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Kentaro Sano patents

Recent patents with Kentaro Sano listed as an inventor - additional entries may be under other spellings.


Kentaro Sano - Related organizations: Canon Kabushiki Kaisha patents

Drawing apparatus and article manufacturing method

02/05/15 - 20150037731 - A drawing apparatus for performing drawing on a substrate includes: a decelerating electrostatic lens configured to decelerate a charged particle beam emitted by a charged particle source; a division unit having a plurality of apertures and configured to divide the charged particle beam decelerated by the decelerating electrostatic lens into
Inventors: Kentaro Sano

Drawing apparatus and method of manufacturing article

06/12/14 - 20140158903 - The present invention provides a drawing apparatus which performs drawing on a substrate with a plurality of charged particle beams, including an aperture array configured to include a plurality of apertures for shaping the respective charged particle beams, a deflection unit configured to include a plurality of first deflectors which
Inventors: Kentaro Sano, Go Tsuchiya

Drawing apparatus and method of manufacturing article

03/06/14 - 20140065549 - The present invention provides a drawing apparatus for performing drawing on a substrate using a plurality of charged particle beams, the apparatus including an aperture array including an opening region including a region in which a plurality of openings are formed to generate the plurality of charged particle beams, and
Inventors: Takahiro Nakayama, Kentaro Sano

Lithography apparatus, and method of manufacture of product

12/26/13 - 20130344443 - A lithography apparatus writes with a charged particle beam on a substrate scanned in a first direction. The apparatus includes a shielding device which individually shields a plurality of charged particle beams in first and second charged particle beam groups, a holder for the substrate movable in the first direction,
Inventors: Takayuki Kawamoto, Kentaro Sano

Charged particle optical system, drawing apparatus, and method of manufacturing article

10/17/13 - 20130273478 - The present invention provides a charged particle optical system which emits a charged particle beam, the system including an electrostatic lens, and a grid electrode opposed to the electrostatic lens along an optical axis of the electrostatic lens, and configured to form an electrostatic field in cooperation with the electrostatic
Inventors: Kentaro Sano, Masato Muraki, Akira Miyake, Yoshikiyo Yui

Drawing apparatus and method of manufacturing article

11/22/12 - 20120295203 - A drawing apparatus includes an aperture array, a lens array configured to form a plurality of crossovers of a plurality of charged particle beams from the aperture array, and a projection system including an element having a single aperture and configured to converge the plurality of charged particle beams corresponding
Inventors: Kentaro Sano

Drawing apparatus and method of manufacturing article

11/22/12 - 20120295202 - A drawing apparatus includes a first aperture array configured to split a diverging charged particle beam, a converging lens array configured to form a plurality of first crossovers of a plurality of charged particle beams from the first aperture array, a collimator lens having a principal plane where the plurality
Inventors: Kentaro Sano

Drawing apparatus and method of manufacturing article

09/27/12 - 20120241641 - A drawing apparatus performs drawing on a substrate with charged particle beams. The drawing apparatus includes an irradiation optical system including a collimator lens; an aperture array configured to split the charged particle beam into a plurality of charged particle beams; a converging lens array configured to form a plurality
Inventors: Kentaro Sano, Masato Muraki


### Kentaro Sano patent invention listings

The bibliographic references displayed about Kentaro Sano's patents are for a recent sample of Kentaro Sano's publicly published patent applications. The inventor/author may have additional bibliographic citations listed at the USPTO.gov. FreshPatents.com is not associated or affiliated in any way with the author/inventor or the United States Patent/Trademark Office but is providing this non-comprehensive sample listing for educational and research purposes using public bibliographic data published and disseminated from the United States Patent/Trademark Office public datafeed. This information is also available for free on the USPTO.gov website. If Kentaro Sano filed recent patent applications under another name, spelling or location then those applications could be listed on an alternate page. If no bibliographic references are listed here, it is possible there are no recent filings or there is a technical issue with the listing--in that case, we recommend doing a search on the USPTO.gov website.

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