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10/25/07 - USPTO Class 310 | 57 views | #20070247018 | Prev - Next | About this Page

Electrostatic actuation method and electrostatic actuator with integral electrodes for microelectromechanical systems

Title: Electrostatic actuation method and electrostatic actuator with integral electrodes for microelectromechanical systems

Brief Patent Description - Full Patent Description - Patent Claims

The Patent Description & Claims data below is from USPTO Patent Application 20070247018, Electrostatic actuation method and electrostatic actuator with integral electrodes for microelectromechanical systems.

1. An electrostatic actuation method for micro-electromechanical systems, comprising: providing a first electrode (10) integral to a movable part (100) of the micro-electromechanical system, and providing at least a second electrode (20, 20') also integral to the same movable part (100) of the micro-electromechanical system, there being a gap (40) between said first and second electrodes, where said first and second electrodes are electrically isolated from each other using an electrically non-conductive material (30), inducing a charge in the electrodes which generates a force between the electrodes, said force acting between the electrodes causing the deformation of the movable part of the micro-electromechanical system.

2. Electrostatic actuation method according to claim 1, wherein it comprises providing the electrically non-conductive material (30) on at least a first portion along the length of the second electrode.

3. Electrostatic actuation method according to claim 2, wherein said first portion is a first end portion of the second electrode.

4. Electrostatic actuation method according to any of claims 2-3, wherein it comprises providing the electrically non-conductive material (30) also on at least a second portion of the second electrode.

5. Electrostatic actuation method according to claims 3-4, wherein said second portion is a second end portion of the second electrode, being said second end opposite to the first end.

6. Electrostatic actuation method according to any previous claim, wherein it comprises providing at least two second electrodes (20, 20') along the length of the movable part.

7. Electrostatic actuation method according to any previous claim, wherein it comprises providing a plurality of second electrodes on the same side along the length of the movable part.

8. Electrostatic actuation method according to claims 6 or 7, wherein it comprises providing at least two second electrodes (20, 20') of the type as defined in claims 2 or 3 and/or of the type defined in claims 4 or 5.

9. Electrostatic actuation method according to any previous claim, wherein the charges induced are of the same sign thereby causing a repulsing force between the electrodes.

10. Electrostatic actuation method according to any of claims 1-6, wherein the charges induced are of opposite sign thereby causing an attractive force between the electrodes.

11. Electrostatic actuation method according to any previous claim, wherein said second electrode is, at the most, as long as the first electrode is.

12. An electrostatic actuator for micro-electromechanical systems MEMS, which comprises at least first and second electrodes (10, 20, 20'), the electrostatic actuator is characterised in that said first electrode (10) is integral to a movable part (100) of the micro-electromechanical system, and said second electrode (20, 20') is integral to the same movable part (100) of the micro-electromechanical system, there being a gap (40) between said first and second electrodes, where said first and second electrodes are electrically isolated from each other with the use of an electrically non-conductive material (30), wherein in response to a charge induced in the electrodes a force is generated between the electrodes, causing the deformation of the movable part of the micro-electromechanical system.

13. Electrostatic actuator according to claim 12, wherein the voltage for actuating said first and second electrodes is carried by the movable part.

14. Electrostatic actuator according to claim 12, wherein the voltage for actuating said first and second electrodes is carried by one or more additional layers.

15. Electrostatic actuator according to claim 14, wherein said one or more additional layers are flexible, such that they do affect as less as possible the movement of the movable part.

16. Electrostatic actuator according to any of claims 12-15, wherein said electrically non-conductive material (30) isolates the second electrode from the first electrode on at least a first portion along the length of the second electrode.

17. Electrostatic actuator according to claim 16, wherein said first portion is a first end portion of the second electrode.

18. Electrostatic actuator according to any of claims 16-17, wherein said electrically non-conductive material (30) isolates the second electrode from the first electrode also on at least a second portion of the second electrode.

19. Electrostatic actuator according to claims 17 and 18, wherein said second portion is a second end portion of the second electrode, being said second end opposite to the first end.

20. Electrostatic actuator according to any of claims 12-19, wherein it comprises at least two second electrodes (20, 20') along the length of the movable part.

21. Electrostatic actuator according to any of claims 12-20, wherein it comprises a plurality of second electrodes on the same side of the movable part.

22. Electrostatic actuator according to claims 20 or 21, wherein said at least two second electrodes are of the type defined in claims 16 or 17 and/or of the type defined in claims 18 or 19.

23. Electrostatic actuator according to any of claims 12-22, wherein said electrically non-conductive material permits the deformation of the movable part.

24. Microswitch which uses the electrostatic actuation method of any of claims 1-11.

25. Microswitch which includes an electrostatic actuator according to any of claims 12-23.

Brief Patent Description - Full Patent Description - Patent Claims

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