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Cymer Inc Legal Department patents

The following is a sampling of recent Cymer Inc Legal Department patent applications (USPTO Patent Application #, Patent Title) sorted by month.

March 2010 - Cymer Inc Legal Department patents

20100066989 - Spectral purity filters and methods therefor
20100067983 - Blind motorized coupling arrangements for coupling uv light source subsystem and scanner subsystem in a uv lithography system and methods therefor

August 2008 - Cymer Inc Legal Department patents

20080197297 - High repetition rate laser produced plasma euv light source

February 2008 - Cymer Inc Legal Department patents

20080037010 - Method and apparatus for bandwidth measurement and bandwidth parameter calculation for laser light
20080037025 - Methods and apparatus for bandwidth measurement and bandwidth parameter calculation for laser light

January 2008 - Cymer Inc Legal Department patents

20080017801 - Euv light source
20080002752 - Anodes for fluorine gas discharge lasers

October 2007 - Cymer Inc Legal Department patents

20070237192 - Confocal pulse stretcher

July 2007 - Cymer Inc Legal Department patents

20070170378 - Euv light source optical elements
20070158596 - Euv light source
20070158597 - Euv light source

June 2007 - Cymer Inc Legal Department patents

20070125970 - Euv light source

May 2007 - Cymer Inc Legal Department patents

20070114468 - Collector for euv light source
20070114469 - Collector for euv light source
20070114470 - Collector for euv light source

February 2007 - Cymer Inc Legal Department patents

20070029511 - High repetition rate laser produced plasma euv light source
20070023711 - Discharge produced plasma euv light source

November 2006 - Cymer Inc Legal Department patents

20060251135 - Timing control for two-chamber gas discharge laser system

August 2006 - Cymer Inc Legal Department patents

20060192155 - Method and apparatus for euv light source target material handling

June 2006 - Cymer Inc Legal Department patents

20060131515 - Collector for euv light source

May 2006 - Cymer Inc Legal Department patents

20060091109 - Euv collector debris management

April 2006 - Cymer Inc Legal Department patents

20060072636 - Laser output light pulse beam parameter transient correction system

January 2006 - Cymer Inc Legal Department patents

20060001878 - Systems and methods for implementing an interaction between a laser shaped as a line beam and a film deposited on a substrate



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