High throughput serial wafer handling end station

Title: High throughput serial wafer handling end station

Brief Patent Description - Full Patent Description - Patent Claims

The Patent Description & Claims data below is from USPTO Patent Application 20080138178, High throughput serial wafer handling end station.

1. A workpiece handling system, comprising: a workpiece transport container configured to support a plurality of workpieces; a front end module in selective engagement with the workpiece transport container, wherein the front end module comprises: a first robot having a first dual-workpiece handling arm operably coupled thereto; a second robot having a second dual-workpiece handling arm operably coupled thereto; and an alignment mechanism disposed generally between the first and second robots, wherein the alignment mechanism comprises a characterization device and two or more vertically-aligned workpiece supports configured to respectively support two or more of the plurality of workpieces; a vacuum chamber, comprising: a third robot having a first single-workpiece handling arm operably coupled thereto; and a fourth robot having a second single-workpiece handling arm operably coupled thereto; a processing module operably coupled to the vacuum chamber; a first load lock chamber, a second load lock chamber, a third load lock chamber, and a fourth load lock chamber, wherein each of the first, second, third, and fourth load lock chambers is operably coupled to both the front end module and the vacuum chamber and configured to support two or more of the plurality of workpieces therein, wherein: the first robot is configured to selectively transfer the plurality of workpieces between the workpiece transport container, the alignment mechanism, and the second and fourth load lock chambers via the first dual-workpiece handling arm, the second robot is configured to selectively transfer the plurality of workpieces between the workpiece transport container, the alignment mechanism, and the first and third load lock chambers via the second dual-workpiece handling arm, the third robot is configured to selectively transfer the plurality of workpieces between the first and third load lock chambers and the process module via the first single-workpiece handling arm, and the fourth robot is configured to selectively transfer the plurality of workpieces between the second and fourth load lock chambers and the process module via the second single-workpiece handling arm; and a controller configured to selectively transfer the plurality of workpieces between the workpiece transport container, alignment mechanism, first, second, third, and fourth load lock chambers, and process module via a control of the first, second, third, and fourth robots.

2. The workpiece handling system of claim 1, wherein the first and third load lock chambers are generally aligned vertically, therein defining a first load lock module, and wherein the second and fourth load lock chambers are further generally aligned vertically, therein defining a second load lock module.

3. The workpiece handling system of claim 1, wherein the first, second, third, and fourth load lock chambers each respectively comprise a first isolation valve associated with the front end module and a second isolation valve associated with the vacuum chamber, wherein each first isolation valve is configured to selectively permit a fluid communication between the front end module and a respective internal volume of the first, second, third, and fourth load lock chambers, and wherein each second isolation valve is configured to selectively permit a fluid communication between the vacuum chamber and the respective internal volume of the first, second, third, and fourth load lock chambers.

4. The workpiece handling system of claim 3, wherein the respective internal volume of the first, second, third, and fourth load lock chambers each comprises first and second volumes generally separated by a mechanical isolation plate disposed therebetween, wherein the first volume is configured to generally confine one of the plurality of workpieces, wherein the second volume is configured to generally confine another one of the plurality of workpieces, and wherein the mechanical isolation plate generally prevents cross-contamination between the first volume and the second volume of each respective internal volume.

5. The workpiece handling system of claim 1, wherein each of the first and second dual-workpiece handling arms is configured to alternatively support one or two of the plurality of workpieces.

6. The workpiece handling system of claim 5, wherein the first robot is configured to selectively concurrently transfer two of the plurality of workpieces between the workpiece transport container, the alignment mechanism, and the second and fourth load lock chambers via the first dual-workpiece handling arm.

7. The workpiece handling system of claim 6, wherein the second robot is configured to selectively serially remove one of the plurality of workpieces at a time from the alignment mechanism and to transfer the two of the plurality of workpieces at a time to and from the first and second load lock chambers.

8. The workpiece handling system of claim 1, wherein each of the first and second dual-workpiece handling arms is configured to concurrently support two workpieces.

9. The workpiece handling system of claim 1, wherein each of the first and second single-workpiece handling arms is configured to support a single workpiece.

10. The workpiece handling system of claim 1, wherein the process module comprises an electrostatic chuck configured to selectively support each of the plurality of workpieces.

11. The workpiece handling system of claim 10, wherein the process module comprises a processing robot configured to translate the electrostatic chuck through a process medium.

