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Keiichi Arita patents

Recent patents with Keiichi Arita listed as an inventor - additional entries may be under other spellings.

Keiichi Arita - Related organizations: Canon Kabushiki Kaisha patents

Charged particle beam apparatus, drawing apparatus, and method of manufacturing article

03/06/14 - 20140065547 - An apparatus includes: an image sensor including pixels which constitute rows; and a controller configured to control an irradiation operation of irradiating a pixel of the image sensor with a charged particle beam to generate a signal charge, a transfer operation of sequentially transferring, pixel by pixel in a column
Inventors: Keiichi Arita

Charged particle beam apparatus

06/06/13 - 20130143161 - An apparatus includes an irradiation device configured to irradiate an object with charged particle beams, a measurement device configured to measure a characteristic of each of charged particle beams, and a controller. The measurement device includes a plate including knife edges, and a sensor configured to detect a charged particle
Inventors: Keiichi Arita, Masahito Shinohara

Charged particle beam irradiation apparatus, charged particle beam drawing apparatus, and method of manufacturing article

03/21/13 - 20130071791 - An irradiation apparatus includes: a measurement device including a shield in which plural apertures are formed, and plural detectors configured to respectively detect plural charged particle beams respectively having passed through the plural apertures; a scanning mechanism configured to perform scanning of the plural beams and the measurement device relative
Inventors: Keiichi Arita, Masahito Shinohara

### Keiichi Arita patent invention listings

The bibliographic references displayed about Keiichi Arita's patents are for a recent sample of Keiichi Arita's publicly published patent applications. The inventor/author may have additional bibliographic citations listed at the is not associated or affiliated in any way with the author/inventor or the United States Patent/Trademark Office but is providing this non-comprehensive sample listing for educational and research purposes using public bibliographic data published and disseminated from the United States Patent/Trademark Office public datafeed. This information is also available for free on the website. If Keiichi Arita filed recent patent applications under another name, spelling or location then those applications could be listed on an alternate page. If no bibliographic references are listed here, it is possible there are no recent filings or there is a technical issue with the listing--in that case, we recommend doing a search on the website.


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