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Heating inventions 04/06

Recently published patent applications awaiting approval from the USPTO. Recent week's RSS XML file available below.
Listing format for abstract view: USPTO application #, Title, Abstract excerpt,Patent Agent. Listing format for list view: USPTO National Class full category number, title of the patent application.   04/27/2006 > patent applications in patent subcategories.
  
04/20/2006 > 1 patent applications in 1 patent subcategories.

20060084023 - Method of and auxiliary cleaner for use in cleaning a diffusion furnace of semiconductor manufacturing equipment: A diffusion furnace of semiconductor manufacturing equipment is cleaned efficiently with a cleaning gas (ClF3) by using an auxiliary cleaner. The auxiliary cleaner is inserted into an inner tube of the wafer diffusion furnace. The auxiliary cleaner has a cylindrical body that occupies a central region of the interior of...

  
04/13/2006 > 1 patent applications in 1 patent subcategories.

20060078839 - Heat treatment jig for semiconductor wafer: A heat treatment jig by the invention comprising: the diameter of a disk-type structure being 60% or more of that of loaded semiconductor wafers; the thickness being 1.0 mm or more but 10 mm or less; the surface roughness Ra of 0.1 μm or more but 100 μm or less...

  
04/06/2006 > 1 patent applications in 1 patent subcategories.
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