12. The workpiece handling system of claim 1, wherein the process module comprises an ion implantation system configured to implant ions into the plurality of workpieces.

13. The workpiece handling system of claim 12, wherein the process module further comprises a dosimetry system.

14. The workpiece handling system of claim 1, wherein the front end module comprises an internal environment at substantially atmospheric pressure, and wherein the vacuum chamber and process module comprise a generally evacuated internal environment.

15. The workpiece handling system of claim 14, further comprising a high vacuum pump in fluid communication with one or more of the vacuum chamber and the process module.

16. The workpiece handling system of claim 1, wherein the alignment mechanism further comprises a base and an elevator device operably coupled thereto, wherein the elevator device is configured to individually vertically translate the two or more workpieces, therein respectively translating the two or more workpieces to a characterization position.

17. The workpiece handling system of claim 16, wherein the two or more vertically-aligned workpiece supports comprise two or more workpiece tray stations aligned generally vertically with respect to one another, wherein each workpiece tray station is operable to selectively support a respective one of the plurality of workpieces in a buffer position.

18. The workpiece handling system of claim 17, wherein the elevator device comprises an elevator shaft operably coupled to an elevator workpiece support, wherein the elevator shaft is in linear sliding engagement with the base, wherein the elevator workpiece support is operable to selectively support each of the plurality of workpieces from the plurality of workpiece tray stations, and wherein the elevator shaft is operable to vertically translate the plurality of workpieces from the respective buffer position to a characterization position.

19. The workpiece handling system of claim 18, wherein the characterization device is operable to detect one or more characteristics of the plurality of workpieces when each workpiece is at the characterization position.

20. The workpiece handling system of claim 19, wherein the characterization device comprises an optical sensor, wherein the optical sensor is operable to detect the one or more characteristics of the plurality of workpieces when each workpiece is at the characterization position.

21. The workpiece handling system of claim 20, wherein the one or more characteristics comprise one or more of a notch in the workpiece, a position of the workpiece with respect to the elevator workpiece support, and an indicia associated with the workpiece.

22. The workpiece handling system of claim 21, wherein the position of the workpiece comprises one or more of a rotational position of the workpiece and a center of the workpiece.

23. The workpiece handling system of claim 18, further comprising a controller operable to control the workpiece tray stations, elevator device, and characterization device.

24. The workpiece handling system of claim 18, wherein each workpiece tray station comprises: a plurality of workpiece supports associated with a circumference of the workpiece, wherein, in a retracted position, the plurality of workpiece supports are operable to support the workpiece; and a horizontal translation device operably coupled to the plurality of workpiece supports, wherein the horizontal translation device is operable to selectively radially extend the plurality of workpiece supports from the retracted position to an extended position beyond the circumference of the workpiece, and wherein the elevator device is operable to support the workpiece when the plurality of workpiece supports are in the extended position.

25. The workpiece handling system of claim 24, wherein the elevator device is operable to generally lift the workpiece from the plurality of workpiece supports when the plurality of workpiece supports are in the retracted position, and to translate the workpiece below the plurality of workpiece supports when the plurality of workpiece supports are in the extended position.

26. The workpiece handling system of claim 24, wherein the plurality of workpiece supports comprise two or more arcuate support members.

27. The workpiece handling system of claim 18, wherein the elevator shaft is further rotationally coupled to the base.

28. The workpiece handling system of claim 27, further comprising a motor operably coupled to the elevator shaft, wherein the motor is operable to rotate the elevator shaft about an axis thereof.

29. The workpiece handling system of claim 28, wherein the motor comprises a servo motor.

30. The workpiece handling system of claim 27, wherein the elevator workpiece support comprises a vacuum chuck operable to selectively grip each of the plurality of workpieces.

31. The workpiece handling system of claim 1, wherein the workpiece transport container comprises a FOUP.

32. A method for handling a plurality of workpieces in an ion implantation system, the method comprising: concurrently removing a first workpiece and a second workpiece from a workpiece transport container via a first robot in a generally atmospheric environment; concurrently placing the first and second workpieces on respective first and second workpiece supports of an alignment mechanism; raising the first workpiece from the first workpiece support via an elevator device and translating the first workpiece to a characterization position; characterizing the first workpiece; removing the first workpiece from the first workpiece support via a second robot; raising the second workpiece from the second workpiece support via the elevator device and translating the second workpiece to the characterization position; characterizing the second workpiece; removing the second workpiece from the second workpiece support via the second robot; generally simultaneously inserting the first and second workpieces into a first load lock chamber; and generally evacuating the first load lock chamber.

