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Hirohito Ito patents

Recent patents with Hirohito Ito listed as an inventor - additional entries may be under other spellings.

Drawing apparatus, and method of manufacturing article

Drawing apparatus, and method of manufacturing article

Hirohito Ito - Related organizations: Canon Kabushiki Kaisha patents

06/12/14 - 20140162191 - Drawing apparatus, and method of manufacturing article
A drawing apparatus, that performs drawing on a substrate with charged particle beams based on first image data associated with a first grid, includes a blanker array including a plurality of columns each including a plurality of blankers, a scanning deflector configured to deflect at least one of the charged...
Inventors: Hirohito Ito (Canon Kabushiki Kaisha)

05/30/13 - 20130137044 - Scanning apparatus, drawing apparatus, and method of manufacturing article
A scanning apparatus which performs scan on an object with a charged particle beam includes: a blanking deflector configured to individually blank a plurality of charged particle beams based on control data; a scanning deflector configured to collectively deflect the plurality of charged particle beams to perform the scan; and...
Inventors: Hirohito Ito, Yusuke Sugiyama (Canon Kabushiki Kaisha)

07/07/11 - 20110164230 - Positioning apparatus, exposure apparatus, and device manufacturing method
A positioning apparatus according to the present invention includes: a tabletop having a plane; a plurality of actuators configured to be driven in a direction perpendicular to the plane to move the tabletop; and a control unit configured to measure a frequency response of the tabletop and, when a peak...
Inventors: Hirohito Ito (Canon Kabushiki Kaisha)

06/30/11 - 20110159189 - Imprint apparatus and method for producing article
An imprint apparatus is disclosed that forms, by pressing a resin applied onto a substrate and a mold against each other, a pattern on the substrate. The imprint apparatus includes a substrate stage that holds the substrate, and a control unit for controlling the position of the stage by outputting...
Inventors: Hirohito Ito, Nobushige Korenaga, Makoto Miyazaki (Canon Kabushiki Kaisha)

12/17/09 - 20090310145 - Positioning apparatus, positioning method, exposure apparatus, device manufacturing method, and methods of manufacturing positioning apparatus and exposure apparatus
A positioning apparatus comprises a controller for controlling a driving device, and positions a measurement portion of an optical element. The controller displaces a drive portion of the optical element by a specific operation of the driving device, and calculate a displacement of the optical element as a first displacement...
Inventors: Yusuke Sugiyama, Hirohito Ito (Canon Kabushiki Kaisha)

02/05/09 - 20090033901 - Driving apparatus and exposure apparatus using the same and device manufacturing method
A driving apparatus for driving an object in a vacuum environment includes a first chamber whose interior is maintained in a vacuum environment, a mover configured to load the object, and a stator, wherein the mover includes one or more magnets, the stator includes one or more coils. The mover...
Inventors: Hirohito Ito (Canon Kabushiki Kaisha)

### Hirohito Ito patent invention listings

The bibliographic references displayed about Hirohito Ito's patents are for a recent sample of Hirohito Ito's publicly published patent applications. The inventor/author may have additional bibliographic citations listed at the is not associated or affiliated in any way with the author/inventor or the United States Patent/Trademark Office but is providing this non-comprehensive sample listing for educational and research purposes using public bibliographic data published and disseminated from the United States Patent/Trademark Office public datafeed. This information is also available for free on the website. If Hirohito Ito filed recent patent applications under another name, spelling or location then those applications could be listed on an alternate page. If no bibliographic references are listed here, it is possible there are no recent filings or there is a technical issue with the listing--in that case, we recommend doing a search on the website.


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