #: 20070018532Title: Method for making devices using ink jet printing Abstract: Methods for using ink-jet printing to deposit various layers of micro-structure devices are provided. A wide variety of micro-structures may be formed using these techniques including, for example, many forms of MEMs structures as well as other structures. (end of abstract) Agent: Honeywell International Inc. - Morristown, NJ, US Inventors: Robert Horning, Thomas Ohnstein, Daniel Youngner USPTO Applicaton #: 20070018532 - Class: 310309000 (USPTO) The Patent Description & Claims data below is from USPTO Patent Application 20070018532. Brief Patent Description - Full Patent Description - Patent Application Claims
RELATED APPLICATIONS [0001] The present application is a divisional application of U.S. patent application Ser. No. 10/713,329, filed Nov. 13, 2003, which is incorporated herein in its entirety by reference. FIELD [0002] The present invention relates to the fabrication of micro-structures, and more particularly, to methods for making micro-structures using ink-jet printing. BACKGROUND [0003] Much of the time and effort expended in fabricating micro-devices often involves the deposition and patterning of various materials and layers that eventually form a three-dimensional structure. In many cases, the various layers and materials are deposited and patterned using conventional integrated circuit processing equipment, which can be expensive to purchase and maintain. In many cases, each layer may require the use of different equipment, which can significantly add to the expense in terms of increased production time, increased risk of contamination and/or mistakes, and reduced yields. SUMMARY [0004] The present invention is directed at using ink-jet printing to deposit various layers of a micro-structure, which can significantly reduce the cost and time for fabricating such structures. It is contemplated that a wide variety of micro-structures may be formed using the methods disclosed herein including, for example, many forms of Micro-Electro-Mechanical Systems (MEMS) structures as well as other structures. [0005] In one illustrative embodiment, a micro-structure having an opening or cavity therein is provided. In this illustrative embodiment, a first layer is provided by ink-jet printing, followed by ink-jet printing a sacrificial layer. A second layer is then provided above the sacrificial layer, also by ink-jet printing. The sacrificial layer may then be removed to create an open space or cavity within the micro-structure. [0006] In some embodiment, the first layer, the sacrificial layer and/or the second layer may be patterned, as desired. For example, the sacrificial layer may be deposited in a pattern that includes a number of sacrificial layer regions, where adjacent sacrificial layer regions are separated by gaps. The first layer may be secured to the second layer in the gaps. One illustrative MEMs type device that may be formed in this manner is an electrostatic actuator. To form the illustrative electrostatic actuator, an electrode layer followed by a dielectric layer may be ink-jet printed on or above the first layer, prior to providing the sacrificial layer. Likewise, a dielectric layer and another electrode layer may be ink-jet printed above the sacrificial layer, before the second layer is provided. After the sacrificial layer is removed, the resulting open space between the dielectric layers may allow the first layer/first electrode layer/second dielectric layer to flex away from the second layer/second electrode/second dielectric layer when subject to an expanding force. When a sufficient voltage is applied between the first and second electrode layers, an electrostatic force may be generated between the electrode layers that pulls the first electrode towards the second electrode, thus providing mechanical actuation. The dielectric layers may help prevent the first and second electrode layers from shorting when brought together. [0007] It is contemplated that a number of sensors may be provided to detect when the electrodes are brought together and when they are spaced apart. These sensors may be provided in any number of ways, including for example, by ink-jet printing. Other devices, such as transistors, resistors, capacitors, inductors and related circuits may also be printed, as desired, and may be used in conjunction with the micro-structures discussed herein. [0008] In some embodiments, more than one ink-jet print head may be used to deposit the various materials and/or layers of a desired micro-structure. In one example, one size or type of ink-jet print head may be used to deposit one material, while another size or type of ink-jet print head may be used to deposit another material. Likewise, since thicker layers may require more material to be deposited at a given location than thinner layers, a larger nozzle ink-jet print head may be used to deposit the thicker layers and a smaller nozzle ink-jet print head may be used to deposit the thinner layers. Also, a smaller nozzle ink-jet print head may be used to deposit layers that include smaller feature sizes, to achieve better resolution. For dielectric layers, an ink jet print head that minimizes pin holes may be desirable. Also, a printing pattern that has significant dot-to-dot overlap may be desirable, particularly when the dielectric layer must function as an electric insulator. [0009] In some embodiments, each ink-jet head is included in a separate ink-jet cartridge. In other embodiments, more than one ink-jet head may be included in a single ink-jet cartridge, as desired. If more than one ink-jet head is provided in an ink-jet cartridge, multiple reservoirs may be provided. Each reservoir may contain a different printable material, as appropriate. [0010] In some embodiments, multiple ink-jet heads are used sequentially to deposit the various materials and/or layers of a micro-structure, while in other embodiments, multiple ink-jet heads are used simultaneously. When multiple ink-jet head are used simultaneously, the material deposited by one ink-jet head preferably does not overlap the material just deposited by another ink-jet head, as some time may be required for the "ink" to dry. However, this is not required in all embodiments. BRIEF DESCRIPTION OF THE DRAWINGS [0011] FIGS. 1-12 show in cross section an illustrative ink-jet printing method for fabricating an electrostatic actuator array; [0012] FIGS. 13-14 show top views for a device fabricated using the method illustrated in FIGS. 1-12; [0013] FIGS. 15-16 show in cross section another illustrative ink-jet printing method for fabricating an electrostatic actuator array; [0014] FIG. 17 illustrates a unit cell for an electrostatic actuator array in a closed state; [0015] FIG. 18 illustrates a unit cell for an electrostatic actuator array in an expanded state; [0016] FIG. 19 illustrates the functioning of an electrostatic actuator array; [0017] FIGS. 20-21 illustrate a method for providing devices to detect the state of an actuator cell; and [0018] FIG. 22 shows an illustrative control scheme for an electrostatic array. DETAILED DESCRIPTION Continue reading... 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