33. The method of claim 32; further comprising: transferring the first workpiece from the first load lock chamber to a vacuum chamber via a third robot; processing the first workpiece through a process medium associated with the vacuum chamber; transferring the first workpiece from the vacuum chamber to a second load lock chamber via a fourth robot; transferring the second workpiece from the first load lock chamber to the vacuum chamber via the third robot; processing the second workpiece through the process medium; transferring the second workpiece from the vacuum chamber to the second load lock chamber via the fourth robot; and generally venting the second load lock chamber to atmosphere.

34. The method of claim 33, further comprising: generally simultaneously transferring the first and second workpieces from the second load lock chamber to the workpiece transport container via the first robot.

35. The method of claim 33, further comprising: generally simultaneously removing a third workpiece and a fourth workpiece from the workpiece transport container via the first robot; generally simultaneously placing the third and fourth workpieces on the respective first and second workpiece supports of the alignment mechanism; raising the third workpiece from the first workpiece support via the elevator device and translating the third workpiece to the characterization position; characterizing the third workpiece; removing the third workpiece from the first workpiece support via the second robot; raising the fourth workpiece from the second workpiece support via the elevator device and translating the second workpiece to the characterization position; characterizing the second workpiece; removing the second workpiece from the second workpiece support via the second robot; generally simultaneously inserting the third and fourth workpieces into a third load lock chamber; and generally evacuating the third load lock chamber.

36. The method of claim 35, further comprising: transferring the third workpiece from the third load lock chamber to the vacuum chamber via the third robot; processing the third workpiece through the process medium; transferring the third workpiece from the vacuum chamber to a fourth load lock chamber via the fourth robot; transferring the fourth workpiece from the third load lock chamber to the vacuum chamber via the third robot; processing the fourth workpiece through the process medium; transferring the fourth workpiece from the vacuum chamber to the fourth load lock chamber via the fourth robot; and generally venting the fourth load lock chamber to atmosphere.

37. The method of claim 36, further comprising: generally simultaneously transferring the third and fourth workpieces from the fourth load lock chamber to the workpiece transport container via the first robot.

38. The method of claim 35, wherein the first and second workpieces are transferred from the second load lock chamber to the workpiece transport container generally concurrent with the third and fourth workpieces being characterized and transferred into the third load lock chamber.

39. The method of claim 35, wherein the third robot transfers the third workpiece into the vacuum chamber after or while the second workpiece is processed through the process medium.

40. A method for handling a plurality of workpieces in an ion implantation system, the method comprising: (a) removing a first workpiece and a second workpiece in parallel from a first workpiece transport container via a first robot; (b) placing the first workpiece and second workpiece in parallel on an alignment mechanism via the first robot; (c) aligning the first workpiece via the alignment mechanism; (d) removing the first workpiece from the alignment mechanism via a second robot; (e) aligning the second workpiece via the alignment mechanism; (f) removing the second workpiece from the alignment mechanism via the second robot; (g) placing the first workpiece and second workpiece in parallel in a first load lock chamber via the second robot; (h) generally evacuating the first load lock chamber; (i) removing the first workpiece from the first load lock chamber and placing the first workpiece in a process chamber via a third robot; (j) implanting ions into the first workpiece; (k) removing the first workpiece from the process chamber and placing the first workpiece in a second load lock chamber via a fourth robot while removing the second workpiece from the first load lock chamber and placing the second workpiece in the process chamber via the third robot; (l) implanting ions into the second workpiece; (m) removing the second workpiece from the process chamber and placing the second workpiece in the second load lock chamber via the fourth robot; (n) venting the second load lock chamber to generally atmospheric pressure; (o) removing the first workpiece and second workpiece in parallel from the second load lock chamber via the first robot; and (p) placing the first workpiece and second workpiece in parallel in a second workpiece transport container.

