Heating inventions 07/07

20070172786 - Double-chamber type heat-treating furnace: A double-chamber type heat-treating furnace comprises a hermetically closable cooling furnace, a hermetically closable heating furnace, and a transfer unit. The transfer unit has free rollers disposed within the heating and cooling chambers and for supporting the object at only both ends in a direction of width thereof, a push-pull... Agent: Griffin & Szipl, PC

20070166655 - Thermal processing apparatus: A thermal processing apparatus for thermally processing a substrate in a processing chamber includes a heating plate for mounting and thermally processing the substrate thereon, and a lid body covering the heating plate from above to constitute a portion of the processing chamber. The lid body has a ceiling plate... Agent: Oblon, Spivak, Mcclelland, Maier & Neustadt, P.C.

20070166656 - Heating system of batch type reaction chamber and method thereof: A heating system of a batch type reaction chamber for semiconductor device and a method thereof are disclosed. Each heat unit of heating groups has different height and caloric value at right angles according to the divided areas, thereby it can control an uniform temperature incline of the entire process... Agent: Ditthavong Mori & Steiner, P.C.

20070166657 - Heat treatment system and method therefore: In a vertical heat treatment system for carrying an object W to be treated, which is housed in a treating-object housing box 2 closed by an opening/closing lid 10, in a treating-object transfer area 46 via an opening 28, which is formed in a partition wall 26 separating a housing-box... Agent: Smith, Gambrell & Russell

20070160947 - Heating device and heating method: A heating device provided with a cooling plate and a heating plate is formed in a low height, and floats a substrate above the cooling plate and the heating plate and moves the substrate horizontally between the cooling plate and the heating plate by the pressure of a gas. A... Agent: Oblon, Spivak, Mcclelland, Maier & Neustadt, P.C.

20070160948 - Method and apparatus for heating a sheet-like product: A method and apparatus for heating a sheet-like material to a predetermined temperature profile along the length and across the width of the material. The sheet-like material is transported within a furnace relative to at least one burner holder above or below, or above and below, the material. Each burner... Agent: Alfred J Mangels