41. The method of claim 40, further comprising: (q) removing a third workpiece and a fourth workpiece in parallel from the first workpiece transport container via the first robot (r) placing the third workpiece and fourth workpiece in parallel on the alignment mechanism via the first robot; (s) aligning the third workpiece via the alignment mechanism; (t) removing the third workpiece from the alignment mechanism via the second robot; (u) aligning the fourth workpiece via the alignment mechanism; (v) removing the fourth workpiece from the alignment mechanism via the second robot; (w) placing the third workpiece and fourth workpiece in parallel in a third load lock chamber via the second robot; (x) generally evacuating the third load lock chamber; (y) removing the third workpiece from the third load lock chamber and placing the third workpiece in the process chamber via the third robot; (z) implanting ions into the third workpiece; (aa) removing the third workpiece from the process chamber and placing the third workpiece in a fourth load lock chamber via the fourth robot while removing the fourth workpiece from the third load lock chamber and placing the fourth workpiece in the process chamber via the third robot; (bb) implanting ions into the fourth workpiece; (cc) removing the fourth workpiece from the process chamber and placing the fourth workpiece in the fourth load lock chamber via the fourth robot; (dd) venting the fourth load lock chamber to generally atmospheric pressure; (ee) removing the third workpiece and fourth workpiece in parallel from the fourth load lock chamber via the first robot; and (ff) placing the third workpiece and fourth workpiece in parallel in the second workpiece transport container.

42. The method of claim 41, wherein: acts (s), (t), (u), (v), and (ff) are performed at least partially concurrently with act (h), and acts (i), (j), (k), and (l) are performed at least partially concurrently with act (x).

43. The method of claim 41, wherein: acts (e), (f), (q), and (r) are performed at least partially concurrently with act (dd), and acts (z), (aa), and (bb) are performed at least partially concurrently with act (n).

44. The method of claim 40, wherein the first workpiece transport container and the second workpiece transport container are the same workpiece transport container.

45. The method of claim 40, wherein act (b) comprises concurrently placing the first workpiece on a first workpiece support of the alignment mechanism and placing the second workpiece on a second workpiece support of the alignment mechanism.

46. The method of claim 45, wherein act (c) comprises: raising the first workpiece from the first workpiece support to a characterization position via an elevator device of the alignment mechanism; rotating the first workpiece via the elevator device; and determining one or more characteristics of the first workpiece, wherein the first workpiece is generally aligned with respect to the alignment mechanism via the rotation thereof based on the one or more characteristics of the first workpiece.

47. The method of claim 46, wherein act (d) comprises removing the first workpiece from the first workpiece support via the second robot.

48. The method of claim 45, wherein act (e) comprises: raising the second workpiece from the second Workpiece support to the characterization position via the elevator device of the alignment mechanism; rotating the second workpiece via the elevator device; and determining one or more characteristics of the second workpiece, wherein the second workpiece is generally aligned with respect to the alignment mechanism via the rotation thereof based on the one or more characteristics of the second workpiece.

49. The method of claim 48, wherein act (f) comprises removing the second workpiece from the second workpiece support via the second robot.

50. A workpiece handling system, comprising: a workpiece transport container configured to support a plurality of workpieces; a front end module comprising a pair of atmospheric robots and a multi-workpiece alignment mechanism generally disposed between the pair of atmospheric robots, wherein the front end module is selectively operably coupled to the workpiece transport container, and wherein each of the pair of atmospheric robots comprises a dual workpiece handling arm; a vacuum chamber comprising a pair of vacuum robots, wherein each of the vacuum robots comprises a single workpiece handling arm; a processing module operably coupled to the vacuum module; four dual-workpiece load lock chambers operably coupled to the front end module and the vacuum chamber; and a controller configured to selectively transfer two or more workpieces at a time between two or more of the workpiece transport container, alignment mechanism and four dual-workpiece load lock chambers via a control of the pair of atmospheric robots, and wherein the controller is further configured to selectively individually transfer each workpiece between the four dual-workpiece load lock chambers and the processing module via a control of the pair of vacuum robots.

51. The workpiece handling system of claim 50, wherein the workpiece transport container comprises a FOUP.

52. The workpiece handling system of claim 50, comprising a plurality of workpiece transport containers operably coupled to the front end module, and wherein the pair of atmospheric robots are operable to transfer the plurality of workpieces between the plurality of workpiece transport containers, alignment mechanism and four dual-workpiece load lock chambers via the control of the pair of atmospheric robots.

Brief Patent Description - Full Patent Description - Patent Claims

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